11/30/2012	7:17:02 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:34:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/30/2012	7:34:21 AM	Recipe started at 7:34 AM
11/30/2012	7:34:21 AM	Helium valve closed
11/30/2012	7:34:21 AM	H2 valve closed
11/30/2012	7:34:21 AM	BCl3 valve closed
11/30/2012	7:34:21 AM	PH3 valve closed
11/30/2012	7:34:21 AM	SiCl4 pre valve closed
11/30/2012	7:34:21 AM	SiCl4 post valve closed
11/30/2012	7:34:21 AM	Main Vac valve closed
11/30/2012	7:34:21 AM	Bypass valve closed
11/30/2012	7:34:21 AM	Bubbler valve closed
11/30/2012	7:34:21 AM	Helium MFC set to  0.000000
11/30/2012	7:34:21 AM	H2 MFC set to  0.000000
11/30/2012	7:34:21 AM	BCl3 MFC set to  0.000000
11/30/2012	7:34:21 AM	PH3 MFC set to  0.000000
11/30/2012	7:34:21 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:34:21 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:34:21 AM	Tube furnace set to 0
11/30/2012	7:34:24 AM	H2 valve closed
11/30/2012	7:34:24 AM	BCl3 valve closed
11/30/2012	7:34:24 AM	PH3 valve closed
11/30/2012	7:34:24 AM	SiCl4 pre valve closed
11/30/2012	7:34:24 AM	SiCl4 post valve closed
11/30/2012	7:34:24 AM	Main Vac valve closed
11/30/2012	7:34:24 AM	Bypass valve closed
11/30/2012	7:34:24 AM	Bubbler valve closed
11/30/2012	7:34:24 AM	Helium valve opened
11/30/2012	7:34:24 AM	Helium MFC set to  500.000000
11/30/2012	7:34:24 AM	H2 MFC set to  0.000000
11/30/2012	7:34:24 AM	BCl3 MFC set to  0.000000
11/30/2012	7:34:24 AM	PH3 MFC set to  0.000000
11/30/2012	7:34:24 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:34:24 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:34:24 AM	Tube furnace set to 0
11/30/2012	7:35:37 AM	Helium valve closed
11/30/2012	7:35:37 AM	H2 valve closed
11/30/2012	7:35:37 AM	BCl3 valve closed
11/30/2012	7:35:37 AM	PH3 valve closed
11/30/2012	7:35:37 AM	SiCl4 pre valve closed
11/30/2012	7:35:37 AM	SiCl4 post valve closed
11/30/2012	7:35:37 AM	Main Vac valve closed
11/30/2012	7:35:37 AM	Bypass valve closed
11/30/2012	7:35:37 AM	Bubbler valve closed
11/30/2012	7:35:37 AM	Helium MFC set to  0.000000
11/30/2012	7:35:37 AM	H2 MFC set to  0.000000
11/30/2012	7:35:37 AM	BCl3 MFC set to  0.000000
11/30/2012	7:35:37 AM	PH3 MFC set to  0.000000
11/30/2012	7:35:37 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:35:37 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:35:37 AM	Tube furnace set to 0
11/30/2012	7:35:38 AM	Run finished at 7:35 AM
11/30/2012	7:35:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/30/2012	7:42:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/30/2012	7:42:46 AM	Recipe started at 7:42 AM
11/30/2012	7:42:46 AM	Helium valve closed
11/30/2012	7:42:46 AM	H2 valve closed
11/30/2012	7:42:46 AM	BCl3 valve closed
11/30/2012	7:42:46 AM	PH3 valve closed
11/30/2012	7:42:46 AM	SiCl4 pre valve closed
11/30/2012	7:42:46 AM	SiCl4 post valve closed
11/30/2012	7:42:46 AM	Main Vac valve closed
11/30/2012	7:42:46 AM	Bubbler valve closed
11/30/2012	7:42:46 AM	Bypass valve opened
11/30/2012	7:42:46 AM	Helium MFC set to  0.000000
11/30/2012	7:42:46 AM	H2 MFC set to  0.000000
11/30/2012	7:42:46 AM	BCl3 MFC set to  0.000000
11/30/2012	7:42:46 AM	PH3 MFC set to  0.000000
11/30/2012	7:42:46 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:42:46 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:42:46 AM	Tube furnace set to 0
11/30/2012	7:44:04 AM	Helium valve closed
11/30/2012	7:44:04 AM	H2 valve closed
11/30/2012	7:44:04 AM	BCl3 valve closed
11/30/2012	7:44:04 AM	PH3 valve closed
11/30/2012	7:44:04 AM	SiCl4 pre valve closed
11/30/2012	7:44:04 AM	SiCl4 post valve closed
11/30/2012	7:44:04 AM	Main Vac valve closed
11/30/2012	7:44:04 AM	Bubbler valve closed
11/30/2012	7:44:04 AM	Bypass valve opened
11/30/2012	7:44:04 AM	Helium MFC set to  0.000000
11/30/2012	7:44:04 AM	H2 MFC set to  0.000000
11/30/2012	7:44:04 AM	BCl3 MFC set to  0.000000
11/30/2012	7:44:04 AM	PH3 MFC set to  0.000000
11/30/2012	7:44:04 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:44:04 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:44:04 AM	Tube furnace set to 0
11/30/2012	7:45:04 AM	Helium valve closed
11/30/2012	7:45:04 AM	H2 valve closed
11/30/2012	7:45:04 AM	BCl3 valve closed
11/30/2012	7:45:04 AM	PH3 valve closed
11/30/2012	7:45:04 AM	SiCl4 pre valve closed
11/30/2012	7:45:04 AM	SiCl4 post valve closed
11/30/2012	7:45:04 AM	Bypass valve closed
11/30/2012	7:45:04 AM	Bubbler valve closed
11/30/2012	7:45:04 AM	Main Vac valve opened
11/30/2012	7:45:04 AM	Helium MFC set to  0.000000
11/30/2012	7:45:04 AM	H2 MFC set to  0.000000
11/30/2012	7:45:04 AM	BCl3 MFC set to  0.000000
11/30/2012	7:45:04 AM	PH3 MFC set to  0.000000
11/30/2012	7:45:04 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:45:04 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:45:04 AM	Tube furnace set to 0
11/30/2012	7:45:05 AM	Run finished at 7:45 AM
11/30/2012	7:45:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/30/2012	7:45:17 AM	Tube furnace set to 150
11/30/2012	7:50:41 AM	Recipe started at 7:50 AM
11/30/2012	7:50:41 AM	Helium valve closed
11/30/2012	7:50:41 AM	H2 valve closed
11/30/2012	7:50:41 AM	BCl3 valve closed
11/30/2012	7:50:41 AM	PH3 valve closed
11/30/2012	7:50:41 AM	SiCl4 pre valve closed
11/30/2012	7:50:41 AM	SiCl4 post valve closed
11/30/2012	7:50:41 AM	Bypass valve closed
11/30/2012	7:50:41 AM	Bubbler valve closed
11/30/2012	7:50:41 AM	Main Vac valve opened
11/30/2012	7:50:41 AM	Helium MFC set to  0.000000
11/30/2012	7:50:41 AM	H2 MFC set to  0.000000
11/30/2012	7:50:41 AM	BCl3 MFC set to  0.000000
11/30/2012	7:50:41 AM	PH3 MFC set to  0.000000
11/30/2012	7:50:41 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:50:41 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:50:41 AM	Tube furnace set to 150
11/30/2012	7:51:11 AM	H2 valve closed
11/30/2012	7:51:11 AM	BCl3 valve closed
11/30/2012	7:51:11 AM	PH3 valve closed
11/30/2012	7:51:11 AM	SiCl4 pre valve closed
11/30/2012	7:51:11 AM	SiCl4 post valve closed
11/30/2012	7:51:11 AM	Bypass valve closed
11/30/2012	7:51:11 AM	Bubbler valve closed
11/30/2012	7:51:11 AM	Helium valve opened
11/30/2012	7:51:11 AM	Main Vac valve opened
11/30/2012	7:51:11 AM	Helium MFC set to  20.000000
11/30/2012	7:51:11 AM	H2 MFC set to  0.000000
11/30/2012	7:51:11 AM	BCl3 MFC set to  0.000000
11/30/2012	7:51:11 AM	PH3 MFC set to  0.000000
11/30/2012	7:51:11 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:51:11 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:51:11 AM	Tube furnace set to 150
11/30/2012	7:51:41 AM	Helium valve closed
11/30/2012	7:51:41 AM	H2 valve closed
11/30/2012	7:51:41 AM	BCl3 valve closed
11/30/2012	7:51:41 AM	PH3 valve closed
11/30/2012	7:51:41 AM	SiCl4 pre valve closed
11/30/2012	7:51:41 AM	SiCl4 post valve closed
11/30/2012	7:51:41 AM	Bypass valve closed
11/30/2012	7:51:42 AM	Bubbler valve closed
11/30/2012	7:51:42 AM	Main Vac valve opened
11/30/2012	7:51:42 AM	Helium MFC set to  0.000000
11/30/2012	7:51:42 AM	H2 MFC set to  0.000000
11/30/2012	7:51:42 AM	BCl3 MFC set to  0.000000
11/30/2012	7:51:42 AM	PH3 MFC set to  0.000000
11/30/2012	7:51:42 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:51:42 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:51:42 AM	Tube furnace set to 150
11/30/2012	7:52:12 AM	H2 valve closed
11/30/2012	7:52:12 AM	BCl3 valve closed
11/30/2012	7:52:12 AM	PH3 valve closed
11/30/2012	7:52:12 AM	SiCl4 pre valve closed
11/30/2012	7:52:12 AM	SiCl4 post valve closed
11/30/2012	7:52:12 AM	Bypass valve closed
11/30/2012	7:52:12 AM	Bubbler valve closed
11/30/2012	7:52:12 AM	Helium valve opened
11/30/2012	7:52:12 AM	Main Vac valve opened
11/30/2012	7:52:12 AM	Helium MFC set to  20.000000
11/30/2012	7:52:12 AM	H2 MFC set to  0.000000
11/30/2012	7:52:12 AM	BCl3 MFC set to  0.000000
11/30/2012	7:52:12 AM	PH3 MFC set to  0.000000
11/30/2012	7:52:12 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:52:12 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:52:12 AM	Tube furnace set to 150
11/30/2012	7:52:42 AM	Helium valve closed
11/30/2012	7:52:42 AM	H2 valve closed
11/30/2012	7:52:42 AM	BCl3 valve closed
11/30/2012	7:52:42 AM	PH3 valve closed
11/30/2012	7:52:42 AM	SiCl4 pre valve closed
11/30/2012	7:52:42 AM	SiCl4 post valve closed
11/30/2012	7:52:42 AM	Bypass valve closed
11/30/2012	7:52:42 AM	Bubbler valve closed
11/30/2012	7:52:42 AM	Main Vac valve opened
11/30/2012	7:52:42 AM	Helium MFC set to  0.000000
11/30/2012	7:52:42 AM	H2 MFC set to  0.000000
11/30/2012	7:52:42 AM	BCl3 MFC set to  0.000000
11/30/2012	7:52:42 AM	PH3 MFC set to  0.000000
11/30/2012	7:52:42 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:52:42 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:52:42 AM	Tube furnace set to 150
11/30/2012	7:53:12 AM	H2 valve closed
11/30/2012	7:53:12 AM	BCl3 valve closed
11/30/2012	7:53:12 AM	PH3 valve closed
11/30/2012	7:53:12 AM	SiCl4 pre valve closed
11/30/2012	7:53:12 AM	SiCl4 post valve closed
11/30/2012	7:53:12 AM	Bypass valve closed
11/30/2012	7:53:12 AM	Bubbler valve closed
11/30/2012	7:53:12 AM	Helium valve opened
11/30/2012	7:53:12 AM	Main Vac valve opened
11/30/2012	7:53:12 AM	Helium MFC set to  20.000000
11/30/2012	7:53:12 AM	H2 MFC set to  0.000000
11/30/2012	7:53:12 AM	BCl3 MFC set to  0.000000
11/30/2012	7:53:12 AM	PH3 MFC set to  0.000000
11/30/2012	7:53:12 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:53:12 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:53:12 AM	Tube furnace set to 150
11/30/2012	7:53:42 AM	Helium valve closed
11/30/2012	7:53:42 AM	H2 valve closed
11/30/2012	7:53:42 AM	BCl3 valve closed
11/30/2012	7:53:42 AM	PH3 valve closed
11/30/2012	7:53:42 AM	SiCl4 pre valve closed
11/30/2012	7:53:42 AM	SiCl4 post valve closed
11/30/2012	7:53:42 AM	Bypass valve closed
11/30/2012	7:53:42 AM	Bubbler valve closed
11/30/2012	7:53:42 AM	Main Vac valve opened
11/30/2012	7:53:42 AM	Helium MFC set to  0.000000
11/30/2012	7:53:42 AM	H2 MFC set to  0.000000
11/30/2012	7:53:42 AM	BCl3 MFC set to  0.000000
11/30/2012	7:53:42 AM	PH3 MFC set to  0.000000
11/30/2012	7:53:42 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:53:42 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:53:43 AM	Tube furnace set to 150
11/30/2012	7:54:13 AM	H2 valve closed
11/30/2012	7:54:13 AM	BCl3 valve closed
11/30/2012	7:54:13 AM	PH3 valve closed
11/30/2012	7:54:13 AM	SiCl4 pre valve closed
11/30/2012	7:54:13 AM	SiCl4 post valve closed
11/30/2012	7:54:13 AM	Bypass valve closed
11/30/2012	7:54:13 AM	Bubbler valve closed
11/30/2012	7:54:13 AM	Helium valve opened
11/30/2012	7:54:13 AM	Main Vac valve opened
11/30/2012	7:54:13 AM	Helium MFC set to  20.000000
11/30/2012	7:54:13 AM	H2 MFC set to  0.000000
11/30/2012	7:54:13 AM	BCl3 MFC set to  0.000000
11/30/2012	7:54:13 AM	PH3 MFC set to  0.000000
11/30/2012	7:54:13 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:54:13 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:54:13 AM	Tube furnace set to 150
11/30/2012	7:54:43 AM	Helium valve closed
11/30/2012	7:54:43 AM	H2 valve closed
11/30/2012	7:54:43 AM	BCl3 valve closed
11/30/2012	7:54:43 AM	PH3 valve closed
11/30/2012	7:54:43 AM	SiCl4 pre valve closed
11/30/2012	7:54:43 AM	SiCl4 post valve closed
11/30/2012	7:54:43 AM	Bypass valve closed
11/30/2012	7:54:43 AM	Bubbler valve closed
11/30/2012	7:54:43 AM	Main Vac valve opened
11/30/2012	7:54:43 AM	Helium MFC set to  0.000000
11/30/2012	7:54:43 AM	H2 MFC set to  0.000000
11/30/2012	7:54:43 AM	BCl3 MFC set to  0.000000
11/30/2012	7:54:43 AM	PH3 MFC set to  0.000000
11/30/2012	7:54:43 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:54:43 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:54:43 AM	Tube furnace set to 150
11/30/2012	7:55:13 AM	H2 valve closed
11/30/2012	7:55:13 AM	BCl3 valve closed
11/30/2012	7:55:13 AM	PH3 valve closed
11/30/2012	7:55:13 AM	SiCl4 pre valve closed
11/30/2012	7:55:13 AM	SiCl4 post valve closed
11/30/2012	7:55:13 AM	Bypass valve closed
11/30/2012	7:55:13 AM	Bubbler valve closed
11/30/2012	7:55:13 AM	Helium valve opened
11/30/2012	7:55:13 AM	Main Vac valve opened
11/30/2012	7:55:13 AM	Helium MFC set to  20.000000
11/30/2012	7:55:13 AM	H2 MFC set to  0.000000
11/30/2012	7:55:13 AM	BCl3 MFC set to  0.000000
11/30/2012	7:55:13 AM	PH3 MFC set to  0.000000
11/30/2012	7:55:13 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:55:13 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:55:13 AM	Tube furnace set to 150
11/30/2012	7:55:43 AM	Helium valve closed
11/30/2012	7:55:43 AM	H2 valve closed
11/30/2012	7:55:43 AM	BCl3 valve closed
11/30/2012	7:55:43 AM	PH3 valve closed
11/30/2012	7:55:43 AM	SiCl4 pre valve closed
11/30/2012	7:55:43 AM	SiCl4 post valve closed
11/30/2012	7:55:43 AM	Bypass valve closed
11/30/2012	7:55:43 AM	Bubbler valve closed
11/30/2012	7:55:43 AM	Main Vac valve opened
11/30/2012	7:55:43 AM	Helium MFC set to  0.000000
11/30/2012	7:55:43 AM	H2 MFC set to  0.000000
11/30/2012	7:55:43 AM	BCl3 MFC set to  0.000000
11/30/2012	7:55:43 AM	PH3 MFC set to  0.000000
11/30/2012	7:55:43 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:55:43 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:55:44 AM	Tube furnace set to 150
11/30/2012	7:56:14 AM	H2 valve closed
11/30/2012	7:56:14 AM	BCl3 valve closed
11/30/2012	7:56:14 AM	PH3 valve closed
11/30/2012	7:56:14 AM	SiCl4 pre valve closed
11/30/2012	7:56:14 AM	SiCl4 post valve closed
11/30/2012	7:56:14 AM	Bypass valve closed
11/30/2012	7:56:14 AM	Bubbler valve closed
11/30/2012	7:56:14 AM	Helium valve opened
11/30/2012	7:56:14 AM	Main Vac valve opened
11/30/2012	7:56:14 AM	Helium MFC set to  20.000000
11/30/2012	7:56:14 AM	H2 MFC set to  0.000000
11/30/2012	7:56:14 AM	BCl3 MFC set to  0.000000
11/30/2012	7:56:14 AM	PH3 MFC set to  0.000000
11/30/2012	7:56:14 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:56:14 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:56:14 AM	Tube furnace set to 150
11/30/2012	7:56:44 AM	Helium valve closed
11/30/2012	7:56:44 AM	H2 valve closed
11/30/2012	7:56:44 AM	BCl3 valve closed
11/30/2012	7:56:44 AM	PH3 valve closed
11/30/2012	7:56:44 AM	SiCl4 pre valve closed
11/30/2012	7:56:44 AM	SiCl4 post valve closed
11/30/2012	7:56:44 AM	Bypass valve closed
11/30/2012	7:56:44 AM	Bubbler valve closed
11/30/2012	7:56:44 AM	Main Vac valve opened
11/30/2012	7:56:44 AM	Helium MFC set to  0.000000
11/30/2012	7:56:44 AM	H2 MFC set to  0.000000
11/30/2012	7:56:44 AM	BCl3 MFC set to  0.000000
11/30/2012	7:56:44 AM	PH3 MFC set to  0.000000
11/30/2012	7:56:44 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:56:44 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:56:44 AM	Tube furnace set to 150
11/30/2012	7:57:14 AM	H2 valve closed
11/30/2012	7:57:14 AM	BCl3 valve closed
11/30/2012	7:57:14 AM	PH3 valve closed
11/30/2012	7:57:14 AM	SiCl4 pre valve closed
11/30/2012	7:57:14 AM	SiCl4 post valve closed
11/30/2012	7:57:14 AM	Bypass valve closed
11/30/2012	7:57:14 AM	Bubbler valve closed
11/30/2012	7:57:14 AM	Helium valve opened
11/30/2012	7:57:14 AM	Main Vac valve opened
11/30/2012	7:57:14 AM	Helium MFC set to  20.000000
11/30/2012	7:57:14 AM	H2 MFC set to  0.000000
11/30/2012	7:57:14 AM	BCl3 MFC set to  0.000000
11/30/2012	7:57:14 AM	PH3 MFC set to  0.000000
11/30/2012	7:57:14 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:57:14 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:57:14 AM	Tube furnace set to 150
11/30/2012	7:57:44 AM	Helium valve closed
11/30/2012	7:57:44 AM	H2 valve closed
11/30/2012	7:57:44 AM	BCl3 valve closed
11/30/2012	7:57:44 AM	PH3 valve closed
11/30/2012	7:57:44 AM	SiCl4 pre valve closed
11/30/2012	7:57:44 AM	SiCl4 post valve closed
11/30/2012	7:57:44 AM	Bypass valve closed
11/30/2012	7:57:44 AM	Bubbler valve closed
11/30/2012	7:57:44 AM	Main Vac valve opened
11/30/2012	7:57:44 AM	Helium MFC set to  0.000000
11/30/2012	7:57:44 AM	H2 MFC set to  0.000000
11/30/2012	7:57:44 AM	BCl3 MFC set to  0.000000
11/30/2012	7:57:44 AM	PH3 MFC set to  0.000000
11/30/2012	7:57:44 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:57:44 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:57:45 AM	Tube furnace set to 150
11/30/2012	7:58:15 AM	H2 valve closed
11/30/2012	7:58:15 AM	BCl3 valve closed
11/30/2012	7:58:15 AM	PH3 valve closed
11/30/2012	7:58:15 AM	SiCl4 pre valve closed
11/30/2012	7:58:15 AM	SiCl4 post valve closed
11/30/2012	7:58:15 AM	Bypass valve closed
11/30/2012	7:58:15 AM	Bubbler valve closed
11/30/2012	7:58:15 AM	Helium valve opened
11/30/2012	7:58:15 AM	Main Vac valve opened
11/30/2012	7:58:15 AM	Helium MFC set to  20.000000
11/30/2012	7:58:15 AM	H2 MFC set to  0.000000
11/30/2012	7:58:15 AM	BCl3 MFC set to  0.000000
11/30/2012	7:58:15 AM	PH3 MFC set to  0.000000
11/30/2012	7:58:15 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:58:15 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:58:15 AM	Tube furnace set to 150
11/30/2012	7:58:45 AM	Helium valve closed
11/30/2012	7:58:45 AM	H2 valve closed
11/30/2012	7:58:45 AM	BCl3 valve closed
11/30/2012	7:58:45 AM	PH3 valve closed
11/30/2012	7:58:45 AM	SiCl4 pre valve closed
11/30/2012	7:58:45 AM	SiCl4 post valve closed
11/30/2012	7:58:45 AM	Bypass valve closed
11/30/2012	7:58:45 AM	Bubbler valve closed
11/30/2012	7:58:45 AM	Main Vac valve opened
11/30/2012	7:58:45 AM	Helium MFC set to  0.000000
11/30/2012	7:58:45 AM	H2 MFC set to  0.000000
11/30/2012	7:58:45 AM	BCl3 MFC set to  0.000000
11/30/2012	7:58:45 AM	PH3 MFC set to  0.000000
11/30/2012	7:58:45 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:58:45 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:58:45 AM	Tube furnace set to 150
11/30/2012	7:59:15 AM	H2 valve closed
11/30/2012	7:59:15 AM	BCl3 valve closed
11/30/2012	7:59:15 AM	PH3 valve closed
11/30/2012	7:59:15 AM	SiCl4 pre valve closed
11/30/2012	7:59:15 AM	SiCl4 post valve closed
11/30/2012	7:59:15 AM	Bypass valve closed
11/30/2012	7:59:15 AM	Bubbler valve closed
11/30/2012	7:59:15 AM	Helium valve opened
11/30/2012	7:59:15 AM	Main Vac valve opened
11/30/2012	7:59:15 AM	Helium MFC set to  20.000000
11/30/2012	7:59:15 AM	H2 MFC set to  0.000000
11/30/2012	7:59:15 AM	BCl3 MFC set to  0.000000
11/30/2012	7:59:15 AM	PH3 MFC set to  0.000000
11/30/2012	7:59:15 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:59:15 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:59:15 AM	Tube furnace set to 150
11/30/2012	7:59:45 AM	Helium valve closed
11/30/2012	7:59:45 AM	H2 valve closed
11/30/2012	7:59:45 AM	BCl3 valve closed
11/30/2012	7:59:45 AM	PH3 valve closed
11/30/2012	7:59:45 AM	SiCl4 pre valve closed
11/30/2012	7:59:45 AM	SiCl4 post valve closed
11/30/2012	7:59:45 AM	Bypass valve closed
11/30/2012	7:59:45 AM	Bubbler valve closed
11/30/2012	7:59:45 AM	Main Vac valve opened
11/30/2012	7:59:45 AM	Helium MFC set to  0.000000
11/30/2012	7:59:45 AM	H2 MFC set to  0.000000
11/30/2012	7:59:45 AM	BCl3 MFC set to  0.000000
11/30/2012	7:59:45 AM	PH3 MFC set to  0.000000
11/30/2012	7:59:45 AM	SiCl4 MFC set to  0.000000
11/30/2012	7:59:45 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:59:46 AM	Tube furnace set to 150
11/30/2012	8:00:16 AM	H2 valve closed
11/30/2012	8:00:16 AM	BCl3 valve closed
11/30/2012	8:00:16 AM	PH3 valve closed
11/30/2012	8:00:16 AM	SiCl4 pre valve closed
11/30/2012	8:00:16 AM	SiCl4 post valve closed
11/30/2012	8:00:16 AM	Bypass valve closed
11/30/2012	8:00:16 AM	Bubbler valve closed
11/30/2012	8:00:16 AM	Helium valve opened
11/30/2012	8:00:16 AM	Main Vac valve opened
11/30/2012	8:00:16 AM	Helium MFC set to  20.000000
11/30/2012	8:00:16 AM	H2 MFC set to  0.000000
11/30/2012	8:00:16 AM	BCl3 MFC set to  0.000000
11/30/2012	8:00:16 AM	PH3 MFC set to  0.000000
11/30/2012	8:00:16 AM	SiCl4 MFC set to  0.000000
11/30/2012	8:00:16 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	8:00:16 AM	Tube furnace set to 150
11/30/2012	8:00:46 AM	Helium valve closed
11/30/2012	8:00:46 AM	H2 valve closed
11/30/2012	8:00:46 AM	BCl3 valve closed
11/30/2012	8:00:46 AM	PH3 valve closed
11/30/2012	8:00:46 AM	SiCl4 pre valve closed
11/30/2012	8:00:46 AM	SiCl4 post valve closed
11/30/2012	8:00:46 AM	Bypass valve closed
11/30/2012	8:00:46 AM	Bubbler valve closed
11/30/2012	8:00:46 AM	Main Vac valve opened
11/30/2012	8:00:46 AM	Helium MFC set to  0.000000
11/30/2012	8:00:46 AM	H2 MFC set to  0.000000
11/30/2012	8:00:46 AM	BCl3 MFC set to  0.000000
11/30/2012	8:00:46 AM	PH3 MFC set to  0.000000
11/30/2012	8:00:46 AM	SiCl4 MFC set to  0.000000
11/30/2012	8:00:46 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	8:00:46 AM	Tube furnace set to 150
11/30/2012	8:00:47 AM	Run finished at 8:00 AM
11/30/2012	8:06:33 AM	Main Vac valve closed
11/30/2012	8:06:41 AM	Main Vac valve opened
11/30/2012	8:06:45 AM	Helium MFC set to  10.000000
11/30/2012	8:06:46 AM	Helium valve opened
11/30/2012	8:07:02 AM	Helium valve closed
11/30/2012	8:09:25 AM	Recipe started at 8:09 AM
11/30/2012	8:09:25 AM	Helium valve closed
11/30/2012	8:09:25 AM	H2 valve closed
11/30/2012	8:09:25 AM	BCl3 valve closed
11/30/2012	8:09:25 AM	PH3 valve closed
11/30/2012	8:09:25 AM	SiCl4 pre valve closed
11/30/2012	8:09:25 AM	SiCl4 post valve closed
11/30/2012	8:09:25 AM	Bypass valve closed
11/30/2012	8:09:25 AM	Bubbler valve closed
11/30/2012	8:09:25 AM	Main Vac valve opened
11/30/2012	8:09:25 AM	Helium MFC set to  0.000000
11/30/2012	8:09:25 AM	H2 MFC set to  0.000000
11/30/2012	8:09:25 AM	BCl3 MFC set to  0.000000
11/30/2012	8:09:25 AM	PH3 MFC set to  0.000000
11/30/2012	8:09:25 AM	SiCl4 MFC set to  0.000000
11/30/2012	8:09:25 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	8:09:25 AM	Tube furnace set to 150
11/30/2012	8:54:25 AM	Helium valve closed
11/30/2012	8:54:25 AM	H2 valve closed
11/30/2012	8:54:25 AM	BCl3 valve closed
11/30/2012	8:54:25 AM	PH3 valve closed
11/30/2012	8:54:25 AM	SiCl4 pre valve closed
11/30/2012	8:54:25 AM	SiCl4 post valve closed
11/30/2012	8:54:25 AM	Main Vac valve closed
11/30/2012	8:54:25 AM	Bypass valve closed
11/30/2012	8:54:25 AM	Bubbler valve closed
11/30/2012	8:54:25 AM	Helium MFC set to  0.000000
11/30/2012	8:54:25 AM	H2 MFC set to  0.000000
11/30/2012	8:54:25 AM	BCl3 MFC set to  0.000000
11/30/2012	8:54:25 AM	PH3 MFC set to  0.000000
11/30/2012	8:54:25 AM	SiCl4 MFC set to  0.000000
11/30/2012	8:54:25 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	8:54:26 AM	Tube furnace set to 150
11/30/2012	8:54:29 AM	Helium valve closed
11/30/2012	8:54:29 AM	BCl3 valve closed
11/30/2012	8:54:29 AM	PH3 valve closed
11/30/2012	8:54:29 AM	SiCl4 pre valve closed
11/30/2012	8:54:29 AM	SiCl4 post valve closed
11/30/2012	8:54:29 AM	Main Vac valve closed
11/30/2012	8:54:29 AM	Bypass valve closed
11/30/2012	8:54:29 AM	Bubbler valve closed
11/30/2012	8:54:29 AM	H2 valve opened
11/30/2012	8:54:29 AM	Helium MFC set to  0.000000
11/30/2012	8:54:29 AM	H2 MFC set to  500.000000
11/30/2012	8:54:29 AM	BCl3 MFC set to  0.000000
11/30/2012	8:54:29 AM	PH3 MFC set to  0.000000
11/30/2012	8:54:29 AM	SiCl4 MFC set to  0.000000
11/30/2012	8:54:29 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	8:54:29 AM	Tube furnace set to 150
11/30/2012	8:55:41 AM	Helium valve closed
11/30/2012	8:55:41 AM	BCl3 valve closed
11/30/2012	8:55:41 AM	PH3 valve closed
11/30/2012	8:55:41 AM	SiCl4 pre valve closed
11/30/2012	8:55:41 AM	SiCl4 post valve closed
11/30/2012	8:55:41 AM	Main Vac valve closed
11/30/2012	8:55:41 AM	Bypass valve closed
11/30/2012	8:55:41 AM	H2 valve opened
11/30/2012	8:55:41 AM	Bubbler valve opened
11/30/2012	8:55:41 AM	Helium MFC set to  0.000000
11/30/2012	8:55:41 AM	H2 MFC set to  500.000000
11/30/2012	8:55:41 AM	BCl3 MFC set to  0.000000
11/30/2012	8:55:41 AM	PH3 MFC set to  0.000000
11/30/2012	8:55:41 AM	SiCl4 MFC set to  0.000000
11/30/2012	8:55:41 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	8:55:41 AM	Tube furnace set to 150
11/30/2012	8:55:42 AM	Helium valve closed
11/30/2012	8:55:42 AM	BCl3 valve closed
11/30/2012	8:55:42 AM	PH3 valve closed
11/30/2012	8:55:42 AM	SiCl4 pre valve closed
11/30/2012	8:55:42 AM	SiCl4 post valve closed
11/30/2012	8:55:42 AM	Main Vac valve closed
11/30/2012	8:55:42 AM	Bypass valve closed
11/30/2012	8:55:42 AM	H2 valve opened
11/30/2012	8:55:42 AM	Bubbler valve opened
11/30/2012	8:55:42 AM	Helium MFC set to  0.000000
11/30/2012	8:55:42 AM	H2 MFC set to  500.000000
11/30/2012	8:55:42 AM	BCl3 MFC set to  0.000000
11/30/2012	8:55:42 AM	PH3 MFC set to  0.000000
11/30/2012	8:55:42 AM	SiCl4 MFC set to  0.000000
11/30/2012	8:55:42 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	8:55:43 AM	Tube furnace set to 1000
11/30/2012	9:15:43 AM	Helium valve closed
11/30/2012	9:15:43 AM	PH3 valve closed
11/30/2012	9:15:43 AM	Main Vac valve closed
11/30/2012	9:15:43 AM	Bypass valve closed
11/30/2012	9:15:43 AM	H2 valve opened
11/30/2012	9:15:43 AM	BCl3 valve opened
11/30/2012	9:15:43 AM	SiCl4 pre valve opened
11/30/2012	9:15:43 AM	SiCl4 post valve opened
11/30/2012	9:15:43 AM	Bubbler valve opened
11/30/2012	9:15:43 AM	Helium MFC set to  0.000000
11/30/2012	9:15:43 AM	H2 MFC set to  450.000000
11/30/2012	9:15:43 AM	BCl3 MFC set to  1.300000
11/30/2012	9:15:43 AM	PH3 MFC set to  0.000000
11/30/2012	9:15:43 AM	SiCl4 MFC set to  50.000000
11/30/2012	9:15:43 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	9:15:43 AM	Tube furnace set to 1000
11/30/2012	9:30:43 AM	Helium valve closed
11/30/2012	9:30:43 AM	BCl3 valve closed
11/30/2012	9:30:43 AM	Main Vac valve closed
11/30/2012	9:30:43 AM	Bypass valve closed
11/30/2012	9:30:43 AM	H2 valve opened
11/30/2012	9:30:43 AM	PH3 valve opened
11/30/2012	9:30:43 AM	SiCl4 pre valve opened
11/30/2012	9:30:43 AM	SiCl4 post valve opened
11/30/2012	9:30:43 AM	Bubbler valve opened
11/30/2012	9:30:43 AM	Helium MFC set to  0.000000
11/30/2012	9:30:43 AM	H2 MFC set to  450.000000
11/30/2012	9:30:43 AM	BCl3 MFC set to  0.000000
11/30/2012	9:30:43 AM	PH3 MFC set to  20.000000
11/30/2012	9:30:43 AM	SiCl4 MFC set to  50.000000
11/30/2012	9:30:43 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	9:30:43 AM	Tube furnace set to 1000
11/30/2012	9:35:43 AM	Helium valve closed
11/30/2012	9:35:43 AM	BCl3 valve closed
11/30/2012	9:35:43 AM	PH3 valve closed
11/30/2012	9:35:43 AM	SiCl4 pre valve closed
11/30/2012	9:35:43 AM	SiCl4 post valve closed
11/30/2012	9:35:43 AM	Main Vac valve closed
11/30/2012	9:35:43 AM	Bypass valve closed
11/30/2012	9:35:43 AM	H2 valve opened
11/30/2012	9:35:43 AM	Bubbler valve opened
11/30/2012	9:35:43 AM	Helium MFC set to  0.000000
11/30/2012	9:35:43 AM	H2 MFC set to  500.000000
11/30/2012	9:35:43 AM	BCl3 MFC set to  0.000000
11/30/2012	9:35:43 AM	PH3 MFC set to  0.000000
11/30/2012	9:35:43 AM	SiCl4 MFC set to  0.000000
11/30/2012	9:35:43 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	9:35:43 AM	Tube furnace set to 950
11/30/2012	9:38:43 AM	Helium valve closed
11/30/2012	9:38:43 AM	BCl3 valve closed
11/30/2012	9:38:43 AM	PH3 valve closed
11/30/2012	9:38:43 AM	SiCl4 pre valve closed
11/30/2012	9:38:43 AM	SiCl4 post valve closed
11/30/2012	9:38:43 AM	Main Vac valve closed
11/30/2012	9:38:43 AM	Bypass valve closed
11/30/2012	9:38:43 AM	H2 valve opened
11/30/2012	9:38:43 AM	Bubbler valve opened
11/30/2012	9:38:43 AM	Helium MFC set to  0.000000
11/30/2012	9:38:43 AM	H2 MFC set to  500.000000
11/30/2012	9:38:43 AM	BCl3 MFC set to  0.000000
11/30/2012	9:38:43 AM	PH3 MFC set to  0.000000
11/30/2012	9:38:43 AM	SiCl4 MFC set to  0.000000
11/30/2012	9:38:43 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	9:38:44 AM	Tube furnace set to 900
11/30/2012	9:41:44 AM	Helium valve closed
11/30/2012	9:41:44 AM	BCl3 valve closed
11/30/2012	9:41:44 AM	PH3 valve closed
11/30/2012	9:41:44 AM	SiCl4 pre valve closed
11/30/2012	9:41:44 AM	SiCl4 post valve closed
11/30/2012	9:41:44 AM	Main Vac valve closed
11/30/2012	9:41:44 AM	Bypass valve closed
11/30/2012	9:41:44 AM	H2 valve opened
11/30/2012	9:41:44 AM	Bubbler valve opened
11/30/2012	9:41:44 AM	Helium MFC set to  0.000000
11/30/2012	9:41:44 AM	H2 MFC set to  500.000000
11/30/2012	9:41:44 AM	BCl3 MFC set to  0.000000
11/30/2012	9:41:44 AM	PH3 MFC set to  0.000000
11/30/2012	9:41:44 AM	SiCl4 MFC set to  0.000000
11/30/2012	9:41:44 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	9:41:44 AM	Tube furnace set to 850
11/30/2012	9:44:44 AM	Helium valve closed
11/30/2012	9:44:44 AM	BCl3 valve closed
11/30/2012	9:44:44 AM	PH3 valve closed
11/30/2012	9:44:44 AM	SiCl4 pre valve closed
11/30/2012	9:44:44 AM	SiCl4 post valve closed
11/30/2012	9:44:44 AM	Main Vac valve closed
11/30/2012	9:44:44 AM	Bypass valve closed
11/30/2012	9:44:44 AM	H2 valve opened
11/30/2012	9:44:44 AM	Bubbler valve opened
11/30/2012	9:44:44 AM	Helium MFC set to  0.000000
11/30/2012	9:44:44 AM	H2 MFC set to  500.000000
11/30/2012	9:44:44 AM	BCl3 MFC set to  0.000000
11/30/2012	9:44:44 AM	PH3 MFC set to  0.000000
11/30/2012	9:44:44 AM	SiCl4 MFC set to  0.000000
11/30/2012	9:44:44 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	9:44:44 AM	Tube furnace set to 800
11/30/2012	9:47:44 AM	Helium valve closed
11/30/2012	9:47:44 AM	BCl3 valve closed
11/30/2012	9:47:44 AM	PH3 valve closed
11/30/2012	9:47:44 AM	SiCl4 pre valve closed
11/30/2012	9:47:44 AM	SiCl4 post valve closed
11/30/2012	9:47:44 AM	Main Vac valve closed
11/30/2012	9:47:44 AM	Bypass valve closed
11/30/2012	9:47:44 AM	H2 valve opened
11/30/2012	9:47:44 AM	Bubbler valve opened
11/30/2012	9:47:44 AM	Helium MFC set to  0.000000
11/30/2012	9:47:44 AM	H2 MFC set to  500.000000
11/30/2012	9:47:44 AM	BCl3 MFC set to  0.000000
11/30/2012	9:47:44 AM	PH3 MFC set to  0.000000
11/30/2012	9:47:44 AM	SiCl4 MFC set to  0.000000
11/30/2012	9:47:44 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	9:47:44 AM	Tube furnace set to 750
11/30/2012	9:50:44 AM	H2 valve closed
11/30/2012	9:50:44 AM	BCl3 valve closed
11/30/2012	9:50:44 AM	PH3 valve closed
11/30/2012	9:50:44 AM	SiCl4 pre valve closed
11/30/2012	9:50:44 AM	SiCl4 post valve closed
11/30/2012	9:50:44 AM	Main Vac valve closed
11/30/2012	9:50:44 AM	Bypass valve closed
11/30/2012	9:50:44 AM	Helium valve opened
11/30/2012	9:50:44 AM	Bubbler valve opened
11/30/2012	9:50:44 AM	Helium MFC set to  500.000000
11/30/2012	9:50:44 AM	H2 MFC set to  0.000000
11/30/2012	9:50:44 AM	BCl3 MFC set to  0.000000
11/30/2012	9:50:44 AM	PH3 MFC set to  0.000000
11/30/2012	9:50:44 AM	SiCl4 MFC set to  0.000000
11/30/2012	9:50:44 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	9:50:44 AM	Tube furnace set to 0
11/30/2012	10:10:44 AM	Helium valve closed
11/30/2012	10:10:44 AM	H2 valve closed
11/30/2012	10:10:44 AM	BCl3 valve closed
11/30/2012	10:10:44 AM	PH3 valve closed
11/30/2012	10:10:44 AM	SiCl4 pre valve closed
11/30/2012	10:10:44 AM	SiCl4 post valve closed
11/30/2012	10:10:44 AM	Main Vac valve closed
11/30/2012	10:10:44 AM	Bypass valve closed
11/30/2012	10:10:44 AM	Bubbler valve closed
11/30/2012	10:10:44 AM	Helium MFC set to  0.000000
11/30/2012	10:10:44 AM	H2 MFC set to  0.000000
11/30/2012	10:10:44 AM	BCl3 MFC set to  0.000000
11/30/2012	10:10:44 AM	PH3 MFC set to  0.000000
11/30/2012	10:10:44 AM	SiCl4 MFC set to  0.000000
11/30/2012	10:10:44 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	10:10:45 AM	Tube furnace set to 0
11/30/2012	10:40:45 AM	Helium valve closed
11/30/2012	10:40:45 AM	H2 valve closed
11/30/2012	10:40:45 AM	BCl3 valve closed
11/30/2012	10:40:45 AM	PH3 valve closed
11/30/2012	10:40:45 AM	SiCl4 pre valve closed
11/30/2012	10:40:45 AM	SiCl4 post valve closed
11/30/2012	10:40:45 AM	Main Vac valve closed
11/30/2012	10:40:45 AM	Bubbler valve closed
11/30/2012	10:40:45 AM	Bypass valve opened
11/30/2012	10:40:45 AM	Helium MFC set to  0.000000
11/30/2012	10:40:45 AM	H2 MFC set to  0.000000
11/30/2012	10:40:45 AM	BCl3 MFC set to  0.000000
11/30/2012	10:40:45 AM	PH3 MFC set to  0.000000
11/30/2012	10:40:45 AM	SiCl4 MFC set to  0.000000
11/30/2012	10:40:45 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	10:40:45 AM	Tube furnace set to 0
11/30/2012	10:41:44 AM	Helium valve closed
11/30/2012	10:41:44 AM	H2 valve closed
11/30/2012	10:41:44 AM	BCl3 valve closed
11/30/2012	10:41:44 AM	PH3 valve closed
11/30/2012	10:41:44 AM	SiCl4 pre valve closed
11/30/2012	10:41:44 AM	SiCl4 post valve closed
11/30/2012	10:41:44 AM	Main Vac valve closed
11/30/2012	10:41:44 AM	Bubbler valve closed
11/30/2012	10:41:44 AM	Bypass valve opened
11/30/2012	10:41:44 AM	Helium MFC set to  0.000000
11/30/2012	10:41:44 AM	H2 MFC set to  0.000000
11/30/2012	10:41:44 AM	BCl3 MFC set to  0.000000
11/30/2012	10:41:44 AM	PH3 MFC set to  0.000000
11/30/2012	10:41:44 AM	SiCl4 MFC set to  0.000000
11/30/2012	10:41:44 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	10:41:45 AM	Tube furnace set to 0
11/30/2012	10:42:45 AM	Helium valve closed
11/30/2012	10:42:45 AM	H2 valve closed
11/30/2012	10:42:45 AM	BCl3 valve closed
11/30/2012	10:42:45 AM	PH3 valve closed
11/30/2012	10:42:45 AM	SiCl4 pre valve closed
11/30/2012	10:42:45 AM	SiCl4 post valve closed
11/30/2012	10:42:45 AM	Bypass valve closed
11/30/2012	10:42:45 AM	Bubbler valve closed
11/30/2012	10:42:45 AM	Main Vac valve opened
11/30/2012	10:42:45 AM	Helium MFC set to  0.000000
11/30/2012	10:42:45 AM	H2 MFC set to  0.000000
11/30/2012	10:42:45 AM	BCl3 MFC set to  0.000000
11/30/2012	10:42:45 AM	PH3 MFC set to  0.000000
11/30/2012	10:42:45 AM	SiCl4 MFC set to  0.000000
11/30/2012	10:42:45 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	10:42:45 AM	Tube furnace set to 0
11/30/2012	10:42:46 AM	Run finished at 10:42 AM
11/30/2012	11:37:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/30/2012	11:37:36 AM	Recipe started at 11:37 AM
11/30/2012	11:37:36 AM	Helium valve closed
11/30/2012	11:37:36 AM	H2 valve closed
11/30/2012	11:37:36 AM	BCl3 valve closed
11/30/2012	11:37:36 AM	PH3 valve closed
11/30/2012	11:37:36 AM	SiCl4 pre valve closed
11/30/2012	11:37:36 AM	SiCl4 post valve closed
11/30/2012	11:37:36 AM	Main Vac valve closed
11/30/2012	11:37:36 AM	Bypass valve closed
11/30/2012	11:37:36 AM	Bubbler valve closed
11/30/2012	11:37:36 AM	Helium MFC set to  0.000000
11/30/2012	11:37:36 AM	H2 MFC set to  0.000000
11/30/2012	11:37:36 AM	BCl3 MFC set to  0.000000
11/30/2012	11:37:36 AM	PH3 MFC set to  0.000000
11/30/2012	11:37:36 AM	SiCl4 MFC set to  0.000000
11/30/2012	11:37:36 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	11:37:36 AM	Tube furnace set to 0
11/30/2012	11:37:39 AM	H2 valve closed
11/30/2012	11:37:39 AM	BCl3 valve closed
11/30/2012	11:37:39 AM	PH3 valve closed
11/30/2012	11:37:39 AM	SiCl4 pre valve closed
11/30/2012	11:37:39 AM	SiCl4 post valve closed
11/30/2012	11:37:39 AM	Main Vac valve closed
11/30/2012	11:37:39 AM	Bypass valve closed
11/30/2012	11:37:39 AM	Bubbler valve closed
11/30/2012	11:37:39 AM	Helium valve opened
11/30/2012	11:37:39 AM	Helium MFC set to  500.000000
11/30/2012	11:37:39 AM	H2 MFC set to  0.000000
11/30/2012	11:37:39 AM	BCl3 MFC set to  0.000000
11/30/2012	11:37:39 AM	PH3 MFC set to  0.000000
11/30/2012	11:37:39 AM	SiCl4 MFC set to  0.000000
11/30/2012	11:37:39 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	11:37:40 AM	Tube furnace set to 0
11/30/2012	11:38:48 AM	Helium valve closed
11/30/2012	11:38:48 AM	H2 valve closed
11/30/2012	11:38:48 AM	BCl3 valve closed
11/30/2012	11:38:48 AM	PH3 valve closed
11/30/2012	11:38:48 AM	SiCl4 pre valve closed
11/30/2012	11:38:48 AM	SiCl4 post valve closed
11/30/2012	11:38:48 AM	Main Vac valve closed
11/30/2012	11:38:48 AM	Bypass valve closed
11/30/2012	11:38:48 AM	Bubbler valve closed
11/30/2012	11:38:48 AM	Helium MFC set to  0.000000
11/30/2012	11:38:48 AM	H2 MFC set to  0.000000
11/30/2012	11:38:48 AM	BCl3 MFC set to  0.000000
11/30/2012	11:38:48 AM	PH3 MFC set to  0.000000
11/30/2012	11:38:48 AM	SiCl4 MFC set to  0.000000
11/30/2012	11:38:48 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	11:38:48 AM	Tube furnace set to 0
11/30/2012	11:38:49 AM	Run finished at 11:38 AM
11/30/2012	11:38:49 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/30/2012	11:43:52 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/30/2012	11:43:53 AM	Recipe started at 11:43 AM
11/30/2012	11:43:53 AM	Helium valve closed
11/30/2012	11:43:53 AM	H2 valve closed
11/30/2012	11:43:53 AM	BCl3 valve closed
11/30/2012	11:43:53 AM	PH3 valve closed
11/30/2012	11:43:53 AM	SiCl4 pre valve closed
11/30/2012	11:43:53 AM	SiCl4 post valve closed
11/30/2012	11:43:53 AM	Main Vac valve closed
11/30/2012	11:43:53 AM	Bubbler valve closed
11/30/2012	11:43:53 AM	Bypass valve opened
11/30/2012	11:43:53 AM	Helium MFC set to  0.000000
11/30/2012	11:43:53 AM	H2 MFC set to  0.000000
11/30/2012	11:43:53 AM	BCl3 MFC set to  0.000000
11/30/2012	11:43:53 AM	PH3 MFC set to  0.000000
11/30/2012	11:43:53 AM	SiCl4 MFC set to  0.000000
11/30/2012	11:43:53 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	11:43:53 AM	Tube furnace set to 0
11/30/2012	11:45:12 AM	Helium valve closed
11/30/2012	11:45:12 AM	H2 valve closed
11/30/2012	11:45:12 AM	BCl3 valve closed
11/30/2012	11:45:12 AM	PH3 valve closed
11/30/2012	11:45:12 AM	SiCl4 pre valve closed
11/30/2012	11:45:12 AM	SiCl4 post valve closed
11/30/2012	11:45:12 AM	Main Vac valve closed
11/30/2012	11:45:12 AM	Bubbler valve closed
11/30/2012	11:45:12 AM	Bypass valve opened
11/30/2012	11:45:12 AM	Helium MFC set to  0.000000
11/30/2012	11:45:12 AM	H2 MFC set to  0.000000
11/30/2012	11:45:12 AM	BCl3 MFC set to  0.000000
11/30/2012	11:45:12 AM	PH3 MFC set to  0.000000
11/30/2012	11:45:12 AM	SiCl4 MFC set to  0.000000
11/30/2012	11:45:12 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	11:45:12 AM	Tube furnace set to 0
11/30/2012	11:46:12 AM	Helium valve closed
11/30/2012	11:46:12 AM	H2 valve closed
11/30/2012	11:46:12 AM	BCl3 valve closed
11/30/2012	11:46:12 AM	PH3 valve closed
11/30/2012	11:46:12 AM	SiCl4 pre valve closed
11/30/2012	11:46:12 AM	SiCl4 post valve closed
11/30/2012	11:46:12 AM	Bypass valve closed
11/30/2012	11:46:12 AM	Bubbler valve closed
11/30/2012	11:46:12 AM	Main Vac valve opened
11/30/2012	11:46:12 AM	Helium MFC set to  0.000000
11/30/2012	11:46:12 AM	H2 MFC set to  0.000000
11/30/2012	11:46:12 AM	BCl3 MFC set to  0.000000
11/30/2012	11:46:12 AM	PH3 MFC set to  0.000000
11/30/2012	11:46:12 AM	SiCl4 MFC set to  0.000000
11/30/2012	11:46:12 AM	Bypass solenoid MFC set to  0.000000
11/30/2012	11:46:13 AM	Tube furnace set to 0
11/30/2012	11:46:14 AM	Run finished at 11:46 AM
11/30/2012	11:46:14 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/30/2012	12:07:11 PM	Recipe started at 12:07 PM
11/30/2012	12:07:11 PM	Helium valve closed
11/30/2012	12:07:11 PM	H2 valve closed
11/30/2012	12:07:11 PM	BCl3 valve closed
11/30/2012	12:07:11 PM	PH3 valve closed
11/30/2012	12:07:11 PM	SiCl4 pre valve closed
11/30/2012	12:07:11 PM	SiCl4 post valve closed
11/30/2012	12:07:11 PM	Bypass valve closed
11/30/2012	12:07:11 PM	Bubbler valve closed
11/30/2012	12:07:11 PM	Main Vac valve opened
11/30/2012	12:07:11 PM	Helium MFC set to  0.000000
11/30/2012	12:07:11 PM	H2 MFC set to  0.000000
11/30/2012	12:07:11 PM	BCl3 MFC set to  0.000000
11/30/2012	12:07:11 PM	PH3 MFC set to  0.000000
11/30/2012	12:07:11 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:07:11 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:07:11 PM	Tube furnace set to 150
11/30/2012	12:07:13 PM	H2 valve closed
11/30/2012	12:07:13 PM	BCl3 valve closed
11/30/2012	12:07:13 PM	PH3 valve closed
11/30/2012	12:07:13 PM	SiCl4 pre valve closed
11/30/2012	12:07:13 PM	SiCl4 post valve closed
11/30/2012	12:07:13 PM	Bypass valve closed
11/30/2012	12:07:13 PM	Bubbler valve closed
11/30/2012	12:07:13 PM	Helium valve opened
11/30/2012	12:07:13 PM	Main Vac valve opened
11/30/2012	12:07:13 PM	Helium MFC set to  20.000000
11/30/2012	12:07:13 PM	H2 MFC set to  0.000000
11/30/2012	12:07:13 PM	BCl3 MFC set to  0.000000
11/30/2012	12:07:13 PM	PH3 MFC set to  0.000000
11/30/2012	12:07:13 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:07:13 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:07:13 PM	Tube furnace set to 150
11/30/2012	12:07:43 PM	Helium valve closed
11/30/2012	12:07:43 PM	H2 valve closed
11/30/2012	12:07:43 PM	BCl3 valve closed
11/30/2012	12:07:43 PM	PH3 valve closed
11/30/2012	12:07:43 PM	SiCl4 pre valve closed
11/30/2012	12:07:43 PM	SiCl4 post valve closed
11/30/2012	12:07:44 PM	Bypass valve closed
11/30/2012	12:07:44 PM	Bubbler valve closed
11/30/2012	12:07:44 PM	Main Vac valve opened
11/30/2012	12:07:44 PM	Helium MFC set to  0.000000
11/30/2012	12:07:44 PM	H2 MFC set to  0.000000
11/30/2012	12:07:44 PM	BCl3 MFC set to  0.000000
11/30/2012	12:07:44 PM	PH3 MFC set to  0.000000
11/30/2012	12:07:44 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:07:44 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:07:44 PM	Tube furnace set to 150
11/30/2012	12:08:14 PM	H2 valve closed
11/30/2012	12:08:14 PM	BCl3 valve closed
11/30/2012	12:08:14 PM	PH3 valve closed
11/30/2012	12:08:14 PM	SiCl4 pre valve closed
11/30/2012	12:08:14 PM	SiCl4 post valve closed
11/30/2012	12:08:14 PM	Bypass valve closed
11/30/2012	12:08:14 PM	Bubbler valve closed
11/30/2012	12:08:14 PM	Helium valve opened
11/30/2012	12:08:14 PM	Main Vac valve opened
11/30/2012	12:08:14 PM	Helium MFC set to  20.000000
11/30/2012	12:08:14 PM	H2 MFC set to  0.000000
11/30/2012	12:08:14 PM	BCl3 MFC set to  0.000000
11/30/2012	12:08:14 PM	PH3 MFC set to  0.000000
11/30/2012	12:08:14 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:08:14 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:08:14 PM	Tube furnace set to 150
11/30/2012	12:08:44 PM	Helium valve closed
11/30/2012	12:08:44 PM	H2 valve closed
11/30/2012	12:08:44 PM	BCl3 valve closed
11/30/2012	12:08:44 PM	PH3 valve closed
11/30/2012	12:08:44 PM	SiCl4 pre valve closed
11/30/2012	12:08:44 PM	SiCl4 post valve closed
11/30/2012	12:08:44 PM	Bypass valve closed
11/30/2012	12:08:44 PM	Bubbler valve closed
11/30/2012	12:08:44 PM	Main Vac valve opened
11/30/2012	12:08:44 PM	Helium MFC set to  0.000000
11/30/2012	12:08:44 PM	H2 MFC set to  0.000000
11/30/2012	12:08:44 PM	BCl3 MFC set to  0.000000
11/30/2012	12:08:44 PM	PH3 MFC set to  0.000000
11/30/2012	12:08:44 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:08:44 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:08:44 PM	Tube furnace set to 150
11/30/2012	12:09:14 PM	H2 valve closed
11/30/2012	12:09:14 PM	BCl3 valve closed
11/30/2012	12:09:14 PM	PH3 valve closed
11/30/2012	12:09:14 PM	SiCl4 pre valve closed
11/30/2012	12:09:14 PM	SiCl4 post valve closed
11/30/2012	12:09:14 PM	Bypass valve closed
11/30/2012	12:09:14 PM	Bubbler valve closed
11/30/2012	12:09:14 PM	Helium valve opened
11/30/2012	12:09:14 PM	Main Vac valve opened
11/30/2012	12:09:14 PM	Helium MFC set to  20.000000
11/30/2012	12:09:14 PM	H2 MFC set to  0.000000
11/30/2012	12:09:14 PM	BCl3 MFC set to  0.000000
11/30/2012	12:09:14 PM	PH3 MFC set to  0.000000
11/30/2012	12:09:14 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:09:14 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:09:14 PM	Tube furnace set to 150
11/30/2012	12:09:44 PM	Helium valve closed
11/30/2012	12:09:44 PM	H2 valve closed
11/30/2012	12:09:44 PM	BCl3 valve closed
11/30/2012	12:09:44 PM	PH3 valve closed
11/30/2012	12:09:44 PM	SiCl4 pre valve closed
11/30/2012	12:09:44 PM	SiCl4 post valve closed
11/30/2012	12:09:44 PM	Bypass valve closed
11/30/2012	12:09:44 PM	Bubbler valve closed
11/30/2012	12:09:44 PM	Main Vac valve opened
11/30/2012	12:09:45 PM	Helium MFC set to  0.000000
11/30/2012	12:09:45 PM	H2 MFC set to  0.000000
11/30/2012	12:09:45 PM	BCl3 MFC set to  0.000000
11/30/2012	12:09:45 PM	PH3 MFC set to  0.000000
11/30/2012	12:09:45 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:09:45 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:09:45 PM	Tube furnace set to 150
11/30/2012	12:10:15 PM	H2 valve closed
11/30/2012	12:10:15 PM	BCl3 valve closed
11/30/2012	12:10:15 PM	PH3 valve closed
11/30/2012	12:10:15 PM	SiCl4 pre valve closed
11/30/2012	12:10:15 PM	SiCl4 post valve closed
11/30/2012	12:10:15 PM	Bypass valve closed
11/30/2012	12:10:15 PM	Bubbler valve closed
11/30/2012	12:10:15 PM	Helium valve opened
11/30/2012	12:10:15 PM	Main Vac valve opened
11/30/2012	12:10:15 PM	Helium MFC set to  20.000000
11/30/2012	12:10:15 PM	H2 MFC set to  0.000000
11/30/2012	12:10:15 PM	BCl3 MFC set to  0.000000
11/30/2012	12:10:15 PM	PH3 MFC set to  0.000000
11/30/2012	12:10:15 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:10:15 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:10:15 PM	Tube furnace set to 150
11/30/2012	12:10:45 PM	Helium valve closed
11/30/2012	12:10:45 PM	H2 valve closed
11/30/2012	12:10:45 PM	BCl3 valve closed
11/30/2012	12:10:45 PM	PH3 valve closed
11/30/2012	12:10:45 PM	SiCl4 pre valve closed
11/30/2012	12:10:45 PM	SiCl4 post valve closed
11/30/2012	12:10:45 PM	Bypass valve closed
11/30/2012	12:10:45 PM	Bubbler valve closed
11/30/2012	12:10:45 PM	Main Vac valve opened
11/30/2012	12:10:45 PM	Helium MFC set to  0.000000
11/30/2012	12:10:45 PM	H2 MFC set to  0.000000
11/30/2012	12:10:45 PM	BCl3 MFC set to  0.000000
11/30/2012	12:10:45 PM	PH3 MFC set to  0.000000
11/30/2012	12:10:45 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:10:45 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:10:45 PM	Tube furnace set to 150
11/30/2012	12:11:15 PM	H2 valve closed
11/30/2012	12:11:15 PM	BCl3 valve closed
11/30/2012	12:11:15 PM	PH3 valve closed
11/30/2012	12:11:15 PM	SiCl4 pre valve closed
11/30/2012	12:11:15 PM	SiCl4 post valve closed
11/30/2012	12:11:15 PM	Bypass valve closed
11/30/2012	12:11:15 PM	Bubbler valve closed
11/30/2012	12:11:15 PM	Helium valve opened
11/30/2012	12:11:15 PM	Main Vac valve opened
11/30/2012	12:11:15 PM	Helium MFC set to  20.000000
11/30/2012	12:11:15 PM	H2 MFC set to  0.000000
11/30/2012	12:11:15 PM	BCl3 MFC set to  0.000000
11/30/2012	12:11:15 PM	PH3 MFC set to  0.000000
11/30/2012	12:11:15 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:11:15 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:11:15 PM	Tube furnace set to 150
11/30/2012	12:11:45 PM	Helium valve closed
11/30/2012	12:11:45 PM	H2 valve closed
11/30/2012	12:11:45 PM	BCl3 valve closed
11/30/2012	12:11:45 PM	PH3 valve closed
11/30/2012	12:11:45 PM	SiCl4 pre valve closed
11/30/2012	12:11:45 PM	SiCl4 post valve closed
11/30/2012	12:11:45 PM	Bypass valve closed
11/30/2012	12:11:45 PM	Bubbler valve closed
11/30/2012	12:11:45 PM	Main Vac valve opened
11/30/2012	12:11:45 PM	Helium MFC set to  0.000000
11/30/2012	12:11:45 PM	H2 MFC set to  0.000000
11/30/2012	12:11:45 PM	BCl3 MFC set to  0.000000
11/30/2012	12:11:46 PM	PH3 MFC set to  0.000000
11/30/2012	12:11:46 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:11:46 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:11:46 PM	Tube furnace set to 150
11/30/2012	12:12:16 PM	H2 valve closed
11/30/2012	12:12:16 PM	BCl3 valve closed
11/30/2012	12:12:16 PM	PH3 valve closed
11/30/2012	12:12:16 PM	SiCl4 pre valve closed
11/30/2012	12:12:16 PM	SiCl4 post valve closed
11/30/2012	12:12:16 PM	Bypass valve closed
11/30/2012	12:12:16 PM	Bubbler valve closed
11/30/2012	12:12:16 PM	Helium valve opened
11/30/2012	12:12:16 PM	Main Vac valve opened
11/30/2012	12:12:16 PM	Helium MFC set to  20.000000
11/30/2012	12:12:16 PM	H2 MFC set to  0.000000
11/30/2012	12:12:16 PM	BCl3 MFC set to  0.000000
11/30/2012	12:12:16 PM	PH3 MFC set to  0.000000
11/30/2012	12:12:16 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:12:16 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:12:16 PM	Tube furnace set to 150
11/30/2012	12:12:46 PM	Helium valve closed
11/30/2012	12:12:46 PM	H2 valve closed
11/30/2012	12:12:46 PM	BCl3 valve closed
11/30/2012	12:12:46 PM	PH3 valve closed
11/30/2012	12:12:46 PM	SiCl4 pre valve closed
11/30/2012	12:12:46 PM	SiCl4 post valve closed
11/30/2012	12:12:46 PM	Bypass valve closed
11/30/2012	12:12:46 PM	Bubbler valve closed
11/30/2012	12:12:46 PM	Main Vac valve opened
11/30/2012	12:12:46 PM	Helium MFC set to  0.000000
11/30/2012	12:12:46 PM	H2 MFC set to  0.000000
11/30/2012	12:12:46 PM	BCl3 MFC set to  0.000000
11/30/2012	12:12:46 PM	PH3 MFC set to  0.000000
11/30/2012	12:12:46 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:12:46 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:12:46 PM	Tube furnace set to 150
11/30/2012	12:13:16 PM	H2 valve closed
11/30/2012	12:13:16 PM	BCl3 valve closed
11/30/2012	12:13:16 PM	PH3 valve closed
11/30/2012	12:13:16 PM	SiCl4 pre valve closed
11/30/2012	12:13:16 PM	SiCl4 post valve closed
11/30/2012	12:13:16 PM	Bypass valve closed
11/30/2012	12:13:16 PM	Bubbler valve closed
11/30/2012	12:13:16 PM	Helium valve opened
11/30/2012	12:13:16 PM	Main Vac valve opened
11/30/2012	12:13:16 PM	Helium MFC set to  20.000000
11/30/2012	12:13:16 PM	H2 MFC set to  0.000000
11/30/2012	12:13:16 PM	BCl3 MFC set to  0.000000
11/30/2012	12:13:16 PM	PH3 MFC set to  0.000000
11/30/2012	12:13:16 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:13:16 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:13:16 PM	Tube furnace set to 150
11/30/2012	12:13:46 PM	Helium valve closed
11/30/2012	12:13:46 PM	H2 valve closed
11/30/2012	12:13:46 PM	BCl3 valve closed
11/30/2012	12:13:46 PM	PH3 valve closed
11/30/2012	12:13:46 PM	SiCl4 pre valve closed
11/30/2012	12:13:46 PM	SiCl4 post valve closed
11/30/2012	12:13:46 PM	Bypass valve closed
11/30/2012	12:13:46 PM	Bubbler valve closed
11/30/2012	12:13:46 PM	Main Vac valve opened
11/30/2012	12:13:46 PM	Helium MFC set to  0.000000
11/30/2012	12:13:46 PM	H2 MFC set to  0.000000
11/30/2012	12:13:46 PM	BCl3 MFC set to  0.000000
11/30/2012	12:13:46 PM	PH3 MFC set to  0.000000
11/30/2012	12:13:46 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:13:46 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:13:47 PM	Tube furnace set to 150
11/30/2012	12:14:17 PM	H2 valve closed
11/30/2012	12:14:17 PM	BCl3 valve closed
11/30/2012	12:14:17 PM	PH3 valve closed
11/30/2012	12:14:17 PM	SiCl4 pre valve closed
11/30/2012	12:14:17 PM	SiCl4 post valve closed
11/30/2012	12:14:17 PM	Bypass valve closed
11/30/2012	12:14:17 PM	Bubbler valve closed
11/30/2012	12:14:17 PM	Helium valve opened
11/30/2012	12:14:17 PM	Main Vac valve opened
11/30/2012	12:14:17 PM	Helium MFC set to  20.000000
11/30/2012	12:14:17 PM	H2 MFC set to  0.000000
11/30/2012	12:14:17 PM	BCl3 MFC set to  0.000000
11/30/2012	12:14:17 PM	PH3 MFC set to  0.000000
11/30/2012	12:14:17 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:14:17 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:14:17 PM	Tube furnace set to 150
11/30/2012	12:14:47 PM	Helium valve closed
11/30/2012	12:14:47 PM	H2 valve closed
11/30/2012	12:14:47 PM	BCl3 valve closed
11/30/2012	12:14:47 PM	PH3 valve closed
11/30/2012	12:14:47 PM	SiCl4 pre valve closed
11/30/2012	12:14:47 PM	SiCl4 post valve closed
11/30/2012	12:14:47 PM	Bypass valve closed
11/30/2012	12:14:47 PM	Bubbler valve closed
11/30/2012	12:14:47 PM	Main Vac valve opened
11/30/2012	12:14:47 PM	Helium MFC set to  0.000000
11/30/2012	12:14:47 PM	H2 MFC set to  0.000000
11/30/2012	12:14:47 PM	BCl3 MFC set to  0.000000
11/30/2012	12:14:47 PM	PH3 MFC set to  0.000000
11/30/2012	12:14:47 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:14:47 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:14:47 PM	Tube furnace set to 150
11/30/2012	12:15:17 PM	H2 valve closed
11/30/2012	12:15:17 PM	BCl3 valve closed
11/30/2012	12:15:17 PM	PH3 valve closed
11/30/2012	12:15:17 PM	SiCl4 pre valve closed
11/30/2012	12:15:17 PM	SiCl4 post valve closed
11/30/2012	12:15:17 PM	Bypass valve closed
11/30/2012	12:15:17 PM	Bubbler valve closed
11/30/2012	12:15:17 PM	Helium valve opened
11/30/2012	12:15:17 PM	Main Vac valve opened
11/30/2012	12:15:17 PM	Helium MFC set to  20.000000
11/30/2012	12:15:17 PM	H2 MFC set to  0.000000
11/30/2012	12:15:17 PM	BCl3 MFC set to  0.000000
11/30/2012	12:15:17 PM	PH3 MFC set to  0.000000
11/30/2012	12:15:17 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:15:17 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:15:17 PM	Tube furnace set to 150
11/30/2012	12:15:47 PM	Helium valve closed
11/30/2012	12:15:47 PM	H2 valve closed
11/30/2012	12:15:47 PM	BCl3 valve closed
11/30/2012	12:15:47 PM	PH3 valve closed
11/30/2012	12:15:47 PM	SiCl4 pre valve closed
11/30/2012	12:15:47 PM	SiCl4 post valve closed
11/30/2012	12:15:47 PM	Bypass valve closed
11/30/2012	12:15:47 PM	Bubbler valve closed
11/30/2012	12:15:47 PM	Main Vac valve opened
11/30/2012	12:15:47 PM	Helium MFC set to  0.000000
11/30/2012	12:15:47 PM	H2 MFC set to  0.000000
11/30/2012	12:15:47 PM	BCl3 MFC set to  0.000000
11/30/2012	12:15:47 PM	PH3 MFC set to  0.000000
11/30/2012	12:15:47 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:15:47 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:15:48 PM	Tube furnace set to 150
11/30/2012	12:16:18 PM	H2 valve closed
11/30/2012	12:16:18 PM	BCl3 valve closed
11/30/2012	12:16:18 PM	PH3 valve closed
11/30/2012	12:16:18 PM	SiCl4 pre valve closed
11/30/2012	12:16:18 PM	SiCl4 post valve closed
11/30/2012	12:16:18 PM	Bypass valve closed
11/30/2012	12:16:18 PM	Bubbler valve closed
11/30/2012	12:16:18 PM	Helium valve opened
11/30/2012	12:16:18 PM	Main Vac valve opened
11/30/2012	12:16:18 PM	Helium MFC set to  20.000000
11/30/2012	12:16:18 PM	H2 MFC set to  0.000000
11/30/2012	12:16:18 PM	BCl3 MFC set to  0.000000
11/30/2012	12:16:18 PM	PH3 MFC set to  0.000000
11/30/2012	12:16:18 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:16:18 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:16:18 PM	Tube furnace set to 150
11/30/2012	12:16:48 PM	Helium valve closed
11/30/2012	12:16:48 PM	H2 valve closed
11/30/2012	12:16:48 PM	BCl3 valve closed
11/30/2012	12:16:48 PM	PH3 valve closed
11/30/2012	12:16:48 PM	SiCl4 pre valve closed
11/30/2012	12:16:48 PM	SiCl4 post valve closed
11/30/2012	12:16:48 PM	Bypass valve closed
11/30/2012	12:16:48 PM	Bubbler valve closed
11/30/2012	12:16:48 PM	Main Vac valve opened
11/30/2012	12:16:48 PM	Helium MFC set to  0.000000
11/30/2012	12:16:48 PM	H2 MFC set to  0.000000
11/30/2012	12:16:48 PM	BCl3 MFC set to  0.000000
11/30/2012	12:16:48 PM	PH3 MFC set to  0.000000
11/30/2012	12:16:48 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:16:48 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:16:48 PM	Tube furnace set to 150
11/30/2012	12:16:49 PM	Run finished at 12:16 PM
11/30/2012	12:17:18 PM	Main Vac valve closed
11/30/2012	12:17:30 PM	Main Vac valve opened
11/30/2012	12:18:26 PM	Recipe started at 12:18 PM
11/30/2012	12:18:26 PM	Helium valve closed
11/30/2012	12:18:26 PM	H2 valve closed
11/30/2012	12:18:26 PM	BCl3 valve closed
11/30/2012	12:18:26 PM	PH3 valve closed
11/30/2012	12:18:26 PM	SiCl4 pre valve closed
11/30/2012	12:18:26 PM	SiCl4 post valve closed
11/30/2012	12:18:26 PM	Bypass valve closed
11/30/2012	12:18:26 PM	Bubbler valve closed
11/30/2012	12:18:26 PM	Main Vac valve opened
11/30/2012	12:18:26 PM	Helium MFC set to  0.000000
11/30/2012	12:18:26 PM	H2 MFC set to  0.000000
11/30/2012	12:18:26 PM	BCl3 MFC set to  0.000000
11/30/2012	12:18:26 PM	PH3 MFC set to  0.000000
11/30/2012	12:18:26 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:18:26 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:18:26 PM	Tube furnace set to 150
11/30/2012	12:18:32 PM	H2 valve closed
11/30/2012	12:18:32 PM	BCl3 valve closed
11/30/2012	12:18:32 PM	PH3 valve closed
11/30/2012	12:18:32 PM	SiCl4 pre valve closed
11/30/2012	12:18:32 PM	SiCl4 post valve closed
11/30/2012	12:18:32 PM	Bypass valve closed
11/30/2012	12:18:32 PM	Bubbler valve closed
11/30/2012	12:18:32 PM	Helium valve opened
11/30/2012	12:18:32 PM	Main Vac valve opened
11/30/2012	12:18:32 PM	Helium MFC set to  20.000000
11/30/2012	12:18:32 PM	H2 MFC set to  0.000000
11/30/2012	12:18:32 PM	BCl3 MFC set to  0.000000
11/30/2012	12:18:32 PM	PH3 MFC set to  0.000000
11/30/2012	12:18:32 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:18:32 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:18:32 PM	Tube furnace set to 150
11/30/2012	12:19:02 PM	Helium valve closed
11/30/2012	12:19:02 PM	H2 valve closed
11/30/2012	12:19:02 PM	BCl3 valve closed
11/30/2012	12:19:02 PM	PH3 valve closed
11/30/2012	12:19:02 PM	SiCl4 pre valve closed
11/30/2012	12:19:02 PM	SiCl4 post valve closed
11/30/2012	12:19:02 PM	Bypass valve closed
11/30/2012	12:19:02 PM	Bubbler valve closed
11/30/2012	12:19:02 PM	Main Vac valve opened
11/30/2012	12:19:02 PM	Helium MFC set to  0.000000
11/30/2012	12:19:02 PM	H2 MFC set to  0.000000
11/30/2012	12:19:02 PM	BCl3 MFC set to  0.000000
11/30/2012	12:19:02 PM	PH3 MFC set to  0.000000
11/30/2012	12:19:02 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:19:02 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:19:02 PM	Tube furnace set to 150
11/30/2012	12:19:32 PM	H2 valve closed
11/30/2012	12:19:32 PM	BCl3 valve closed
11/30/2012	12:19:32 PM	PH3 valve closed
11/30/2012	12:19:32 PM	SiCl4 pre valve closed
11/30/2012	12:19:32 PM	SiCl4 post valve closed
11/30/2012	12:19:32 PM	Bypass valve closed
11/30/2012	12:19:32 PM	Bubbler valve closed
11/30/2012	12:19:32 PM	Helium valve opened
11/30/2012	12:19:32 PM	Main Vac valve opened
11/30/2012	12:19:32 PM	Helium MFC set to  20.000000
11/30/2012	12:19:32 PM	H2 MFC set to  0.000000
11/30/2012	12:19:32 PM	BCl3 MFC set to  0.000000
11/30/2012	12:19:32 PM	PH3 MFC set to  0.000000
11/30/2012	12:19:32 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:19:32 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:19:32 PM	Tube furnace set to 150
11/30/2012	12:20:02 PM	Helium valve closed
11/30/2012	12:20:02 PM	H2 valve closed
11/30/2012	12:20:02 PM	BCl3 valve closed
11/30/2012	12:20:02 PM	PH3 valve closed
11/30/2012	12:20:02 PM	SiCl4 pre valve closed
11/30/2012	12:20:02 PM	SiCl4 post valve closed
11/30/2012	12:20:02 PM	Bypass valve closed
11/30/2012	12:20:02 PM	Bubbler valve closed
11/30/2012	12:20:02 PM	Main Vac valve opened
11/30/2012	12:20:02 PM	Helium MFC set to  0.000000
11/30/2012	12:20:02 PM	H2 MFC set to  0.000000
11/30/2012	12:20:02 PM	BCl3 MFC set to  0.000000
11/30/2012	12:20:02 PM	PH3 MFC set to  0.000000
11/30/2012	12:20:02 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:20:02 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:20:02 PM	Tube furnace set to 150
11/30/2012	12:20:33 PM	H2 valve closed
11/30/2012	12:20:33 PM	BCl3 valve closed
11/30/2012	12:20:33 PM	PH3 valve closed
11/30/2012	12:20:33 PM	SiCl4 pre valve closed
11/30/2012	12:20:33 PM	SiCl4 post valve closed
11/30/2012	12:20:33 PM	Bypass valve closed
11/30/2012	12:20:33 PM	Bubbler valve closed
11/30/2012	12:20:33 PM	Helium valve opened
11/30/2012	12:20:33 PM	Main Vac valve opened
11/30/2012	12:20:33 PM	Helium MFC set to  20.000000
11/30/2012	12:20:33 PM	H2 MFC set to  0.000000
11/30/2012	12:20:33 PM	BCl3 MFC set to  0.000000
11/30/2012	12:20:33 PM	PH3 MFC set to  0.000000
11/30/2012	12:20:33 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:20:33 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:20:33 PM	Tube furnace set to 150
11/30/2012	12:21:03 PM	Helium valve closed
11/30/2012	12:21:03 PM	H2 valve closed
11/30/2012	12:21:03 PM	BCl3 valve closed
11/30/2012	12:21:03 PM	PH3 valve closed
11/30/2012	12:21:03 PM	SiCl4 pre valve closed
11/30/2012	12:21:03 PM	SiCl4 post valve closed
11/30/2012	12:21:03 PM	Bypass valve closed
11/30/2012	12:21:03 PM	Bubbler valve closed
11/30/2012	12:21:03 PM	Main Vac valve opened
11/30/2012	12:21:03 PM	Helium MFC set to  0.000000
11/30/2012	12:21:03 PM	H2 MFC set to  0.000000
11/30/2012	12:21:03 PM	BCl3 MFC set to  0.000000
11/30/2012	12:21:03 PM	PH3 MFC set to  0.000000
11/30/2012	12:21:03 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:21:03 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:21:03 PM	Tube furnace set to 150
11/30/2012	12:21:33 PM	H2 valve closed
11/30/2012	12:21:33 PM	BCl3 valve closed
11/30/2012	12:21:33 PM	PH3 valve closed
11/30/2012	12:21:33 PM	SiCl4 pre valve closed
11/30/2012	12:21:33 PM	SiCl4 post valve closed
11/30/2012	12:21:33 PM	Bypass valve closed
11/30/2012	12:21:33 PM	Bubbler valve closed
11/30/2012	12:21:33 PM	Helium valve opened
11/30/2012	12:21:33 PM	Main Vac valve opened
11/30/2012	12:21:33 PM	Helium MFC set to  20.000000
11/30/2012	12:21:33 PM	H2 MFC set to  0.000000
11/30/2012	12:21:33 PM	BCl3 MFC set to  0.000000
11/30/2012	12:21:33 PM	PH3 MFC set to  0.000000
11/30/2012	12:21:33 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:21:33 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:21:33 PM	Tube furnace set to 150
11/30/2012	12:22:03 PM	Helium valve closed
11/30/2012	12:22:03 PM	H2 valve closed
11/30/2012	12:22:03 PM	BCl3 valve closed
11/30/2012	12:22:03 PM	PH3 valve closed
11/30/2012	12:22:03 PM	SiCl4 pre valve closed
11/30/2012	12:22:03 PM	SiCl4 post valve closed
11/30/2012	12:22:03 PM	Bypass valve closed
11/30/2012	12:22:03 PM	Bubbler valve closed
11/30/2012	12:22:03 PM	Main Vac valve opened
11/30/2012	12:22:03 PM	Helium MFC set to  0.000000
11/30/2012	12:22:03 PM	H2 MFC set to  0.000000
11/30/2012	12:22:03 PM	BCl3 MFC set to  0.000000
11/30/2012	12:22:03 PM	PH3 MFC set to  0.000000
11/30/2012	12:22:03 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:22:03 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:22:03 PM	Tube furnace set to 150
11/30/2012	12:22:33 PM	H2 valve closed
11/30/2012	12:22:33 PM	BCl3 valve closed
11/30/2012	12:22:34 PM	PH3 valve closed
11/30/2012	12:22:34 PM	SiCl4 pre valve closed
11/30/2012	12:22:34 PM	SiCl4 post valve closed
11/30/2012	12:22:34 PM	Bypass valve closed
11/30/2012	12:22:34 PM	Bubbler valve closed
11/30/2012	12:22:34 PM	Helium valve opened
11/30/2012	12:22:34 PM	Main Vac valve opened
11/30/2012	12:22:34 PM	Helium MFC set to  20.000000
11/30/2012	12:22:34 PM	H2 MFC set to  0.000000
11/30/2012	12:22:34 PM	BCl3 MFC set to  0.000000
11/30/2012	12:22:34 PM	PH3 MFC set to  0.000000
11/30/2012	12:22:34 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:22:34 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:22:34 PM	Tube furnace set to 150
11/30/2012	12:23:04 PM	Helium valve closed
11/30/2012	12:23:04 PM	H2 valve closed
11/30/2012	12:23:04 PM	BCl3 valve closed
11/30/2012	12:23:04 PM	PH3 valve closed
11/30/2012	12:23:04 PM	SiCl4 pre valve closed
11/30/2012	12:23:04 PM	SiCl4 post valve closed
11/30/2012	12:23:04 PM	Bypass valve closed
11/30/2012	12:23:04 PM	Bubbler valve closed
11/30/2012	12:23:04 PM	Main Vac valve opened
11/30/2012	12:23:04 PM	Helium MFC set to  0.000000
11/30/2012	12:23:04 PM	H2 MFC set to  0.000000
11/30/2012	12:23:04 PM	BCl3 MFC set to  0.000000
11/30/2012	12:23:04 PM	PH3 MFC set to  0.000000
11/30/2012	12:23:04 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:23:04 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:23:04 PM	Tube furnace set to 150
11/30/2012	12:23:34 PM	H2 valve closed
11/30/2012	12:23:34 PM	BCl3 valve closed
11/30/2012	12:23:34 PM	PH3 valve closed
11/30/2012	12:23:34 PM	SiCl4 pre valve closed
11/30/2012	12:23:34 PM	SiCl4 post valve closed
11/30/2012	12:23:34 PM	Bypass valve closed
11/30/2012	12:23:34 PM	Bubbler valve closed
11/30/2012	12:23:34 PM	Helium valve opened
11/30/2012	12:23:34 PM	Main Vac valve opened
11/30/2012	12:23:34 PM	Helium MFC set to  20.000000
11/30/2012	12:23:34 PM	H2 MFC set to  0.000000
11/30/2012	12:23:34 PM	BCl3 MFC set to  0.000000
11/30/2012	12:23:34 PM	PH3 MFC set to  0.000000
11/30/2012	12:23:34 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:23:34 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:23:34 PM	Tube furnace set to 150
11/30/2012	12:24:04 PM	Helium valve closed
11/30/2012	12:24:04 PM	H2 valve closed
11/30/2012	12:24:04 PM	BCl3 valve closed
11/30/2012	12:24:04 PM	PH3 valve closed
11/30/2012	12:24:04 PM	SiCl4 pre valve closed
11/30/2012	12:24:04 PM	SiCl4 post valve closed
11/30/2012	12:24:04 PM	Bypass valve closed
11/30/2012	12:24:04 PM	Bubbler valve closed
11/30/2012	12:24:04 PM	Main Vac valve opened
11/30/2012	12:24:04 PM	Helium MFC set to  0.000000
11/30/2012	12:24:04 PM	H2 MFC set to  0.000000
11/30/2012	12:24:04 PM	BCl3 MFC set to  0.000000
11/30/2012	12:24:04 PM	PH3 MFC set to  0.000000
11/30/2012	12:24:04 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:24:04 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:24:04 PM	Tube furnace set to 150
11/30/2012	12:24:34 PM	H2 valve closed
11/30/2012	12:24:34 PM	BCl3 valve closed
11/30/2012	12:24:34 PM	PH3 valve closed
11/30/2012	12:24:34 PM	SiCl4 pre valve closed
11/30/2012	12:24:34 PM	SiCl4 post valve closed
11/30/2012	12:24:34 PM	Bypass valve closed
11/30/2012	12:24:35 PM	Bubbler valve closed
11/30/2012	12:24:35 PM	Helium valve opened
11/30/2012	12:24:35 PM	Main Vac valve opened
11/30/2012	12:24:35 PM	Helium MFC set to  20.000000
11/30/2012	12:24:35 PM	H2 MFC set to  0.000000
11/30/2012	12:24:35 PM	BCl3 MFC set to  0.000000
11/30/2012	12:24:35 PM	PH3 MFC set to  0.000000
11/30/2012	12:24:35 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:24:35 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:24:35 PM	Tube furnace set to 150
11/30/2012	12:25:05 PM	Helium valve closed
11/30/2012	12:25:05 PM	H2 valve closed
11/30/2012	12:25:05 PM	BCl3 valve closed
11/30/2012	12:25:05 PM	PH3 valve closed
11/30/2012	12:25:05 PM	SiCl4 pre valve closed
11/30/2012	12:25:05 PM	SiCl4 post valve closed
11/30/2012	12:25:05 PM	Bypass valve closed
11/30/2012	12:25:05 PM	Bubbler valve closed
11/30/2012	12:25:05 PM	Main Vac valve opened
11/30/2012	12:25:05 PM	Helium MFC set to  0.000000
11/30/2012	12:25:05 PM	H2 MFC set to  0.000000
11/30/2012	12:25:05 PM	BCl3 MFC set to  0.000000
11/30/2012	12:25:05 PM	PH3 MFC set to  0.000000
11/30/2012	12:25:05 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:25:05 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:25:05 PM	Tube furnace set to 150
11/30/2012	12:25:35 PM	H2 valve closed
11/30/2012	12:25:35 PM	BCl3 valve closed
11/30/2012	12:25:35 PM	PH3 valve closed
11/30/2012	12:25:35 PM	SiCl4 pre valve closed
11/30/2012	12:25:35 PM	SiCl4 post valve closed
11/30/2012	12:25:35 PM	Bypass valve closed
11/30/2012	12:25:35 PM	Bubbler valve closed
11/30/2012	12:25:35 PM	Helium valve opened
11/30/2012	12:25:35 PM	Main Vac valve opened
11/30/2012	12:25:35 PM	Helium MFC set to  20.000000
11/30/2012	12:25:35 PM	H2 MFC set to  0.000000
11/30/2012	12:25:35 PM	BCl3 MFC set to  0.000000
11/30/2012	12:25:35 PM	PH3 MFC set to  0.000000
11/30/2012	12:25:35 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:25:35 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:25:35 PM	Tube furnace set to 150
11/30/2012	12:26:05 PM	Helium valve closed
11/30/2012	12:26:05 PM	H2 valve closed
11/30/2012	12:26:05 PM	BCl3 valve closed
11/30/2012	12:26:05 PM	PH3 valve closed
11/30/2012	12:26:05 PM	SiCl4 pre valve closed
11/30/2012	12:26:05 PM	SiCl4 post valve closed
11/30/2012	12:26:05 PM	Bypass valve closed
11/30/2012	12:26:05 PM	Bubbler valve closed
11/30/2012	12:26:05 PM	Main Vac valve opened
11/30/2012	12:26:05 PM	Helium MFC set to  0.000000
11/30/2012	12:26:05 PM	H2 MFC set to  0.000000
11/30/2012	12:26:05 PM	BCl3 MFC set to  0.000000
11/30/2012	12:26:05 PM	PH3 MFC set to  0.000000
11/30/2012	12:26:05 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:26:05 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:26:05 PM	Tube furnace set to 150
11/30/2012	12:26:35 PM	Run aborted at 12:26 PM
11/30/2012	12:26:35 PM	Helium valve closed
11/30/2012	12:26:35 PM	H2 valve closed
11/30/2012	12:26:35 PM	BCl3 valve closed
11/30/2012	12:26:35 PM	PH3 valve closed
11/30/2012	12:26:35 PM	SiCl4 pre valve closed
11/30/2012	12:26:35 PM	SiCl4 post valve closed
11/30/2012	12:26:35 PM	Bypass valve closed
11/30/2012	12:26:35 PM	Main Vac valve closed
11/30/2012	12:26:35 PM	Bubbler valve closed
11/30/2012	12:26:35 PM	Helium MFC set to  0.000000
11/30/2012	12:26:35 PM	H2 MFC set to  0.000000
11/30/2012	12:26:35 PM	BCl3 MFC set to  0.000000
11/30/2012	12:26:35 PM	PH3 MFC set to  0.000000
11/30/2012	12:26:35 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:26:35 PM	Tube furnace set to 0
11/30/2012	12:26:37 PM	Main Vac valve opened
11/30/2012	12:28:59 PM	Recipe started at 12:28 PM
11/30/2012	12:28:59 PM	Helium valve closed
11/30/2012	12:28:59 PM	H2 valve closed
11/30/2012	12:28:59 PM	BCl3 valve closed
11/30/2012	12:28:59 PM	PH3 valve closed
11/30/2012	12:28:59 PM	SiCl4 pre valve closed
11/30/2012	12:28:59 PM	SiCl4 post valve closed
11/30/2012	12:28:59 PM	Bypass valve closed
11/30/2012	12:28:59 PM	Bubbler valve closed
11/30/2012	12:28:59 PM	Main Vac valve opened
11/30/2012	12:28:59 PM	Helium MFC set to  0.000000
11/30/2012	12:28:59 PM	H2 MFC set to  0.000000
11/30/2012	12:28:59 PM	BCl3 MFC set to  0.000000
11/30/2012	12:28:59 PM	PH3 MFC set to  0.000000
11/30/2012	12:28:59 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:28:59 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:28:59 PM	Tube furnace set to 150
11/30/2012	12:43:59 PM	Helium valve closed
11/30/2012	12:43:59 PM	H2 valve closed
11/30/2012	12:43:59 PM	BCl3 valve closed
11/30/2012	12:43:59 PM	PH3 valve closed
11/30/2012	12:43:59 PM	SiCl4 pre valve closed
11/30/2012	12:43:59 PM	SiCl4 post valve closed
11/30/2012	12:43:59 PM	Main Vac valve closed
11/30/2012	12:43:59 PM	Bypass valve closed
11/30/2012	12:43:59 PM	Bubbler valve closed
11/30/2012	12:43:59 PM	Helium MFC set to  0.000000
11/30/2012	12:43:59 PM	H2 MFC set to  0.000000
11/30/2012	12:43:59 PM	BCl3 MFC set to  0.000000
11/30/2012	12:43:59 PM	PH3 MFC set to  0.000000
11/30/2012	12:43:59 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:43:59 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:43:59 PM	Tube furnace set to 150
11/30/2012	12:44:02 PM	Helium valve closed
11/30/2012	12:44:02 PM	BCl3 valve closed
11/30/2012	12:44:02 PM	PH3 valve closed
11/30/2012	12:44:02 PM	SiCl4 pre valve closed
11/30/2012	12:44:02 PM	SiCl4 post valve closed
11/30/2012	12:44:02 PM	Main Vac valve closed
11/30/2012	12:44:02 PM	Bypass valve closed
11/30/2012	12:44:02 PM	Bubbler valve closed
11/30/2012	12:44:02 PM	H2 valve opened
11/30/2012	12:44:02 PM	Helium MFC set to  0.000000
11/30/2012	12:44:02 PM	H2 MFC set to  500.000000
11/30/2012	12:44:02 PM	BCl3 MFC set to  0.000000
11/30/2012	12:44:02 PM	PH3 MFC set to  0.000000
11/30/2012	12:44:02 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:44:02 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:44:03 PM	Tube furnace set to 150
11/30/2012	12:45:15 PM	Helium valve closed
11/30/2012	12:45:15 PM	BCl3 valve closed
11/30/2012	12:45:15 PM	PH3 valve closed
11/30/2012	12:45:15 PM	SiCl4 pre valve closed
11/30/2012	12:45:15 PM	SiCl4 post valve closed
11/30/2012	12:45:15 PM	Main Vac valve closed
11/30/2012	12:45:15 PM	Bypass valve closed
11/30/2012	12:45:15 PM	H2 valve opened
11/30/2012	12:45:15 PM	Bubbler valve opened
11/30/2012	12:45:15 PM	Helium MFC set to  0.000000
11/30/2012	12:45:15 PM	H2 MFC set to  500.000000
11/30/2012	12:45:15 PM	BCl3 MFC set to  0.000000
11/30/2012	12:45:15 PM	PH3 MFC set to  0.000000
11/30/2012	12:45:15 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:45:15 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:45:15 PM	Tube furnace set to 150
11/30/2012	12:45:16 PM	Helium valve closed
11/30/2012	12:45:16 PM	BCl3 valve closed
11/30/2012	12:45:16 PM	PH3 valve closed
11/30/2012	12:45:16 PM	SiCl4 pre valve closed
11/30/2012	12:45:16 PM	SiCl4 post valve closed
11/30/2012	12:45:16 PM	Main Vac valve closed
11/30/2012	12:45:16 PM	Bypass valve closed
11/30/2012	12:45:16 PM	H2 valve opened
11/30/2012	12:45:16 PM	Bubbler valve opened
11/30/2012	12:45:16 PM	Helium MFC set to  0.000000
11/30/2012	12:45:16 PM	H2 MFC set to  500.000000
11/30/2012	12:45:16 PM	BCl3 MFC set to  0.000000
11/30/2012	12:45:16 PM	PH3 MFC set to  0.000000
11/30/2012	12:45:16 PM	SiCl4 MFC set to  0.000000
11/30/2012	12:45:16 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	12:45:16 PM	Tube furnace set to 1000
11/30/2012	1:05:16 PM	Helium valve closed
11/30/2012	1:05:16 PM	PH3 valve closed
11/30/2012	1:05:16 PM	Main Vac valve closed
11/30/2012	1:05:16 PM	Bypass valve closed
11/30/2012	1:05:16 PM	H2 valve opened
11/30/2012	1:05:16 PM	BCl3 valve opened
11/30/2012	1:05:16 PM	SiCl4 pre valve opened
11/30/2012	1:05:16 PM	SiCl4 post valve opened
11/30/2012	1:05:16 PM	Bubbler valve opened
11/30/2012	1:05:16 PM	Helium MFC set to  0.000000
11/30/2012	1:05:16 PM	H2 MFC set to  450.000000
11/30/2012	1:05:16 PM	BCl3 MFC set to  1.300000
11/30/2012	1:05:16 PM	PH3 MFC set to  0.000000
11/30/2012	1:05:16 PM	SiCl4 MFC set to  50.000000
11/30/2012	1:05:16 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	1:05:16 PM	Tube furnace set to 1000
11/30/2012	1:20:16 PM	Helium valve closed
11/30/2012	1:20:16 PM	BCl3 valve closed
11/30/2012	1:20:16 PM	Main Vac valve closed
11/30/2012	1:20:16 PM	Bypass valve closed
11/30/2012	1:20:16 PM	H2 valve opened
11/30/2012	1:20:16 PM	PH3 valve opened
11/30/2012	1:20:16 PM	SiCl4 pre valve opened
11/30/2012	1:20:16 PM	SiCl4 post valve opened
11/30/2012	1:20:16 PM	Bubbler valve opened
11/30/2012	1:20:16 PM	Helium MFC set to  0.000000
11/30/2012	1:20:16 PM	H2 MFC set to  450.000000
11/30/2012	1:20:16 PM	BCl3 MFC set to  0.000000
11/30/2012	1:20:16 PM	PH3 MFC set to  20.000000
11/30/2012	1:20:16 PM	SiCl4 MFC set to  50.000000
11/30/2012	1:20:16 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	1:20:16 PM	Tube furnace set to 1000
11/30/2012	1:25:16 PM	Helium valve closed
11/30/2012	1:25:16 PM	BCl3 valve closed
11/30/2012	1:25:16 PM	PH3 valve closed
11/30/2012	1:25:16 PM	SiCl4 pre valve closed
11/30/2012	1:25:16 PM	SiCl4 post valve closed
11/30/2012	1:25:16 PM	Main Vac valve closed
11/30/2012	1:25:16 PM	Bypass valve closed
11/30/2012	1:25:16 PM	H2 valve opened
11/30/2012	1:25:16 PM	Bubbler valve opened
11/30/2012	1:25:16 PM	Helium MFC set to  0.000000
11/30/2012	1:25:16 PM	H2 MFC set to  500.000000
11/30/2012	1:25:16 PM	BCl3 MFC set to  0.000000
11/30/2012	1:25:16 PM	PH3 MFC set to  0.000000
11/30/2012	1:25:16 PM	SiCl4 MFC set to  0.000000
11/30/2012	1:25:16 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	1:25:17 PM	Tube furnace set to 950
11/30/2012	1:28:17 PM	Helium valve closed
11/30/2012	1:28:17 PM	BCl3 valve closed
11/30/2012	1:28:17 PM	PH3 valve closed
11/30/2012	1:28:17 PM	SiCl4 pre valve closed
11/30/2012	1:28:17 PM	SiCl4 post valve closed
11/30/2012	1:28:17 PM	Main Vac valve closed
11/30/2012	1:28:17 PM	Bypass valve closed
11/30/2012	1:28:17 PM	H2 valve opened
11/30/2012	1:28:17 PM	Bubbler valve opened
11/30/2012	1:28:17 PM	Helium MFC set to  0.000000
11/30/2012	1:28:17 PM	H2 MFC set to  500.000000
11/30/2012	1:28:17 PM	BCl3 MFC set to  0.000000
11/30/2012	1:28:17 PM	PH3 MFC set to  0.000000
11/30/2012	1:28:17 PM	SiCl4 MFC set to  0.000000
11/30/2012	1:28:17 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	1:28:17 PM	Tube furnace set to 900
11/30/2012	1:31:17 PM	Helium valve closed
11/30/2012	1:31:17 PM	BCl3 valve closed
11/30/2012	1:31:17 PM	PH3 valve closed
11/30/2012	1:31:17 PM	SiCl4 pre valve closed
11/30/2012	1:31:17 PM	SiCl4 post valve closed
11/30/2012	1:31:17 PM	Main Vac valve closed
11/30/2012	1:31:17 PM	Bypass valve closed
11/30/2012	1:31:17 PM	H2 valve opened
11/30/2012	1:31:17 PM	Bubbler valve opened
11/30/2012	1:31:17 PM	Helium MFC set to  0.000000
11/30/2012	1:31:17 PM	H2 MFC set to  500.000000
11/30/2012	1:31:17 PM	BCl3 MFC set to  0.000000
11/30/2012	1:31:17 PM	PH3 MFC set to  0.000000
11/30/2012	1:31:17 PM	SiCl4 MFC set to  0.000000
11/30/2012	1:31:17 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	1:31:17 PM	Tube furnace set to 850
11/30/2012	1:34:17 PM	Helium valve closed
11/30/2012	1:34:17 PM	BCl3 valve closed
11/30/2012	1:34:17 PM	PH3 valve closed
11/30/2012	1:34:17 PM	SiCl4 pre valve closed
11/30/2012	1:34:17 PM	SiCl4 post valve closed
11/30/2012	1:34:17 PM	Main Vac valve closed
11/30/2012	1:34:17 PM	Bypass valve closed
11/30/2012	1:34:17 PM	H2 valve opened
11/30/2012	1:34:17 PM	Bubbler valve opened
11/30/2012	1:34:17 PM	Helium MFC set to  0.000000
11/30/2012	1:34:17 PM	H2 MFC set to  500.000000
11/30/2012	1:34:17 PM	BCl3 MFC set to  0.000000
11/30/2012	1:34:17 PM	PH3 MFC set to  0.000000
11/30/2012	1:34:17 PM	SiCl4 MFC set to  0.000000
11/30/2012	1:34:17 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	1:34:17 PM	Tube furnace set to 800
11/30/2012	1:37:17 PM	Helium valve closed
11/30/2012	1:37:17 PM	BCl3 valve closed
11/30/2012	1:37:17 PM	PH3 valve closed
11/30/2012	1:37:17 PM	SiCl4 pre valve closed
11/30/2012	1:37:17 PM	SiCl4 post valve closed
11/30/2012	1:37:17 PM	Main Vac valve closed
11/30/2012	1:37:17 PM	Bypass valve closed
11/30/2012	1:37:17 PM	H2 valve opened
11/30/2012	1:37:17 PM	Bubbler valve opened
11/30/2012	1:37:17 PM	Helium MFC set to  0.000000
11/30/2012	1:37:17 PM	H2 MFC set to  500.000000
11/30/2012	1:37:17 PM	BCl3 MFC set to  0.000000
11/30/2012	1:37:17 PM	PH3 MFC set to  0.000000
11/30/2012	1:37:17 PM	SiCl4 MFC set to  0.000000
11/30/2012	1:37:17 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	1:37:18 PM	Tube furnace set to 750
11/30/2012	1:40:18 PM	H2 valve closed
11/30/2012	1:40:18 PM	BCl3 valve closed
11/30/2012	1:40:18 PM	PH3 valve closed
11/30/2012	1:40:18 PM	SiCl4 pre valve closed
11/30/2012	1:40:18 PM	SiCl4 post valve closed
11/30/2012	1:40:18 PM	Main Vac valve closed
11/30/2012	1:40:18 PM	Bypass valve closed
11/30/2012	1:40:18 PM	Helium valve opened
11/30/2012	1:40:18 PM	Bubbler valve opened
11/30/2012	1:40:18 PM	Helium MFC set to  500.000000
11/30/2012	1:40:18 PM	H2 MFC set to  0.000000
11/30/2012	1:40:18 PM	BCl3 MFC set to  0.000000
11/30/2012	1:40:18 PM	PH3 MFC set to  0.000000
11/30/2012	1:40:18 PM	SiCl4 MFC set to  0.000000
11/30/2012	1:40:18 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	1:40:18 PM	Tube furnace set to 0
11/30/2012	2:00:18 PM	Helium valve closed
11/30/2012	2:00:18 PM	H2 valve closed
11/30/2012	2:00:18 PM	BCl3 valve closed
11/30/2012	2:00:18 PM	PH3 valve closed
11/30/2012	2:00:18 PM	SiCl4 pre valve closed
11/30/2012	2:00:18 PM	SiCl4 post valve closed
11/30/2012	2:00:18 PM	Main Vac valve closed
11/30/2012	2:00:18 PM	Bypass valve closed
11/30/2012	2:00:18 PM	Bubbler valve closed
11/30/2012	2:00:18 PM	Helium MFC set to  0.000000
11/30/2012	2:00:18 PM	H2 MFC set to  0.000000
11/30/2012	2:00:18 PM	BCl3 MFC set to  0.000000
11/30/2012	2:00:18 PM	PH3 MFC set to  0.000000
11/30/2012	2:00:18 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:00:18 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:00:18 PM	Tube furnace set to 0
11/30/2012	2:05:36 PM	Run aborted at 2:05 PM
11/30/2012	2:05:36 PM	Helium valve closed
11/30/2012	2:05:36 PM	H2 valve closed
11/30/2012	2:05:36 PM	BCl3 valve closed
11/30/2012	2:05:36 PM	PH3 valve closed
11/30/2012	2:05:36 PM	SiCl4 pre valve closed
11/30/2012	2:05:36 PM	SiCl4 post valve closed
11/30/2012	2:05:36 PM	Bypass valve closed
11/30/2012	2:05:36 PM	Main Vac valve closed
11/30/2012	2:05:36 PM	Bubbler valve closed
11/30/2012	2:05:36 PM	Helium MFC set to  0.000000
11/30/2012	2:05:36 PM	H2 MFC set to  0.000000
11/30/2012	2:05:36 PM	BCl3 MFC set to  0.000000
11/30/2012	2:05:36 PM	PH3 MFC set to  0.000000
11/30/2012	2:05:36 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:05:36 PM	Tube furnace set to 0
11/30/2012	2:05:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/30/2012	2:05:38 PM	Recipe started at 2:05 PM
11/30/2012	2:05:39 PM	Helium valve closed
11/30/2012	2:05:39 PM	H2 valve closed
11/30/2012	2:05:39 PM	BCl3 valve closed
11/30/2012	2:05:39 PM	PH3 valve closed
11/30/2012	2:05:39 PM	SiCl4 pre valve closed
11/30/2012	2:05:39 PM	SiCl4 post valve closed
11/30/2012	2:05:39 PM	Main Vac valve closed
11/30/2012	2:05:39 PM	Bypass valve closed
11/30/2012	2:05:39 PM	Bubbler valve closed
11/30/2012	2:05:39 PM	Helium MFC set to  0.000000
11/30/2012	2:05:39 PM	H2 MFC set to  0.000000
11/30/2012	2:05:39 PM	BCl3 MFC set to  0.000000
11/30/2012	2:05:39 PM	PH3 MFC set to  0.000000
11/30/2012	2:05:39 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:05:39 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:05:39 PM	Tube furnace set to 0
11/30/2012	2:05:42 PM	H2 valve closed
11/30/2012	2:05:42 PM	BCl3 valve closed
11/30/2012	2:05:42 PM	PH3 valve closed
11/30/2012	2:05:42 PM	SiCl4 pre valve closed
11/30/2012	2:05:42 PM	SiCl4 post valve closed
11/30/2012	2:05:42 PM	Main Vac valve closed
11/30/2012	2:05:42 PM	Bypass valve closed
11/30/2012	2:05:42 PM	Bubbler valve closed
11/30/2012	2:05:42 PM	Helium valve opened
11/30/2012	2:05:42 PM	Helium MFC set to  500.000000
11/30/2012	2:05:42 PM	H2 MFC set to  0.000000
11/30/2012	2:05:42 PM	BCl3 MFC set to  0.000000
11/30/2012	2:05:42 PM	PH3 MFC set to  0.000000
11/30/2012	2:05:42 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:05:42 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:05:42 PM	Tube furnace set to 0
11/30/2012	2:05:43 PM	Helium valve closed
11/30/2012	2:05:43 PM	H2 valve closed
11/30/2012	2:05:43 PM	BCl3 valve closed
11/30/2012	2:05:43 PM	PH3 valve closed
11/30/2012	2:05:43 PM	SiCl4 pre valve closed
11/30/2012	2:05:43 PM	SiCl4 post valve closed
11/30/2012	2:05:43 PM	Main Vac valve closed
11/30/2012	2:05:43 PM	Bypass valve closed
11/30/2012	2:05:43 PM	Bubbler valve closed
11/30/2012	2:05:43 PM	Helium MFC set to  0.000000
11/30/2012	2:05:43 PM	H2 MFC set to  0.000000
11/30/2012	2:05:43 PM	BCl3 MFC set to  0.000000
11/30/2012	2:05:43 PM	PH3 MFC set to  0.000000
11/30/2012	2:05:43 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:05:43 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:05:43 PM	Tube furnace set to 0
11/30/2012	2:05:44 PM	Run finished at 2:05 PM
11/30/2012	2:05:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
11/30/2012	2:17:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/30/2012	2:17:03 PM	Recipe started at 2:17 PM
11/30/2012	2:17:03 PM	Helium valve closed
11/30/2012	2:17:03 PM	H2 valve closed
11/30/2012	2:17:03 PM	BCl3 valve closed
11/30/2012	2:17:03 PM	PH3 valve closed
11/30/2012	2:17:03 PM	SiCl4 pre valve closed
11/30/2012	2:17:03 PM	SiCl4 post valve closed
11/30/2012	2:17:03 PM	Main Vac valve closed
11/30/2012	2:17:03 PM	Bubbler valve closed
11/30/2012	2:17:03 PM	Bypass valve opened
11/30/2012	2:17:03 PM	Helium MFC set to  0.000000
11/30/2012	2:17:03 PM	H2 MFC set to  0.000000
11/30/2012	2:17:03 PM	BCl3 MFC set to  0.000000
11/30/2012	2:17:03 PM	PH3 MFC set to  0.000000
11/30/2012	2:17:03 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:17:03 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:17:03 PM	Tube furnace set to 0
11/30/2012	2:18:21 PM	Helium valve closed
11/30/2012	2:18:21 PM	H2 valve closed
11/30/2012	2:18:21 PM	BCl3 valve closed
11/30/2012	2:18:21 PM	PH3 valve closed
11/30/2012	2:18:21 PM	SiCl4 pre valve closed
11/30/2012	2:18:21 PM	SiCl4 post valve closed
11/30/2012	2:18:21 PM	Main Vac valve closed
11/30/2012	2:18:21 PM	Bubbler valve closed
11/30/2012	2:18:21 PM	Bypass valve opened
11/30/2012	2:18:21 PM	Helium MFC set to  0.000000
11/30/2012	2:18:21 PM	H2 MFC set to  0.000000
11/30/2012	2:18:21 PM	BCl3 MFC set to  0.000000
11/30/2012	2:18:21 PM	PH3 MFC set to  0.000000
11/30/2012	2:18:21 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:18:21 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:18:22 PM	Tube furnace set to 0
11/30/2012	2:19:22 PM	Helium valve closed
11/30/2012	2:19:22 PM	H2 valve closed
11/30/2012	2:19:22 PM	BCl3 valve closed
11/30/2012	2:19:22 PM	PH3 valve closed
11/30/2012	2:19:22 PM	SiCl4 pre valve closed
11/30/2012	2:19:22 PM	SiCl4 post valve closed
11/30/2012	2:19:22 PM	Bypass valve closed
11/30/2012	2:19:22 PM	Bubbler valve closed
11/30/2012	2:19:22 PM	Main Vac valve opened
11/30/2012	2:19:22 PM	Helium MFC set to  0.000000
11/30/2012	2:19:22 PM	H2 MFC set to  0.000000
11/30/2012	2:19:22 PM	BCl3 MFC set to  0.000000
11/30/2012	2:19:22 PM	PH3 MFC set to  0.000000
11/30/2012	2:19:22 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:19:22 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:19:22 PM	Tube furnace set to 0
11/30/2012	2:19:23 PM	Run finished at 2:19 PM
11/30/2012	2:19:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/30/2012	2:31:05 PM	Helium MFC set to  10.000000
11/30/2012	2:31:06 PM	Helium valve opened
11/30/2012	2:31:17 PM	Helium valve closed
11/30/2012	2:31:54 PM	Recipe started at 2:31 PM
11/30/2012	2:31:54 PM	Helium valve closed
11/30/2012	2:31:54 PM	H2 valve closed
11/30/2012	2:31:54 PM	BCl3 valve closed
11/30/2012	2:31:54 PM	PH3 valve closed
11/30/2012	2:31:54 PM	SiCl4 pre valve closed
11/30/2012	2:31:54 PM	SiCl4 post valve closed
11/30/2012	2:31:54 PM	Bypass valve closed
11/30/2012	2:31:54 PM	Bubbler valve closed
11/30/2012	2:31:54 PM	Main Vac valve opened
11/30/2012	2:31:54 PM	Helium MFC set to  0.000000
11/30/2012	2:31:54 PM	H2 MFC set to  0.000000
11/30/2012	2:31:54 PM	BCl3 MFC set to  0.000000
11/30/2012	2:31:54 PM	PH3 MFC set to  0.000000
11/30/2012	2:31:54 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:31:54 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:31:54 PM	Tube furnace set to 150
11/30/2012	2:31:58 PM	H2 valve closed
11/30/2012	2:31:58 PM	BCl3 valve closed
11/30/2012	2:31:58 PM	PH3 valve closed
11/30/2012	2:31:58 PM	SiCl4 pre valve closed
11/30/2012	2:31:58 PM	SiCl4 post valve closed
11/30/2012	2:31:58 PM	Bypass valve closed
11/30/2012	2:31:58 PM	Bubbler valve closed
11/30/2012	2:31:58 PM	Helium valve opened
11/30/2012	2:31:58 PM	Main Vac valve opened
11/30/2012	2:31:58 PM	Helium MFC set to  20.000000
11/30/2012	2:31:58 PM	H2 MFC set to  0.000000
11/30/2012	2:31:58 PM	BCl3 MFC set to  0.000000
11/30/2012	2:31:58 PM	PH3 MFC set to  0.000000
11/30/2012	2:31:58 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:31:58 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:31:58 PM	Tube furnace set to 150
11/30/2012	2:32:28 PM	Helium valve closed
11/30/2012	2:32:28 PM	H2 valve closed
11/30/2012	2:32:28 PM	BCl3 valve closed
11/30/2012	2:32:28 PM	PH3 valve closed
11/30/2012	2:32:28 PM	SiCl4 pre valve closed
11/30/2012	2:32:28 PM	SiCl4 post valve closed
11/30/2012	2:32:28 PM	Bypass valve closed
11/30/2012	2:32:28 PM	Bubbler valve closed
11/30/2012	2:32:28 PM	Main Vac valve opened
11/30/2012	2:32:28 PM	Helium MFC set to  0.000000
11/30/2012	2:32:28 PM	H2 MFC set to  0.000000
11/30/2012	2:32:28 PM	BCl3 MFC set to  0.000000
11/30/2012	2:32:28 PM	PH3 MFC set to  0.000000
11/30/2012	2:32:28 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:32:28 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:32:28 PM	Tube furnace set to 150
11/30/2012	2:32:58 PM	H2 valve closed
11/30/2012	2:32:58 PM	BCl3 valve closed
11/30/2012	2:32:58 PM	PH3 valve closed
11/30/2012	2:32:58 PM	SiCl4 pre valve closed
11/30/2012	2:32:58 PM	SiCl4 post valve closed
11/30/2012	2:32:58 PM	Bypass valve closed
11/30/2012	2:32:59 PM	Bubbler valve closed
11/30/2012	2:32:59 PM	Helium valve opened
11/30/2012	2:32:59 PM	Main Vac valve opened
11/30/2012	2:32:59 PM	Helium MFC set to  20.000000
11/30/2012	2:32:59 PM	H2 MFC set to  0.000000
11/30/2012	2:32:59 PM	BCl3 MFC set to  0.000000
11/30/2012	2:32:59 PM	PH3 MFC set to  0.000000
11/30/2012	2:32:59 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:32:59 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:32:59 PM	Tube furnace set to 150
11/30/2012	2:33:29 PM	Helium valve closed
11/30/2012	2:33:29 PM	H2 valve closed
11/30/2012	2:33:29 PM	BCl3 valve closed
11/30/2012	2:33:29 PM	PH3 valve closed
11/30/2012	2:33:29 PM	SiCl4 pre valve closed
11/30/2012	2:33:29 PM	SiCl4 post valve closed
11/30/2012	2:33:29 PM	Bypass valve closed
11/30/2012	2:33:29 PM	Bubbler valve closed
11/30/2012	2:33:29 PM	Main Vac valve opened
11/30/2012	2:33:29 PM	Helium MFC set to  0.000000
11/30/2012	2:33:29 PM	H2 MFC set to  0.000000
11/30/2012	2:33:29 PM	BCl3 MFC set to  0.000000
11/30/2012	2:33:29 PM	PH3 MFC set to  0.000000
11/30/2012	2:33:29 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:33:29 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:33:29 PM	Tube furnace set to 150
11/30/2012	2:33:59 PM	H2 valve closed
11/30/2012	2:33:59 PM	BCl3 valve closed
11/30/2012	2:33:59 PM	PH3 valve closed
11/30/2012	2:33:59 PM	SiCl4 pre valve closed
11/30/2012	2:33:59 PM	SiCl4 post valve closed
11/30/2012	2:33:59 PM	Bypass valve closed
11/30/2012	2:33:59 PM	Bubbler valve closed
11/30/2012	2:33:59 PM	Helium valve opened
11/30/2012	2:33:59 PM	Main Vac valve opened
11/30/2012	2:33:59 PM	Helium MFC set to  20.000000
11/30/2012	2:33:59 PM	H2 MFC set to  0.000000
11/30/2012	2:33:59 PM	BCl3 MFC set to  0.000000
11/30/2012	2:33:59 PM	PH3 MFC set to  0.000000
11/30/2012	2:33:59 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:33:59 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:33:59 PM	Tube furnace set to 150
11/30/2012	2:34:29 PM	Helium valve closed
11/30/2012	2:34:29 PM	H2 valve closed
11/30/2012	2:34:29 PM	BCl3 valve closed
11/30/2012	2:34:29 PM	PH3 valve closed
11/30/2012	2:34:29 PM	SiCl4 pre valve closed
11/30/2012	2:34:29 PM	SiCl4 post valve closed
11/30/2012	2:34:29 PM	Bypass valve closed
11/30/2012	2:34:29 PM	Bubbler valve closed
11/30/2012	2:34:29 PM	Main Vac valve opened
11/30/2012	2:34:29 PM	Helium MFC set to  0.000000
11/30/2012	2:34:29 PM	H2 MFC set to  0.000000
11/30/2012	2:34:29 PM	BCl3 MFC set to  0.000000
11/30/2012	2:34:29 PM	PH3 MFC set to  0.000000
11/30/2012	2:34:29 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:34:29 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:34:29 PM	Tube furnace set to 150
11/30/2012	2:34:59 PM	H2 valve closed
11/30/2012	2:34:59 PM	BCl3 valve closed
11/30/2012	2:34:59 PM	PH3 valve closed
11/30/2012	2:34:59 PM	SiCl4 pre valve closed
11/30/2012	2:34:59 PM	SiCl4 post valve closed
11/30/2012	2:34:59 PM	Bypass valve closed
11/30/2012	2:34:59 PM	Bubbler valve closed
11/30/2012	2:34:59 PM	Helium valve opened
11/30/2012	2:34:59 PM	Main Vac valve opened
11/30/2012	2:35:00 PM	Helium MFC set to  20.000000
11/30/2012	2:35:00 PM	H2 MFC set to  0.000000
11/30/2012	2:35:00 PM	BCl3 MFC set to  0.000000
11/30/2012	2:35:00 PM	PH3 MFC set to  0.000000
11/30/2012	2:35:00 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:35:00 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:35:00 PM	Tube furnace set to 150
11/30/2012	2:35:30 PM	Helium valve closed
11/30/2012	2:35:30 PM	H2 valve closed
11/30/2012	2:35:30 PM	BCl3 valve closed
11/30/2012	2:35:30 PM	PH3 valve closed
11/30/2012	2:35:30 PM	SiCl4 pre valve closed
11/30/2012	2:35:30 PM	SiCl4 post valve closed
11/30/2012	2:35:30 PM	Bypass valve closed
11/30/2012	2:35:30 PM	Bubbler valve closed
11/30/2012	2:35:30 PM	Main Vac valve opened
11/30/2012	2:35:30 PM	Helium MFC set to  0.000000
11/30/2012	2:35:30 PM	H2 MFC set to  0.000000
11/30/2012	2:35:30 PM	BCl3 MFC set to  0.000000
11/30/2012	2:35:30 PM	PH3 MFC set to  0.000000
11/30/2012	2:35:30 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:35:30 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:35:30 PM	Tube furnace set to 150
11/30/2012	2:36:00 PM	H2 valve closed
11/30/2012	2:36:00 PM	BCl3 valve closed
11/30/2012	2:36:00 PM	PH3 valve closed
11/30/2012	2:36:00 PM	SiCl4 pre valve closed
11/30/2012	2:36:00 PM	SiCl4 post valve closed
11/30/2012	2:36:00 PM	Bypass valve closed
11/30/2012	2:36:00 PM	Bubbler valve closed
11/30/2012	2:36:00 PM	Helium valve opened
11/30/2012	2:36:00 PM	Main Vac valve opened
11/30/2012	2:36:00 PM	Helium MFC set to  20.000000
11/30/2012	2:36:00 PM	H2 MFC set to  0.000000
11/30/2012	2:36:00 PM	BCl3 MFC set to  0.000000
11/30/2012	2:36:00 PM	PH3 MFC set to  0.000000
11/30/2012	2:36:00 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:36:00 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:36:00 PM	Tube furnace set to 150
11/30/2012	2:36:30 PM	Helium valve closed
11/30/2012	2:36:30 PM	H2 valve closed
11/30/2012	2:36:30 PM	BCl3 valve closed
11/30/2012	2:36:30 PM	PH3 valve closed
11/30/2012	2:36:30 PM	SiCl4 pre valve closed
11/30/2012	2:36:30 PM	SiCl4 post valve closed
11/30/2012	2:36:30 PM	Bypass valve closed
11/30/2012	2:36:30 PM	Bubbler valve closed
11/30/2012	2:36:30 PM	Main Vac valve opened
11/30/2012	2:36:30 PM	Helium MFC set to  0.000000
11/30/2012	2:36:30 PM	H2 MFC set to  0.000000
11/30/2012	2:36:30 PM	BCl3 MFC set to  0.000000
11/30/2012	2:36:30 PM	PH3 MFC set to  0.000000
11/30/2012	2:36:30 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:36:30 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:36:30 PM	Tube furnace set to 150
11/30/2012	2:37:00 PM	H2 valve closed
11/30/2012	2:37:00 PM	BCl3 valve closed
11/30/2012	2:37:00 PM	PH3 valve closed
11/30/2012	2:37:00 PM	SiCl4 pre valve closed
11/30/2012	2:37:00 PM	SiCl4 post valve closed
11/30/2012	2:37:00 PM	Bypass valve closed
11/30/2012	2:37:00 PM	Bubbler valve closed
11/30/2012	2:37:00 PM	Helium valve opened
11/30/2012	2:37:00 PM	Main Vac valve opened
11/30/2012	2:37:01 PM	Helium MFC set to  20.000000
11/30/2012	2:37:01 PM	H2 MFC set to  0.000000
11/30/2012	2:37:01 PM	BCl3 MFC set to  0.000000
11/30/2012	2:37:01 PM	PH3 MFC set to  0.000000
11/30/2012	2:37:01 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:37:01 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:37:01 PM	Tube furnace set to 150
11/30/2012	2:37:31 PM	Helium valve closed
11/30/2012	2:37:31 PM	H2 valve closed
11/30/2012	2:37:31 PM	BCl3 valve closed
11/30/2012	2:37:31 PM	PH3 valve closed
11/30/2012	2:37:31 PM	SiCl4 pre valve closed
11/30/2012	2:37:31 PM	SiCl4 post valve closed
11/30/2012	2:37:31 PM	Bypass valve closed
11/30/2012	2:37:31 PM	Bubbler valve closed
11/30/2012	2:37:31 PM	Main Vac valve opened
11/30/2012	2:37:31 PM	Helium MFC set to  0.000000
11/30/2012	2:37:31 PM	H2 MFC set to  0.000000
11/30/2012	2:37:31 PM	BCl3 MFC set to  0.000000
11/30/2012	2:37:31 PM	PH3 MFC set to  0.000000
11/30/2012	2:37:31 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:37:31 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:37:31 PM	Tube furnace set to 150
11/30/2012	2:38:01 PM	H2 valve closed
11/30/2012	2:38:01 PM	BCl3 valve closed
11/30/2012	2:38:01 PM	PH3 valve closed
11/30/2012	2:38:01 PM	SiCl4 pre valve closed
11/30/2012	2:38:01 PM	SiCl4 post valve closed
11/30/2012	2:38:01 PM	Bypass valve closed
11/30/2012	2:38:01 PM	Bubbler valve closed
11/30/2012	2:38:01 PM	Helium valve opened
11/30/2012	2:38:01 PM	Main Vac valve opened
11/30/2012	2:38:01 PM	Helium MFC set to  20.000000
11/30/2012	2:38:01 PM	H2 MFC set to  0.000000
11/30/2012	2:38:01 PM	BCl3 MFC set to  0.000000
11/30/2012	2:38:01 PM	PH3 MFC set to  0.000000
11/30/2012	2:38:01 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:38:01 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:38:01 PM	Tube furnace set to 150
11/30/2012	2:38:31 PM	Helium valve closed
11/30/2012	2:38:31 PM	H2 valve closed
11/30/2012	2:38:31 PM	BCl3 valve closed
11/30/2012	2:38:31 PM	PH3 valve closed
11/30/2012	2:38:31 PM	SiCl4 pre valve closed
11/30/2012	2:38:31 PM	SiCl4 post valve closed
11/30/2012	2:38:31 PM	Bypass valve closed
11/30/2012	2:38:31 PM	Bubbler valve closed
11/30/2012	2:38:31 PM	Main Vac valve opened
11/30/2012	2:38:31 PM	Helium MFC set to  0.000000
11/30/2012	2:38:31 PM	H2 MFC set to  0.000000
11/30/2012	2:38:31 PM	BCl3 MFC set to  0.000000
11/30/2012	2:38:31 PM	PH3 MFC set to  0.000000
11/30/2012	2:38:31 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:38:31 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:38:31 PM	Tube furnace set to 150
11/30/2012	2:39:01 PM	H2 valve closed
11/30/2012	2:39:01 PM	BCl3 valve closed
11/30/2012	2:39:01 PM	PH3 valve closed
11/30/2012	2:39:01 PM	SiCl4 pre valve closed
11/30/2012	2:39:01 PM	SiCl4 post valve closed
11/30/2012	2:39:01 PM	Bypass valve closed
11/30/2012	2:39:01 PM	Bubbler valve closed
11/30/2012	2:39:01 PM	Helium valve opened
11/30/2012	2:39:01 PM	Main Vac valve opened
11/30/2012	2:39:01 PM	Helium MFC set to  20.000000
11/30/2012	2:39:01 PM	H2 MFC set to  0.000000
11/30/2012	2:39:01 PM	BCl3 MFC set to  0.000000
11/30/2012	2:39:02 PM	PH3 MFC set to  0.000000
11/30/2012	2:39:02 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:39:02 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:39:02 PM	Tube furnace set to 150
11/30/2012	2:39:32 PM	Helium valve closed
11/30/2012	2:39:32 PM	H2 valve closed
11/30/2012	2:39:32 PM	BCl3 valve closed
11/30/2012	2:39:32 PM	PH3 valve closed
11/30/2012	2:39:32 PM	SiCl4 pre valve closed
11/30/2012	2:39:32 PM	SiCl4 post valve closed
11/30/2012	2:39:32 PM	Bypass valve closed
11/30/2012	2:39:32 PM	Bubbler valve closed
11/30/2012	2:39:32 PM	Main Vac valve opened
11/30/2012	2:39:32 PM	Helium MFC set to  0.000000
11/30/2012	2:39:32 PM	H2 MFC set to  0.000000
11/30/2012	2:39:32 PM	BCl3 MFC set to  0.000000
11/30/2012	2:39:32 PM	PH3 MFC set to  0.000000
11/30/2012	2:39:32 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:39:32 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:39:32 PM	Tube furnace set to 150
11/30/2012	2:40:02 PM	H2 valve closed
11/30/2012	2:40:02 PM	BCl3 valve closed
11/30/2012	2:40:02 PM	PH3 valve closed
11/30/2012	2:40:02 PM	SiCl4 pre valve closed
11/30/2012	2:40:02 PM	SiCl4 post valve closed
11/30/2012	2:40:02 PM	Bypass valve closed
11/30/2012	2:40:02 PM	Bubbler valve closed
11/30/2012	2:40:02 PM	Helium valve opened
11/30/2012	2:40:02 PM	Main Vac valve opened
11/30/2012	2:40:02 PM	Helium MFC set to  20.000000
11/30/2012	2:40:02 PM	H2 MFC set to  0.000000
11/30/2012	2:40:02 PM	BCl3 MFC set to  0.000000
11/30/2012	2:40:02 PM	PH3 MFC set to  0.000000
11/30/2012	2:40:02 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:40:02 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:40:02 PM	Tube furnace set to 150
11/30/2012	2:40:32 PM	Helium valve closed
11/30/2012	2:40:32 PM	H2 valve closed
11/30/2012	2:40:32 PM	BCl3 valve closed
11/30/2012	2:40:32 PM	PH3 valve closed
11/30/2012	2:40:32 PM	SiCl4 pre valve closed
11/30/2012	2:40:32 PM	SiCl4 post valve closed
11/30/2012	2:40:32 PM	Bypass valve closed
11/30/2012	2:40:32 PM	Bubbler valve closed
11/30/2012	2:40:32 PM	Main Vac valve opened
11/30/2012	2:40:32 PM	Helium MFC set to  0.000000
11/30/2012	2:40:32 PM	H2 MFC set to  0.000000
11/30/2012	2:40:32 PM	BCl3 MFC set to  0.000000
11/30/2012	2:40:32 PM	PH3 MFC set to  0.000000
11/30/2012	2:40:32 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:40:32 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:40:32 PM	Tube furnace set to 150
11/30/2012	2:41:02 PM	H2 valve closed
11/30/2012	2:41:02 PM	BCl3 valve closed
11/30/2012	2:41:02 PM	PH3 valve closed
11/30/2012	2:41:02 PM	SiCl4 pre valve closed
11/30/2012	2:41:02 PM	SiCl4 post valve closed
11/30/2012	2:41:02 PM	Bypass valve closed
11/30/2012	2:41:02 PM	Bubbler valve closed
11/30/2012	2:41:02 PM	Helium valve opened
11/30/2012	2:41:02 PM	Main Vac valve opened
11/30/2012	2:41:02 PM	Helium MFC set to  20.000000
11/30/2012	2:41:02 PM	H2 MFC set to  0.000000
11/30/2012	2:41:02 PM	BCl3 MFC set to  0.000000
11/30/2012	2:41:02 PM	PH3 MFC set to  0.000000
11/30/2012	2:41:02 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:41:02 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:41:03 PM	Tube furnace set to 150
11/30/2012	2:41:33 PM	Helium valve closed
11/30/2012	2:41:33 PM	H2 valve closed
11/30/2012	2:41:33 PM	BCl3 valve closed
11/30/2012	2:41:33 PM	PH3 valve closed
11/30/2012	2:41:33 PM	SiCl4 pre valve closed
11/30/2012	2:41:33 PM	SiCl4 post valve closed
11/30/2012	2:41:33 PM	Bypass valve closed
11/30/2012	2:41:33 PM	Bubbler valve closed
11/30/2012	2:41:33 PM	Main Vac valve opened
11/30/2012	2:41:33 PM	Helium MFC set to  0.000000
11/30/2012	2:41:33 PM	H2 MFC set to  0.000000
11/30/2012	2:41:33 PM	BCl3 MFC set to  0.000000
11/30/2012	2:41:33 PM	PH3 MFC set to  0.000000
11/30/2012	2:41:33 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:41:33 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:41:33 PM	Tube furnace set to 150
11/30/2012	2:41:34 PM	Run finished at 2:41 PM
11/30/2012	2:44:55 PM	Recipe started at 2:44 PM
11/30/2012	2:44:55 PM	Helium valve closed
11/30/2012	2:44:55 PM	H2 valve closed
11/30/2012	2:44:55 PM	BCl3 valve closed
11/30/2012	2:44:55 PM	PH3 valve closed
11/30/2012	2:44:55 PM	SiCl4 pre valve closed
11/30/2012	2:44:55 PM	SiCl4 post valve closed
11/30/2012	2:44:55 PM	Bypass valve closed
11/30/2012	2:44:55 PM	Bubbler valve closed
11/30/2012	2:44:55 PM	Main Vac valve opened
11/30/2012	2:44:55 PM	Helium MFC set to  0.000000
11/30/2012	2:44:55 PM	H2 MFC set to  0.000000
11/30/2012	2:44:55 PM	BCl3 MFC set to  0.000000
11/30/2012	2:44:55 PM	PH3 MFC set to  0.000000
11/30/2012	2:44:55 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:44:55 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:44:56 PM	Tube furnace set to 150
11/30/2012	2:45:26 PM	H2 valve closed
11/30/2012	2:45:26 PM	BCl3 valve closed
11/30/2012	2:45:26 PM	PH3 valve closed
11/30/2012	2:45:26 PM	SiCl4 pre valve closed
11/30/2012	2:45:26 PM	SiCl4 post valve closed
11/30/2012	2:45:26 PM	Bypass valve closed
11/30/2012	2:45:26 PM	Bubbler valve closed
11/30/2012	2:45:26 PM	Helium valve opened
11/30/2012	2:45:26 PM	Main Vac valve opened
11/30/2012	2:45:26 PM	Helium MFC set to  20.000000
11/30/2012	2:45:26 PM	H2 MFC set to  0.000000
11/30/2012	2:45:26 PM	BCl3 MFC set to  0.000000
11/30/2012	2:45:26 PM	PH3 MFC set to  0.000000
11/30/2012	2:45:26 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:45:26 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:45:26 PM	Tube furnace set to 150
11/30/2012	2:45:56 PM	Helium valve closed
11/30/2012	2:45:56 PM	H2 valve closed
11/30/2012	2:45:56 PM	BCl3 valve closed
11/30/2012	2:45:56 PM	PH3 valve closed
11/30/2012	2:45:56 PM	SiCl4 pre valve closed
11/30/2012	2:45:56 PM	SiCl4 post valve closed
11/30/2012	2:45:56 PM	Bypass valve closed
11/30/2012	2:45:56 PM	Bubbler valve closed
11/30/2012	2:45:56 PM	Main Vac valve opened
11/30/2012	2:45:56 PM	Helium MFC set to  0.000000
11/30/2012	2:45:56 PM	H2 MFC set to  0.000000
11/30/2012	2:45:56 PM	BCl3 MFC set to  0.000000
11/30/2012	2:45:56 PM	PH3 MFC set to  0.000000
11/30/2012	2:45:56 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:45:56 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:45:56 PM	Tube furnace set to 150
11/30/2012	2:46:26 PM	H2 valve closed
11/30/2012	2:46:26 PM	BCl3 valve closed
11/30/2012	2:46:26 PM	PH3 valve closed
11/30/2012	2:46:26 PM	SiCl4 pre valve closed
11/30/2012	2:46:26 PM	SiCl4 post valve closed
11/30/2012	2:46:26 PM	Bypass valve closed
11/30/2012	2:46:26 PM	Bubbler valve closed
11/30/2012	2:46:26 PM	Helium valve opened
11/30/2012	2:46:26 PM	Main Vac valve opened
11/30/2012	2:46:26 PM	Helium MFC set to  20.000000
11/30/2012	2:46:26 PM	H2 MFC set to  0.000000
11/30/2012	2:46:26 PM	BCl3 MFC set to  0.000000
11/30/2012	2:46:26 PM	PH3 MFC set to  0.000000
11/30/2012	2:46:26 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:46:26 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:46:26 PM	Tube furnace set to 150
11/30/2012	2:46:56 PM	Helium valve closed
11/30/2012	2:46:56 PM	H2 valve closed
11/30/2012	2:46:56 PM	BCl3 valve closed
11/30/2012	2:46:56 PM	PH3 valve closed
11/30/2012	2:46:56 PM	SiCl4 pre valve closed
11/30/2012	2:46:56 PM	SiCl4 post valve closed
11/30/2012	2:46:56 PM	Bypass valve closed
11/30/2012	2:46:56 PM	Bubbler valve closed
11/30/2012	2:46:56 PM	Main Vac valve opened
11/30/2012	2:46:56 PM	Helium MFC set to  0.000000
11/30/2012	2:46:56 PM	H2 MFC set to  0.000000
11/30/2012	2:46:56 PM	BCl3 MFC set to  0.000000
11/30/2012	2:46:56 PM	PH3 MFC set to  0.000000
11/30/2012	2:46:56 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:46:56 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:46:57 PM	Tube furnace set to 150
11/30/2012	2:47:27 PM	H2 valve closed
11/30/2012	2:47:27 PM	BCl3 valve closed
11/30/2012	2:47:27 PM	PH3 valve closed
11/30/2012	2:47:27 PM	SiCl4 pre valve closed
11/30/2012	2:47:27 PM	SiCl4 post valve closed
11/30/2012	2:47:27 PM	Bypass valve closed
11/30/2012	2:47:27 PM	Bubbler valve closed
11/30/2012	2:47:27 PM	Helium valve opened
11/30/2012	2:47:27 PM	Main Vac valve opened
11/30/2012	2:47:27 PM	Helium MFC set to  20.000000
11/30/2012	2:47:27 PM	H2 MFC set to  0.000000
11/30/2012	2:47:27 PM	BCl3 MFC set to  0.000000
11/30/2012	2:47:27 PM	PH3 MFC set to  0.000000
11/30/2012	2:47:27 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:47:27 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:47:27 PM	Tube furnace set to 150
11/30/2012	2:47:57 PM	Helium valve closed
11/30/2012	2:47:57 PM	H2 valve closed
11/30/2012	2:47:57 PM	BCl3 valve closed
11/30/2012	2:47:57 PM	PH3 valve closed
11/30/2012	2:47:57 PM	SiCl4 pre valve closed
11/30/2012	2:47:57 PM	SiCl4 post valve closed
11/30/2012	2:47:57 PM	Bypass valve closed
11/30/2012	2:47:57 PM	Bubbler valve closed
11/30/2012	2:47:57 PM	Main Vac valve opened
11/30/2012	2:47:57 PM	Helium MFC set to  0.000000
11/30/2012	2:47:57 PM	H2 MFC set to  0.000000
11/30/2012	2:47:57 PM	BCl3 MFC set to  0.000000
11/30/2012	2:47:57 PM	PH3 MFC set to  0.000000
11/30/2012	2:47:57 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:47:57 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:47:57 PM	Tube furnace set to 150
11/30/2012	2:48:27 PM	H2 valve closed
11/30/2012	2:48:27 PM	BCl3 valve closed
11/30/2012	2:48:27 PM	PH3 valve closed
11/30/2012	2:48:27 PM	SiCl4 pre valve closed
11/30/2012	2:48:27 PM	SiCl4 post valve closed
11/30/2012	2:48:27 PM	Bypass valve closed
11/30/2012	2:48:27 PM	Bubbler valve closed
11/30/2012	2:48:27 PM	Helium valve opened
11/30/2012	2:48:27 PM	Main Vac valve opened
11/30/2012	2:48:27 PM	Helium MFC set to  20.000000
11/30/2012	2:48:27 PM	H2 MFC set to  0.000000
11/30/2012	2:48:27 PM	BCl3 MFC set to  0.000000
11/30/2012	2:48:27 PM	PH3 MFC set to  0.000000
11/30/2012	2:48:27 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:48:27 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:48:27 PM	Tube furnace set to 150
11/30/2012	2:48:57 PM	Helium valve closed
11/30/2012	2:48:57 PM	H2 valve closed
11/30/2012	2:48:57 PM	BCl3 valve closed
11/30/2012	2:48:57 PM	PH3 valve closed
11/30/2012	2:48:57 PM	SiCl4 pre valve closed
11/30/2012	2:48:57 PM	SiCl4 post valve closed
11/30/2012	2:48:57 PM	Bypass valve closed
11/30/2012	2:48:57 PM	Bubbler valve closed
11/30/2012	2:48:57 PM	Main Vac valve opened
11/30/2012	2:48:57 PM	Helium MFC set to  0.000000
11/30/2012	2:48:57 PM	H2 MFC set to  0.000000
11/30/2012	2:48:57 PM	BCl3 MFC set to  0.000000
11/30/2012	2:48:57 PM	PH3 MFC set to  0.000000
11/30/2012	2:48:57 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:48:57 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:48:58 PM	Tube furnace set to 150
11/30/2012	2:49:28 PM	H2 valve closed
11/30/2012	2:49:28 PM	BCl3 valve closed
11/30/2012	2:49:28 PM	PH3 valve closed
11/30/2012	2:49:28 PM	SiCl4 pre valve closed
11/30/2012	2:49:28 PM	SiCl4 post valve closed
11/30/2012	2:49:28 PM	Bypass valve closed
11/30/2012	2:49:28 PM	Bubbler valve closed
11/30/2012	2:49:28 PM	Helium valve opened
11/30/2012	2:49:28 PM	Main Vac valve opened
11/30/2012	2:49:28 PM	Helium MFC set to  20.000000
11/30/2012	2:49:28 PM	H2 MFC set to  0.000000
11/30/2012	2:49:28 PM	BCl3 MFC set to  0.000000
11/30/2012	2:49:28 PM	PH3 MFC set to  0.000000
11/30/2012	2:49:28 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:49:28 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:49:28 PM	Tube furnace set to 150
11/30/2012	2:49:58 PM	Helium valve closed
11/30/2012	2:49:58 PM	H2 valve closed
11/30/2012	2:49:58 PM	BCl3 valve closed
11/30/2012	2:49:58 PM	PH3 valve closed
11/30/2012	2:49:58 PM	SiCl4 pre valve closed
11/30/2012	2:49:58 PM	SiCl4 post valve closed
11/30/2012	2:49:58 PM	Bypass valve closed
11/30/2012	2:49:58 PM	Bubbler valve closed
11/30/2012	2:49:58 PM	Main Vac valve opened
11/30/2012	2:49:58 PM	Helium MFC set to  0.000000
11/30/2012	2:49:58 PM	H2 MFC set to  0.000000
11/30/2012	2:49:58 PM	BCl3 MFC set to  0.000000
11/30/2012	2:49:58 PM	PH3 MFC set to  0.000000
11/30/2012	2:49:58 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:49:58 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:49:58 PM	Tube furnace set to 150
11/30/2012	2:50:28 PM	H2 valve closed
11/30/2012	2:50:28 PM	BCl3 valve closed
11/30/2012	2:50:28 PM	PH3 valve closed
11/30/2012	2:50:28 PM	SiCl4 pre valve closed
11/30/2012	2:50:28 PM	SiCl4 post valve closed
11/30/2012	2:50:28 PM	Bypass valve closed
11/30/2012	2:50:28 PM	Bubbler valve closed
11/30/2012	2:50:28 PM	Helium valve opened
11/30/2012	2:50:28 PM	Main Vac valve opened
11/30/2012	2:50:28 PM	Helium MFC set to  20.000000
11/30/2012	2:50:28 PM	H2 MFC set to  0.000000
11/30/2012	2:50:28 PM	BCl3 MFC set to  0.000000
11/30/2012	2:50:28 PM	PH3 MFC set to  0.000000
11/30/2012	2:50:28 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:50:28 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:50:28 PM	Tube furnace set to 150
11/30/2012	2:50:58 PM	Helium valve closed
11/30/2012	2:50:58 PM	H2 valve closed
11/30/2012	2:50:58 PM	BCl3 valve closed
11/30/2012	2:50:58 PM	PH3 valve closed
11/30/2012	2:50:58 PM	SiCl4 pre valve closed
11/30/2012	2:50:58 PM	SiCl4 post valve closed
11/30/2012	2:50:58 PM	Bypass valve closed
11/30/2012	2:50:58 PM	Bubbler valve closed
11/30/2012	2:50:58 PM	Main Vac valve opened
11/30/2012	2:50:58 PM	Helium MFC set to  0.000000
11/30/2012	2:50:58 PM	H2 MFC set to  0.000000
11/30/2012	2:50:58 PM	BCl3 MFC set to  0.000000
11/30/2012	2:50:58 PM	PH3 MFC set to  0.000000
11/30/2012	2:50:58 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:50:58 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:50:59 PM	Tube furnace set to 150
11/30/2012	2:51:29 PM	H2 valve closed
11/30/2012	2:51:29 PM	BCl3 valve closed
11/30/2012	2:51:29 PM	PH3 valve closed
11/30/2012	2:51:29 PM	SiCl4 pre valve closed
11/30/2012	2:51:29 PM	SiCl4 post valve closed
11/30/2012	2:51:29 PM	Bypass valve closed
11/30/2012	2:51:29 PM	Bubbler valve closed
11/30/2012	2:51:29 PM	Helium valve opened
11/30/2012	2:51:29 PM	Main Vac valve opened
11/30/2012	2:51:29 PM	Helium MFC set to  20.000000
11/30/2012	2:51:29 PM	H2 MFC set to  0.000000
11/30/2012	2:51:29 PM	BCl3 MFC set to  0.000000
11/30/2012	2:51:29 PM	PH3 MFC set to  0.000000
11/30/2012	2:51:29 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:51:29 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:51:29 PM	Tube furnace set to 150
11/30/2012	2:51:59 PM	Helium valve closed
11/30/2012	2:51:59 PM	H2 valve closed
11/30/2012	2:51:59 PM	BCl3 valve closed
11/30/2012	2:51:59 PM	PH3 valve closed
11/30/2012	2:51:59 PM	SiCl4 pre valve closed
11/30/2012	2:51:59 PM	SiCl4 post valve closed
11/30/2012	2:51:59 PM	Bypass valve closed
11/30/2012	2:51:59 PM	Bubbler valve closed
11/30/2012	2:51:59 PM	Main Vac valve opened
11/30/2012	2:51:59 PM	Helium MFC set to  0.000000
11/30/2012	2:51:59 PM	H2 MFC set to  0.000000
11/30/2012	2:51:59 PM	BCl3 MFC set to  0.000000
11/30/2012	2:51:59 PM	PH3 MFC set to  0.000000
11/30/2012	2:51:59 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:51:59 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:51:59 PM	Tube furnace set to 150
11/30/2012	2:52:29 PM	H2 valve closed
11/30/2012	2:52:29 PM	BCl3 valve closed
11/30/2012	2:52:29 PM	PH3 valve closed
11/30/2012	2:52:29 PM	SiCl4 pre valve closed
11/30/2012	2:52:29 PM	SiCl4 post valve closed
11/30/2012	2:52:29 PM	Bypass valve closed
11/30/2012	2:52:29 PM	Bubbler valve closed
11/30/2012	2:52:29 PM	Helium valve opened
11/30/2012	2:52:29 PM	Main Vac valve opened
11/30/2012	2:52:29 PM	Helium MFC set to  20.000000
11/30/2012	2:52:29 PM	H2 MFC set to  0.000000
11/30/2012	2:52:29 PM	BCl3 MFC set to  0.000000
11/30/2012	2:52:29 PM	PH3 MFC set to  0.000000
11/30/2012	2:52:29 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:52:29 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:52:29 PM	Tube furnace set to 150
11/30/2012	2:52:59 PM	Helium valve closed
11/30/2012	2:52:59 PM	H2 valve closed
11/30/2012	2:52:59 PM	BCl3 valve closed
11/30/2012	2:52:59 PM	PH3 valve closed
11/30/2012	2:52:59 PM	SiCl4 pre valve closed
11/30/2012	2:52:59 PM	SiCl4 post valve closed
11/30/2012	2:52:59 PM	Bypass valve closed
11/30/2012	2:52:59 PM	Bubbler valve closed
11/30/2012	2:52:59 PM	Main Vac valve opened
11/30/2012	2:52:59 PM	Helium MFC set to  0.000000
11/30/2012	2:52:59 PM	H2 MFC set to  0.000000
11/30/2012	2:52:59 PM	BCl3 MFC set to  0.000000
11/30/2012	2:52:59 PM	PH3 MFC set to  0.000000
11/30/2012	2:52:59 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:52:59 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:53:00 PM	Tube furnace set to 150
11/30/2012	2:53:30 PM	H2 valve closed
11/30/2012	2:53:30 PM	BCl3 valve closed
11/30/2012	2:53:30 PM	PH3 valve closed
11/30/2012	2:53:30 PM	SiCl4 pre valve closed
11/30/2012	2:53:30 PM	SiCl4 post valve closed
11/30/2012	2:53:30 PM	Bypass valve closed
11/30/2012	2:53:30 PM	Bubbler valve closed
11/30/2012	2:53:30 PM	Helium valve opened
11/30/2012	2:53:30 PM	Main Vac valve opened
11/30/2012	2:53:30 PM	Helium MFC set to  20.000000
11/30/2012	2:53:30 PM	H2 MFC set to  0.000000
11/30/2012	2:53:30 PM	BCl3 MFC set to  0.000000
11/30/2012	2:53:30 PM	PH3 MFC set to  0.000000
11/30/2012	2:53:30 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:53:30 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:53:30 PM	Tube furnace set to 150
11/30/2012	2:54:00 PM	Helium valve closed
11/30/2012	2:54:00 PM	H2 valve closed
11/30/2012	2:54:00 PM	BCl3 valve closed
11/30/2012	2:54:00 PM	PH3 valve closed
11/30/2012	2:54:00 PM	SiCl4 pre valve closed
11/30/2012	2:54:00 PM	SiCl4 post valve closed
11/30/2012	2:54:00 PM	Bypass valve closed
11/30/2012	2:54:00 PM	Bubbler valve closed
11/30/2012	2:54:00 PM	Main Vac valve opened
11/30/2012	2:54:00 PM	Helium MFC set to  0.000000
11/30/2012	2:54:00 PM	H2 MFC set to  0.000000
11/30/2012	2:54:00 PM	BCl3 MFC set to  0.000000
11/30/2012	2:54:00 PM	PH3 MFC set to  0.000000
11/30/2012	2:54:00 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:54:00 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:54:00 PM	Tube furnace set to 150
11/30/2012	2:54:30 PM	H2 valve closed
11/30/2012	2:54:30 PM	BCl3 valve closed
11/30/2012	2:54:30 PM	PH3 valve closed
11/30/2012	2:54:30 PM	SiCl4 pre valve closed
11/30/2012	2:54:30 PM	SiCl4 post valve closed
11/30/2012	2:54:30 PM	Bypass valve closed
11/30/2012	2:54:30 PM	Bubbler valve closed
11/30/2012	2:54:30 PM	Helium valve opened
11/30/2012	2:54:30 PM	Main Vac valve opened
11/30/2012	2:54:30 PM	Helium MFC set to  20.000000
11/30/2012	2:54:30 PM	H2 MFC set to  0.000000
11/30/2012	2:54:30 PM	BCl3 MFC set to  0.000000
11/30/2012	2:54:30 PM	PH3 MFC set to  0.000000
11/30/2012	2:54:30 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:54:30 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:54:30 PM	Tube furnace set to 150
11/30/2012	2:55:00 PM	Helium valve closed
11/30/2012	2:55:00 PM	H2 valve closed
11/30/2012	2:55:00 PM	BCl3 valve closed
11/30/2012	2:55:00 PM	PH3 valve closed
11/30/2012	2:55:00 PM	SiCl4 pre valve closed
11/30/2012	2:55:00 PM	SiCl4 post valve closed
11/30/2012	2:55:00 PM	Bypass valve closed
11/30/2012	2:55:00 PM	Bubbler valve closed
11/30/2012	2:55:00 PM	Main Vac valve opened
11/30/2012	2:55:00 PM	Helium MFC set to  0.000000
11/30/2012	2:55:00 PM	H2 MFC set to  0.000000
11/30/2012	2:55:00 PM	BCl3 MFC set to  0.000000
11/30/2012	2:55:00 PM	PH3 MFC set to  0.000000
11/30/2012	2:55:00 PM	SiCl4 MFC set to  0.000000
11/30/2012	2:55:00 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	2:55:01 PM	Tube furnace set to 150
11/30/2012	2:55:02 PM	Run finished at 2:55 PM
11/30/2012	3:11:28 PM	Main Vac valve closed
11/30/2012	3:11:39 PM	Main Vac valve opened
11/30/2012	3:13:01 PM	Helium MFC set to  10.000000
11/30/2012	3:13:03 PM	Helium valve opened
11/30/2012	3:13:06 PM	Helium valve closed
11/30/2012	3:13:27 PM	Main Vac valve closed
11/30/2012	3:13:40 PM	Main Vac valve opened
11/30/2012	3:14:28 PM	Recipe started at 3:14 PM
11/30/2012	3:14:28 PM	Helium valve closed
11/30/2012	3:14:28 PM	H2 valve closed
11/30/2012	3:14:28 PM	BCl3 valve closed
11/30/2012	3:14:28 PM	PH3 valve closed
11/30/2012	3:14:28 PM	SiCl4 pre valve closed
11/30/2012	3:14:28 PM	SiCl4 post valve closed
11/30/2012	3:14:28 PM	Bypass valve closed
11/30/2012	3:14:28 PM	Bubbler valve closed
11/30/2012	3:14:28 PM	Main Vac valve opened
11/30/2012	3:14:28 PM	Helium MFC set to  0.000000
11/30/2012	3:14:28 PM	H2 MFC set to  0.000000
11/30/2012	3:14:28 PM	BCl3 MFC set to  0.000000
11/30/2012	3:14:28 PM	PH3 MFC set to  0.000000
11/30/2012	3:14:28 PM	SiCl4 MFC set to  0.000000
11/30/2012	3:14:28 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	3:14:29 PM	Tube furnace set to 150
11/30/2012	3:14:31 PM	Run aborted at 3:14 PM
11/30/2012	3:14:31 PM	Helium valve closed
11/30/2012	3:14:31 PM	H2 valve closed
11/30/2012	3:14:31 PM	BCl3 valve closed
11/30/2012	3:14:31 PM	PH3 valve closed
11/30/2012	3:14:31 PM	SiCl4 pre valve closed
11/30/2012	3:14:31 PM	SiCl4 post valve closed
11/30/2012	3:14:31 PM	Bypass valve closed
11/30/2012	3:14:31 PM	Main Vac valve closed
11/30/2012	3:14:31 PM	Bubbler valve closed
11/30/2012	3:14:31 PM	Helium MFC set to  0.000000
11/30/2012	3:14:31 PM	H2 MFC set to  0.000000
11/30/2012	3:14:31 PM	BCl3 MFC set to  0.000000
11/30/2012	3:14:31 PM	PH3 MFC set to  0.000000
11/30/2012	3:14:31 PM	SiCl4 MFC set to  0.000000
11/30/2012	3:14:31 PM	Tube furnace set to 0
11/30/2012	3:14:35 PM	Main Vac valve opened
11/30/2012	3:14:58 PM	Recipe started at 3:14 PM
11/30/2012	3:14:58 PM	Helium valve closed
11/30/2012	3:14:58 PM	H2 valve closed
11/30/2012	3:14:58 PM	BCl3 valve closed
11/30/2012	3:14:58 PM	PH3 valve closed
11/30/2012	3:14:58 PM	SiCl4 pre valve closed
11/30/2012	3:14:58 PM	SiCl4 post valve closed
11/30/2012	3:14:58 PM	Bypass valve closed
11/30/2012	3:14:58 PM	Bubbler valve closed
11/30/2012	3:14:58 PM	Main Vac valve opened
11/30/2012	3:14:58 PM	Helium MFC set to  0.000000
11/30/2012	3:14:58 PM	H2 MFC set to  0.000000
11/30/2012	3:14:58 PM	BCl3 MFC set to  0.000000
11/30/2012	3:14:58 PM	PH3 MFC set to  0.000000
11/30/2012	3:14:58 PM	SiCl4 MFC set to  0.000000
11/30/2012	3:14:58 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	3:14:58 PM	Tube furnace set to 150
11/30/2012	3:19:58 PM	Helium valve closed
11/30/2012	3:19:58 PM	H2 valve closed
11/30/2012	3:19:58 PM	BCl3 valve closed
11/30/2012	3:19:58 PM	PH3 valve closed
11/30/2012	3:19:58 PM	SiCl4 pre valve closed
11/30/2012	3:19:58 PM	SiCl4 post valve closed
11/30/2012	3:19:58 PM	Main Vac valve closed
11/30/2012	3:19:58 PM	Bypass valve closed
11/30/2012	3:19:58 PM	Bubbler valve closed
11/30/2012	3:19:58 PM	Helium MFC set to  0.000000
11/30/2012	3:19:58 PM	H2 MFC set to  0.000000
11/30/2012	3:19:58 PM	BCl3 MFC set to  0.000000
11/30/2012	3:19:58 PM	PH3 MFC set to  0.000000
11/30/2012	3:19:58 PM	SiCl4 MFC set to  0.000000
11/30/2012	3:19:59 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	3:19:59 PM	Tube furnace set to 150
11/30/2012	3:20:02 PM	Helium valve closed
11/30/2012	3:20:02 PM	BCl3 valve closed
11/30/2012	3:20:02 PM	PH3 valve closed
11/30/2012	3:20:02 PM	SiCl4 pre valve closed
11/30/2012	3:20:02 PM	SiCl4 post valve closed
11/30/2012	3:20:02 PM	Main Vac valve closed
11/30/2012	3:20:02 PM	Bypass valve closed
11/30/2012	3:20:02 PM	Bubbler valve closed
11/30/2012	3:20:02 PM	H2 valve opened
11/30/2012	3:20:02 PM	Helium MFC set to  0.000000
11/30/2012	3:20:02 PM	H2 MFC set to  500.000000
11/30/2012	3:20:02 PM	BCl3 MFC set to  0.000000
11/30/2012	3:20:02 PM	PH3 MFC set to  0.000000
11/30/2012	3:20:02 PM	SiCl4 MFC set to  0.000000
11/30/2012	3:20:02 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	3:20:02 PM	Tube furnace set to 150
11/30/2012	3:21:14 PM	Helium valve closed
11/30/2012	3:21:14 PM	BCl3 valve closed
11/30/2012	3:21:14 PM	PH3 valve closed
11/30/2012	3:21:14 PM	SiCl4 pre valve closed
11/30/2012	3:21:14 PM	SiCl4 post valve closed
11/30/2012	3:21:14 PM	Main Vac valve closed
11/30/2012	3:21:14 PM	Bypass valve closed
11/30/2012	3:21:14 PM	H2 valve opened
11/30/2012	3:21:14 PM	Bubbler valve opened
11/30/2012	3:21:14 PM	Helium MFC set to  0.000000
11/30/2012	3:21:14 PM	H2 MFC set to  500.000000
11/30/2012	3:21:14 PM	BCl3 MFC set to  0.000000
11/30/2012	3:21:14 PM	PH3 MFC set to  0.000000
11/30/2012	3:21:14 PM	SiCl4 MFC set to  0.000000
11/30/2012	3:21:14 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	3:21:14 PM	Tube furnace set to 150
11/30/2012	3:21:15 PM	Helium valve closed
11/30/2012	3:21:15 PM	BCl3 valve closed
11/30/2012	3:21:15 PM	PH3 valve closed
11/30/2012	3:21:15 PM	SiCl4 pre valve closed
11/30/2012	3:21:15 PM	SiCl4 post valve closed
11/30/2012	3:21:15 PM	Main Vac valve closed
11/30/2012	3:21:15 PM	Bypass valve closed
11/30/2012	3:21:15 PM	H2 valve opened
11/30/2012	3:21:15 PM	Bubbler valve opened
11/30/2012	3:21:15 PM	Helium MFC set to  0.000000
11/30/2012	3:21:15 PM	H2 MFC set to  500.000000
11/30/2012	3:21:15 PM	BCl3 MFC set to  0.000000
11/30/2012	3:21:15 PM	PH3 MFC set to  0.000000
11/30/2012	3:21:15 PM	SiCl4 MFC set to  0.000000
11/30/2012	3:21:15 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	3:21:15 PM	Tube furnace set to 1000
11/30/2012	3:41:15 PM	Helium valve closed
11/30/2012	3:41:15 PM	PH3 valve closed
11/30/2012	3:41:15 PM	Main Vac valve closed
11/30/2012	3:41:15 PM	Bypass valve closed
11/30/2012	3:41:15 PM	H2 valve opened
11/30/2012	3:41:15 PM	BCl3 valve opened
11/30/2012	3:41:15 PM	SiCl4 pre valve opened
11/30/2012	3:41:15 PM	SiCl4 post valve opened
11/30/2012	3:41:15 PM	Bubbler valve opened
11/30/2012	3:41:15 PM	Helium MFC set to  0.000000
11/30/2012	3:41:15 PM	H2 MFC set to  450.000000
11/30/2012	3:41:15 PM	BCl3 MFC set to  1.300000
11/30/2012	3:41:15 PM	PH3 MFC set to  0.000000
11/30/2012	3:41:15 PM	SiCl4 MFC set to  50.000000
11/30/2012	3:41:15 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	3:41:15 PM	Tube furnace set to 1000
11/30/2012	3:56:15 PM	Helium valve closed
11/30/2012	3:56:15 PM	BCl3 valve closed
11/30/2012	3:56:15 PM	Main Vac valve closed
11/30/2012	3:56:15 PM	Bypass valve closed
11/30/2012	3:56:15 PM	H2 valve opened
11/30/2012	3:56:15 PM	PH3 valve opened
11/30/2012	3:56:15 PM	SiCl4 pre valve opened
11/30/2012	3:56:15 PM	SiCl4 post valve opened
11/30/2012	3:56:15 PM	Bubbler valve opened
11/30/2012	3:56:15 PM	Helium MFC set to  0.000000
11/30/2012	3:56:16 PM	H2 MFC set to  450.000000
11/30/2012	3:56:16 PM	BCl3 MFC set to  0.000000
11/30/2012	3:56:16 PM	PH3 MFC set to  20.000000
11/30/2012	3:56:16 PM	SiCl4 MFC set to  50.000000
11/30/2012	3:56:16 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	3:56:16 PM	Tube furnace set to 1000
11/30/2012	4:01:16 PM	Helium valve closed
11/30/2012	4:01:16 PM	BCl3 valve closed
11/30/2012	4:01:16 PM	PH3 valve closed
11/30/2012	4:01:16 PM	SiCl4 pre valve closed
11/30/2012	4:01:16 PM	SiCl4 post valve closed
11/30/2012	4:01:16 PM	Main Vac valve closed
11/30/2012	4:01:16 PM	Bypass valve closed
11/30/2012	4:01:16 PM	H2 valve opened
11/30/2012	4:01:16 PM	Bubbler valve opened
11/30/2012	4:01:16 PM	Helium MFC set to  0.000000
11/30/2012	4:01:16 PM	H2 MFC set to  500.000000
11/30/2012	4:01:16 PM	BCl3 MFC set to  0.000000
11/30/2012	4:01:16 PM	PH3 MFC set to  0.000000
11/30/2012	4:01:16 PM	SiCl4 MFC set to  0.000000
11/30/2012	4:01:16 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	4:01:16 PM	Tube furnace set to 950
11/30/2012	4:04:16 PM	Helium valve closed
11/30/2012	4:04:16 PM	BCl3 valve closed
11/30/2012	4:04:16 PM	PH3 valve closed
11/30/2012	4:04:16 PM	SiCl4 pre valve closed
11/30/2012	4:04:16 PM	SiCl4 post valve closed
11/30/2012	4:04:16 PM	Main Vac valve closed
11/30/2012	4:04:16 PM	Bypass valve closed
11/30/2012	4:04:16 PM	H2 valve opened
11/30/2012	4:04:16 PM	Bubbler valve opened
11/30/2012	4:04:16 PM	Helium MFC set to  0.000000
11/30/2012	4:04:16 PM	H2 MFC set to  500.000000
11/30/2012	4:04:16 PM	BCl3 MFC set to  0.000000
11/30/2012	4:04:16 PM	PH3 MFC set to  0.000000
11/30/2012	4:04:16 PM	SiCl4 MFC set to  0.000000
11/30/2012	4:04:16 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	4:04:16 PM	Tube furnace set to 900
11/30/2012	4:07:16 PM	Helium valve closed
11/30/2012	4:07:16 PM	BCl3 valve closed
11/30/2012	4:07:16 PM	PH3 valve closed
11/30/2012	4:07:16 PM	SiCl4 pre valve closed
11/30/2012	4:07:16 PM	SiCl4 post valve closed
11/30/2012	4:07:16 PM	Main Vac valve closed
11/30/2012	4:07:16 PM	Bypass valve closed
11/30/2012	4:07:16 PM	H2 valve opened
11/30/2012	4:07:16 PM	Bubbler valve opened
11/30/2012	4:07:16 PM	Helium MFC set to  0.000000
11/30/2012	4:07:16 PM	H2 MFC set to  500.000000
11/30/2012	4:07:16 PM	BCl3 MFC set to  0.000000
11/30/2012	4:07:16 PM	PH3 MFC set to  0.000000
11/30/2012	4:07:16 PM	SiCl4 MFC set to  0.000000
11/30/2012	4:07:16 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	4:07:16 PM	Tube furnace set to 850
11/30/2012	4:10:16 PM	Helium valve closed
11/30/2012	4:10:16 PM	BCl3 valve closed
11/30/2012	4:10:16 PM	PH3 valve closed
11/30/2012	4:10:16 PM	SiCl4 pre valve closed
11/30/2012	4:10:16 PM	SiCl4 post valve closed
11/30/2012	4:10:16 PM	Main Vac valve closed
11/30/2012	4:10:16 PM	Bypass valve closed
11/30/2012	4:10:16 PM	H2 valve opened
11/30/2012	4:10:16 PM	Bubbler valve opened
11/30/2012	4:10:16 PM	Helium MFC set to  0.000000
11/30/2012	4:10:16 PM	H2 MFC set to  500.000000
11/30/2012	4:10:16 PM	BCl3 MFC set to  0.000000
11/30/2012	4:10:16 PM	PH3 MFC set to  0.000000
11/30/2012	4:10:16 PM	SiCl4 MFC set to  0.000000
11/30/2012	4:10:16 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	4:10:17 PM	Tube furnace set to 800
11/30/2012	4:13:17 PM	Helium valve closed
11/30/2012	4:13:17 PM	BCl3 valve closed
11/30/2012	4:13:17 PM	PH3 valve closed
11/30/2012	4:13:17 PM	SiCl4 pre valve closed
11/30/2012	4:13:17 PM	SiCl4 post valve closed
11/30/2012	4:13:17 PM	Main Vac valve closed
11/30/2012	4:13:17 PM	Bypass valve closed
11/30/2012	4:13:17 PM	H2 valve opened
11/30/2012	4:13:17 PM	Bubbler valve opened
11/30/2012	4:13:17 PM	Helium MFC set to  0.000000
11/30/2012	4:13:17 PM	H2 MFC set to  500.000000
11/30/2012	4:13:17 PM	BCl3 MFC set to  0.000000
11/30/2012	4:13:17 PM	PH3 MFC set to  0.000000
11/30/2012	4:13:17 PM	SiCl4 MFC set to  0.000000
11/30/2012	4:13:17 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	4:13:17 PM	Tube furnace set to 750
11/30/2012	4:16:17 PM	H2 valve closed
11/30/2012	4:16:17 PM	BCl3 valve closed
11/30/2012	4:16:17 PM	PH3 valve closed
11/30/2012	4:16:17 PM	SiCl4 pre valve closed
11/30/2012	4:16:17 PM	SiCl4 post valve closed
11/30/2012	4:16:17 PM	Main Vac valve closed
11/30/2012	4:16:17 PM	Bypass valve closed
11/30/2012	4:16:17 PM	Helium valve opened
11/30/2012	4:16:17 PM	Bubbler valve opened
11/30/2012	4:16:17 PM	Helium MFC set to  500.000000
11/30/2012	4:16:17 PM	H2 MFC set to  0.000000
11/30/2012	4:16:17 PM	BCl3 MFC set to  0.000000
11/30/2012	4:16:17 PM	PH3 MFC set to  0.000000
11/30/2012	4:16:17 PM	SiCl4 MFC set to  0.000000
11/30/2012	4:16:17 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	4:16:17 PM	Tube furnace set to 0
11/30/2012	4:36:17 PM	Helium valve closed
11/30/2012	4:36:17 PM	H2 valve closed
11/30/2012	4:36:17 PM	BCl3 valve closed
11/30/2012	4:36:17 PM	PH3 valve closed
11/30/2012	4:36:17 PM	SiCl4 pre valve closed
11/30/2012	4:36:17 PM	SiCl4 post valve closed
11/30/2012	4:36:17 PM	Main Vac valve closed
11/30/2012	4:36:17 PM	Bypass valve closed
11/30/2012	4:36:17 PM	Bubbler valve closed
11/30/2012	4:36:17 PM	Helium MFC set to  0.000000
11/30/2012	4:36:17 PM	H2 MFC set to  0.000000
11/30/2012	4:36:17 PM	BCl3 MFC set to  0.000000
11/30/2012	4:36:17 PM	PH3 MFC set to  0.000000
11/30/2012	4:36:17 PM	SiCl4 MFC set to  0.000000
11/30/2012	4:36:17 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	4:36:17 PM	Tube furnace set to 0
11/30/2012	4:42:54 PM	Run aborted at 4:42 PM
11/30/2012	4:42:54 PM	Helium valve closed
11/30/2012	4:42:54 PM	H2 valve closed
11/30/2012	4:42:54 PM	BCl3 valve closed
11/30/2012	4:42:54 PM	PH3 valve closed
11/30/2012	4:42:54 PM	SiCl4 pre valve closed
11/30/2012	4:42:54 PM	SiCl4 post valve closed
11/30/2012	4:42:54 PM	Bypass valve closed
11/30/2012	4:42:54 PM	Main Vac valve closed
11/30/2012	4:42:54 PM	Bubbler valve closed
11/30/2012	4:42:54 PM	Helium MFC set to  0.000000
11/30/2012	4:42:54 PM	H2 MFC set to  0.000000
11/30/2012	4:42:54 PM	BCl3 MFC set to  0.000000
11/30/2012	4:42:54 PM	PH3 MFC set to  0.000000
11/30/2012	4:42:54 PM	SiCl4 MFC set to  0.000000
11/30/2012	4:42:54 PM	Tube furnace set to 0
11/30/2012	4:53:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/30/2012	4:53:40 PM	Recipe started at 4:53 PM
11/30/2012	4:53:40 PM	Helium valve closed
11/30/2012	4:53:40 PM	H2 valve closed
11/30/2012	4:53:40 PM	BCl3 valve closed
11/30/2012	4:53:40 PM	PH3 valve closed
11/30/2012	4:53:40 PM	SiCl4 pre valve closed
11/30/2012	4:53:40 PM	SiCl4 post valve closed
11/30/2012	4:53:40 PM	Main Vac valve closed
11/30/2012	4:53:40 PM	Bubbler valve closed
11/30/2012	4:53:40 PM	Bypass valve opened
11/30/2012	4:53:40 PM	Helium MFC set to  0.000000
11/30/2012	4:53:40 PM	H2 MFC set to  0.000000
11/30/2012	4:53:40 PM	BCl3 MFC set to  0.000000
11/30/2012	4:53:40 PM	PH3 MFC set to  0.000000
11/30/2012	4:53:40 PM	SiCl4 MFC set to  0.000000
11/30/2012	4:53:40 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	4:53:40 PM	Tube furnace set to 0
11/30/2012	4:54:59 PM	Helium valve closed
11/30/2012	4:54:59 PM	H2 valve closed
11/30/2012	4:54:59 PM	BCl3 valve closed
11/30/2012	4:54:59 PM	PH3 valve closed
11/30/2012	4:54:59 PM	SiCl4 pre valve closed
11/30/2012	4:54:59 PM	SiCl4 post valve closed
11/30/2012	4:54:59 PM	Main Vac valve closed
11/30/2012	4:54:59 PM	Bubbler valve closed
11/30/2012	4:54:59 PM	Bypass valve opened
11/30/2012	4:54:59 PM	Helium MFC set to  0.000000
11/30/2012	4:54:59 PM	H2 MFC set to  0.000000
11/30/2012	4:54:59 PM	BCl3 MFC set to  0.000000
11/30/2012	4:54:59 PM	PH3 MFC set to  0.000000
11/30/2012	4:54:59 PM	SiCl4 MFC set to  0.000000
11/30/2012	4:54:59 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	4:55:00 PM	Tube furnace set to 0
11/30/2012	4:56:00 PM	Helium valve closed
11/30/2012	4:56:00 PM	H2 valve closed
11/30/2012	4:56:00 PM	BCl3 valve closed
11/30/2012	4:56:00 PM	PH3 valve closed
11/30/2012	4:56:00 PM	SiCl4 pre valve closed
11/30/2012	4:56:00 PM	SiCl4 post valve closed
11/30/2012	4:56:00 PM	Bypass valve closed
11/30/2012	4:56:00 PM	Bubbler valve closed
11/30/2012	4:56:00 PM	Main Vac valve opened
11/30/2012	4:56:00 PM	Helium MFC set to  0.000000
11/30/2012	4:56:00 PM	H2 MFC set to  0.000000
11/30/2012	4:56:00 PM	BCl3 MFC set to  0.000000
11/30/2012	4:56:00 PM	PH3 MFC set to  0.000000
11/30/2012	4:56:00 PM	SiCl4 MFC set to  0.000000
11/30/2012	4:56:00 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	4:56:00 PM	Tube furnace set to 0
11/30/2012	4:56:01 PM	Run finished at 4:56 PM
11/30/2012	4:56:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/30/2012	5:05:43 PM	Recipe started at 5:05 PM
11/30/2012	5:05:43 PM	Helium valve closed
11/30/2012	5:05:43 PM	H2 valve closed
11/30/2012	5:05:43 PM	BCl3 valve closed
11/30/2012	5:05:43 PM	PH3 valve closed
11/30/2012	5:05:43 PM	SiCl4 pre valve closed
11/30/2012	5:05:43 PM	SiCl4 post valve closed
11/30/2012	5:05:43 PM	Bypass valve closed
11/30/2012	5:05:43 PM	Bubbler valve closed
11/30/2012	5:05:43 PM	Main Vac valve opened
11/30/2012	5:05:43 PM	Helium MFC set to  0.000000
11/30/2012	5:05:43 PM	H2 MFC set to  0.000000
11/30/2012	5:05:43 PM	BCl3 MFC set to  0.000000
11/30/2012	5:05:43 PM	PH3 MFC set to  0.000000
11/30/2012	5:05:43 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:05:43 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:05:44 PM	Tube furnace set to 150
11/30/2012	5:06:14 PM	H2 valve closed
11/30/2012	5:06:14 PM	BCl3 valve closed
11/30/2012	5:06:14 PM	PH3 valve closed
11/30/2012	5:06:14 PM	SiCl4 pre valve closed
11/30/2012	5:06:14 PM	SiCl4 post valve closed
11/30/2012	5:06:14 PM	Bypass valve closed
11/30/2012	5:06:14 PM	Bubbler valve closed
11/30/2012	5:06:14 PM	Helium valve opened
11/30/2012	5:06:14 PM	Main Vac valve opened
11/30/2012	5:06:14 PM	Helium MFC set to  20.000000
11/30/2012	5:06:14 PM	H2 MFC set to  0.000000
11/30/2012	5:06:14 PM	BCl3 MFC set to  0.000000
11/30/2012	5:06:14 PM	PH3 MFC set to  0.000000
11/30/2012	5:06:14 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:06:14 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:06:14 PM	Tube furnace set to 150
11/30/2012	5:06:44 PM	Helium valve closed
11/30/2012	5:06:44 PM	H2 valve closed
11/30/2012	5:06:44 PM	BCl3 valve closed
11/30/2012	5:06:44 PM	PH3 valve closed
11/30/2012	5:06:44 PM	SiCl4 pre valve closed
11/30/2012	5:06:44 PM	SiCl4 post valve closed
11/30/2012	5:06:44 PM	Bypass valve closed
11/30/2012	5:06:44 PM	Bubbler valve closed
11/30/2012	5:06:44 PM	Main Vac valve opened
11/30/2012	5:06:44 PM	Helium MFC set to  0.000000
11/30/2012	5:06:44 PM	H2 MFC set to  0.000000
11/30/2012	5:06:44 PM	BCl3 MFC set to  0.000000
11/30/2012	5:06:44 PM	PH3 MFC set to  0.000000
11/30/2012	5:06:44 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:06:44 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:06:44 PM	Tube furnace set to 150
11/30/2012	5:07:14 PM	H2 valve closed
11/30/2012	5:07:14 PM	BCl3 valve closed
11/30/2012	5:07:14 PM	PH3 valve closed
11/30/2012	5:07:14 PM	SiCl4 pre valve closed
11/30/2012	5:07:14 PM	SiCl4 post valve closed
11/30/2012	5:07:14 PM	Bypass valve closed
11/30/2012	5:07:14 PM	Bubbler valve closed
11/30/2012	5:07:14 PM	Helium valve opened
11/30/2012	5:07:14 PM	Main Vac valve opened
11/30/2012	5:07:14 PM	Helium MFC set to  20.000000
11/30/2012	5:07:14 PM	H2 MFC set to  0.000000
11/30/2012	5:07:14 PM	BCl3 MFC set to  0.000000
11/30/2012	5:07:14 PM	PH3 MFC set to  0.000000
11/30/2012	5:07:14 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:07:14 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:07:14 PM	Tube furnace set to 150
11/30/2012	5:07:44 PM	Helium valve closed
11/30/2012	5:07:44 PM	H2 valve closed
11/30/2012	5:07:44 PM	BCl3 valve closed
11/30/2012	5:07:44 PM	PH3 valve closed
11/30/2012	5:07:44 PM	SiCl4 pre valve closed
11/30/2012	5:07:44 PM	SiCl4 post valve closed
11/30/2012	5:07:44 PM	Bypass valve closed
11/30/2012	5:07:44 PM	Bubbler valve closed
11/30/2012	5:07:44 PM	Main Vac valve opened
11/30/2012	5:07:44 PM	Helium MFC set to  0.000000
11/30/2012	5:07:44 PM	H2 MFC set to  0.000000
11/30/2012	5:07:44 PM	BCl3 MFC set to  0.000000
11/30/2012	5:07:44 PM	PH3 MFC set to  0.000000
11/30/2012	5:07:44 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:07:44 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:07:45 PM	Tube furnace set to 150
11/30/2012	5:08:15 PM	H2 valve closed
11/30/2012	5:08:15 PM	BCl3 valve closed
11/30/2012	5:08:15 PM	PH3 valve closed
11/30/2012	5:08:15 PM	SiCl4 pre valve closed
11/30/2012	5:08:15 PM	SiCl4 post valve closed
11/30/2012	5:08:15 PM	Bypass valve closed
11/30/2012	5:08:15 PM	Bubbler valve closed
11/30/2012	5:08:15 PM	Helium valve opened
11/30/2012	5:08:15 PM	Main Vac valve opened
11/30/2012	5:08:15 PM	Helium MFC set to  20.000000
11/30/2012	5:08:15 PM	H2 MFC set to  0.000000
11/30/2012	5:08:15 PM	BCl3 MFC set to  0.000000
11/30/2012	5:08:15 PM	PH3 MFC set to  0.000000
11/30/2012	5:08:15 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:08:15 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:08:15 PM	Tube furnace set to 150
11/30/2012	5:08:45 PM	Helium valve closed
11/30/2012	5:08:45 PM	H2 valve closed
11/30/2012	5:08:45 PM	BCl3 valve closed
11/30/2012	5:08:45 PM	PH3 valve closed
11/30/2012	5:08:45 PM	SiCl4 pre valve closed
11/30/2012	5:08:45 PM	SiCl4 post valve closed
11/30/2012	5:08:45 PM	Bypass valve closed
11/30/2012	5:08:45 PM	Bubbler valve closed
11/30/2012	5:08:45 PM	Main Vac valve opened
11/30/2012	5:08:45 PM	Helium MFC set to  0.000000
11/30/2012	5:08:45 PM	H2 MFC set to  0.000000
11/30/2012	5:08:45 PM	BCl3 MFC set to  0.000000
11/30/2012	5:08:45 PM	PH3 MFC set to  0.000000
11/30/2012	5:08:45 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:08:45 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:08:45 PM	Tube furnace set to 150
11/30/2012	5:09:15 PM	H2 valve closed
11/30/2012	5:09:15 PM	BCl3 valve closed
11/30/2012	5:09:15 PM	PH3 valve closed
11/30/2012	5:09:15 PM	SiCl4 pre valve closed
11/30/2012	5:09:15 PM	SiCl4 post valve closed
11/30/2012	5:09:15 PM	Bypass valve closed
11/30/2012	5:09:15 PM	Bubbler valve closed
11/30/2012	5:09:15 PM	Helium valve opened
11/30/2012	5:09:15 PM	Main Vac valve opened
11/30/2012	5:09:15 PM	Helium MFC set to  20.000000
11/30/2012	5:09:15 PM	H2 MFC set to  0.000000
11/30/2012	5:09:15 PM	BCl3 MFC set to  0.000000
11/30/2012	5:09:15 PM	PH3 MFC set to  0.000000
11/30/2012	5:09:15 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:09:15 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:09:15 PM	Tube furnace set to 150
11/30/2012	5:09:45 PM	Helium valve closed
11/30/2012	5:09:45 PM	H2 valve closed
11/30/2012	5:09:45 PM	BCl3 valve closed
11/30/2012	5:09:45 PM	PH3 valve closed
11/30/2012	5:09:45 PM	SiCl4 pre valve closed
11/30/2012	5:09:45 PM	SiCl4 post valve closed
11/30/2012	5:09:45 PM	Bypass valve closed
11/30/2012	5:09:45 PM	Bubbler valve closed
11/30/2012	5:09:45 PM	Main Vac valve opened
11/30/2012	5:09:45 PM	Helium MFC set to  0.000000
11/30/2012	5:09:45 PM	H2 MFC set to  0.000000
11/30/2012	5:09:45 PM	BCl3 MFC set to  0.000000
11/30/2012	5:09:45 PM	PH3 MFC set to  0.000000
11/30/2012	5:09:45 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:09:45 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:09:45 PM	Tube furnace set to 150
11/30/2012	5:10:16 PM	H2 valve closed
11/30/2012	5:10:16 PM	BCl3 valve closed
11/30/2012	5:10:16 PM	PH3 valve closed
11/30/2012	5:10:16 PM	SiCl4 pre valve closed
11/30/2012	5:10:16 PM	SiCl4 post valve closed
11/30/2012	5:10:16 PM	Bypass valve closed
11/30/2012	5:10:16 PM	Bubbler valve closed
11/30/2012	5:10:16 PM	Helium valve opened
11/30/2012	5:10:16 PM	Main Vac valve opened
11/30/2012	5:10:16 PM	Helium MFC set to  20.000000
11/30/2012	5:10:16 PM	H2 MFC set to  0.000000
11/30/2012	5:10:16 PM	BCl3 MFC set to  0.000000
11/30/2012	5:10:16 PM	PH3 MFC set to  0.000000
11/30/2012	5:10:16 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:10:16 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:10:16 PM	Tube furnace set to 150
11/30/2012	5:10:46 PM	Helium valve closed
11/30/2012	5:10:46 PM	H2 valve closed
11/30/2012	5:10:46 PM	BCl3 valve closed
11/30/2012	5:10:46 PM	PH3 valve closed
11/30/2012	5:10:46 PM	SiCl4 pre valve closed
11/30/2012	5:10:46 PM	SiCl4 post valve closed
11/30/2012	5:10:46 PM	Bypass valve closed
11/30/2012	5:10:46 PM	Bubbler valve closed
11/30/2012	5:10:46 PM	Main Vac valve opened
11/30/2012	5:10:46 PM	Helium MFC set to  0.000000
11/30/2012	5:10:46 PM	H2 MFC set to  0.000000
11/30/2012	5:10:46 PM	BCl3 MFC set to  0.000000
11/30/2012	5:10:46 PM	PH3 MFC set to  0.000000
11/30/2012	5:10:46 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:10:46 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:10:46 PM	Tube furnace set to 150
11/30/2012	5:11:16 PM	H2 valve closed
11/30/2012	5:11:16 PM	BCl3 valve closed
11/30/2012	5:11:16 PM	PH3 valve closed
11/30/2012	5:11:16 PM	SiCl4 pre valve closed
11/30/2012	5:11:16 PM	SiCl4 post valve closed
11/30/2012	5:11:16 PM	Bypass valve closed
11/30/2012	5:11:16 PM	Bubbler valve closed
11/30/2012	5:11:16 PM	Helium valve opened
11/30/2012	5:11:16 PM	Main Vac valve opened
11/30/2012	5:11:16 PM	Helium MFC set to  20.000000
11/30/2012	5:11:16 PM	H2 MFC set to  0.000000
11/30/2012	5:11:16 PM	BCl3 MFC set to  0.000000
11/30/2012	5:11:16 PM	PH3 MFC set to  0.000000
11/30/2012	5:11:16 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:11:16 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:11:16 PM	Tube furnace set to 150
11/30/2012	5:11:46 PM	Helium valve closed
11/30/2012	5:11:46 PM	H2 valve closed
11/30/2012	5:11:46 PM	BCl3 valve closed
11/30/2012	5:11:46 PM	PH3 valve closed
11/30/2012	5:11:46 PM	SiCl4 pre valve closed
11/30/2012	5:11:46 PM	SiCl4 post valve closed
11/30/2012	5:11:46 PM	Bypass valve closed
11/30/2012	5:11:46 PM	Bubbler valve closed
11/30/2012	5:11:46 PM	Main Vac valve opened
11/30/2012	5:11:46 PM	Helium MFC set to  0.000000
11/30/2012	5:11:46 PM	H2 MFC set to  0.000000
11/30/2012	5:11:46 PM	BCl3 MFC set to  0.000000
11/30/2012	5:11:46 PM	PH3 MFC set to  0.000000
11/30/2012	5:11:46 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:11:46 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:11:46 PM	Tube furnace set to 150
11/30/2012	5:12:16 PM	H2 valve closed
11/30/2012	5:12:17 PM	BCl3 valve closed
11/30/2012	5:12:17 PM	PH3 valve closed
11/30/2012	5:12:17 PM	SiCl4 pre valve closed
11/30/2012	5:12:17 PM	SiCl4 post valve closed
11/30/2012	5:12:17 PM	Bypass valve closed
11/30/2012	5:12:17 PM	Bubbler valve closed
11/30/2012	5:12:17 PM	Helium valve opened
11/30/2012	5:12:17 PM	Main Vac valve opened
11/30/2012	5:12:17 PM	Helium MFC set to  20.000000
11/30/2012	5:12:17 PM	H2 MFC set to  0.000000
11/30/2012	5:12:17 PM	BCl3 MFC set to  0.000000
11/30/2012	5:12:17 PM	PH3 MFC set to  0.000000
11/30/2012	5:12:17 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:12:17 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:12:17 PM	Tube furnace set to 150
11/30/2012	5:12:47 PM	Helium valve closed
11/30/2012	5:12:47 PM	H2 valve closed
11/30/2012	5:12:47 PM	BCl3 valve closed
11/30/2012	5:12:47 PM	PH3 valve closed
11/30/2012	5:12:47 PM	SiCl4 pre valve closed
11/30/2012	5:12:47 PM	SiCl4 post valve closed
11/30/2012	5:12:47 PM	Bypass valve closed
11/30/2012	5:12:47 PM	Bubbler valve closed
11/30/2012	5:12:47 PM	Main Vac valve opened
11/30/2012	5:12:47 PM	Helium MFC set to  0.000000
11/30/2012	5:12:47 PM	H2 MFC set to  0.000000
11/30/2012	5:12:47 PM	BCl3 MFC set to  0.000000
11/30/2012	5:12:47 PM	PH3 MFC set to  0.000000
11/30/2012	5:12:47 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:12:47 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:12:47 PM	Tube furnace set to 150
11/30/2012	5:13:17 PM	H2 valve closed
11/30/2012	5:13:17 PM	BCl3 valve closed
11/30/2012	5:13:17 PM	PH3 valve closed
11/30/2012	5:13:17 PM	SiCl4 pre valve closed
11/30/2012	5:13:17 PM	SiCl4 post valve closed
11/30/2012	5:13:17 PM	Bypass valve closed
11/30/2012	5:13:17 PM	Bubbler valve closed
11/30/2012	5:13:17 PM	Helium valve opened
11/30/2012	5:13:17 PM	Main Vac valve opened
11/30/2012	5:13:17 PM	Helium MFC set to  20.000000
11/30/2012	5:13:17 PM	H2 MFC set to  0.000000
11/30/2012	5:13:17 PM	BCl3 MFC set to  0.000000
11/30/2012	5:13:17 PM	PH3 MFC set to  0.000000
11/30/2012	5:13:17 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:13:17 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:13:17 PM	Tube furnace set to 150
11/30/2012	5:13:47 PM	Helium valve closed
11/30/2012	5:13:47 PM	H2 valve closed
11/30/2012	5:13:47 PM	BCl3 valve closed
11/30/2012	5:13:47 PM	PH3 valve closed
11/30/2012	5:13:47 PM	SiCl4 pre valve closed
11/30/2012	5:13:47 PM	SiCl4 post valve closed
11/30/2012	5:13:47 PM	Bypass valve closed
11/30/2012	5:13:47 PM	Bubbler valve closed
11/30/2012	5:13:47 PM	Main Vac valve opened
11/30/2012	5:13:47 PM	Helium MFC set to  0.000000
11/30/2012	5:13:47 PM	H2 MFC set to  0.000000
11/30/2012	5:13:47 PM	BCl3 MFC set to  0.000000
11/30/2012	5:13:47 PM	PH3 MFC set to  0.000000
11/30/2012	5:13:47 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:13:47 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:13:47 PM	Tube furnace set to 150
11/30/2012	5:14:17 PM	H2 valve closed
11/30/2012	5:14:17 PM	BCl3 valve closed
11/30/2012	5:14:17 PM	PH3 valve closed
11/30/2012	5:14:17 PM	SiCl4 pre valve closed
11/30/2012	5:14:17 PM	SiCl4 post valve closed
11/30/2012	5:14:18 PM	Bypass valve closed
11/30/2012	5:14:18 PM	Bubbler valve closed
11/30/2012	5:14:18 PM	Helium valve opened
11/30/2012	5:14:18 PM	Main Vac valve opened
11/30/2012	5:14:18 PM	Helium MFC set to  20.000000
11/30/2012	5:14:18 PM	H2 MFC set to  0.000000
11/30/2012	5:14:18 PM	BCl3 MFC set to  0.000000
11/30/2012	5:14:18 PM	PH3 MFC set to  0.000000
11/30/2012	5:14:18 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:14:18 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:14:18 PM	Tube furnace set to 150
11/30/2012	5:14:48 PM	Helium valve closed
11/30/2012	5:14:48 PM	H2 valve closed
11/30/2012	5:14:48 PM	BCl3 valve closed
11/30/2012	5:14:48 PM	PH3 valve closed
11/30/2012	5:14:48 PM	SiCl4 pre valve closed
11/30/2012	5:14:48 PM	SiCl4 post valve closed
11/30/2012	5:14:48 PM	Bypass valve closed
11/30/2012	5:14:48 PM	Bubbler valve closed
11/30/2012	5:14:48 PM	Main Vac valve opened
11/30/2012	5:14:48 PM	Helium MFC set to  0.000000
11/30/2012	5:14:48 PM	H2 MFC set to  0.000000
11/30/2012	5:14:48 PM	BCl3 MFC set to  0.000000
11/30/2012	5:14:48 PM	PH3 MFC set to  0.000000
11/30/2012	5:14:48 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:14:48 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:14:48 PM	Tube furnace set to 150
11/30/2012	5:15:18 PM	H2 valve closed
11/30/2012	5:15:18 PM	BCl3 valve closed
11/30/2012	5:15:18 PM	PH3 valve closed
11/30/2012	5:15:18 PM	SiCl4 pre valve closed
11/30/2012	5:15:18 PM	SiCl4 post valve closed
11/30/2012	5:15:18 PM	Bypass valve closed
11/30/2012	5:15:18 PM	Bubbler valve closed
11/30/2012	5:15:18 PM	Helium valve opened
11/30/2012	5:15:18 PM	Main Vac valve opened
11/30/2012	5:15:18 PM	Helium MFC set to  20.000000
11/30/2012	5:15:18 PM	H2 MFC set to  0.000000
11/30/2012	5:15:18 PM	BCl3 MFC set to  0.000000
11/30/2012	5:15:18 PM	PH3 MFC set to  0.000000
11/30/2012	5:15:18 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:15:18 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:15:18 PM	Tube furnace set to 150
11/30/2012	5:15:48 PM	Helium valve closed
11/30/2012	5:15:48 PM	H2 valve closed
11/30/2012	5:15:48 PM	BCl3 valve closed
11/30/2012	5:15:48 PM	PH3 valve closed
11/30/2012	5:15:48 PM	SiCl4 pre valve closed
11/30/2012	5:15:48 PM	SiCl4 post valve closed
11/30/2012	5:15:48 PM	Bypass valve closed
11/30/2012	5:15:48 PM	Bubbler valve closed
11/30/2012	5:15:48 PM	Main Vac valve opened
11/30/2012	5:15:48 PM	Helium MFC set to  0.000000
11/30/2012	5:15:48 PM	H2 MFC set to  0.000000
11/30/2012	5:15:48 PM	BCl3 MFC set to  0.000000
11/30/2012	5:15:48 PM	PH3 MFC set to  0.000000
11/30/2012	5:15:48 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:15:48 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:15:48 PM	Tube furnace set to 150
11/30/2012	5:15:49 PM	Run finished at 5:15 PM
11/30/2012	5:28:48 PM	Main Vac valve closed
11/30/2012	5:29:03 PM	Main Vac valve opened
11/30/2012	5:29:21 PM	Recipe started at 5:29 PM
11/30/2012	5:29:21 PM	Helium valve closed
11/30/2012	5:29:21 PM	H2 valve closed
11/30/2012	5:29:21 PM	BCl3 valve closed
11/30/2012	5:29:21 PM	PH3 valve closed
11/30/2012	5:29:21 PM	SiCl4 pre valve closed
11/30/2012	5:29:21 PM	SiCl4 post valve closed
11/30/2012	5:29:21 PM	Bypass valve closed
11/30/2012	5:29:21 PM	Bubbler valve closed
11/30/2012	5:29:22 PM	Main Vac valve opened
11/30/2012	5:29:22 PM	Helium MFC set to  0.000000
11/30/2012	5:29:22 PM	H2 MFC set to  0.000000
11/30/2012	5:29:22 PM	BCl3 MFC set to  0.000000
11/30/2012	5:29:22 PM	PH3 MFC set to  0.000000
11/30/2012	5:29:22 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:29:22 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:29:22 PM	Tube furnace set to 150
11/30/2012	5:29:27 PM	H2 valve closed
11/30/2012	5:29:27 PM	BCl3 valve closed
11/30/2012	5:29:27 PM	PH3 valve closed
11/30/2012	5:29:27 PM	SiCl4 pre valve closed
11/30/2012	5:29:27 PM	SiCl4 post valve closed
11/30/2012	5:29:27 PM	Bypass valve closed
11/30/2012	5:29:27 PM	Bubbler valve closed
11/30/2012	5:29:27 PM	Helium valve opened
11/30/2012	5:29:27 PM	Main Vac valve opened
11/30/2012	5:29:28 PM	Helium MFC set to  20.000000
11/30/2012	5:29:28 PM	H2 MFC set to  0.000000
11/30/2012	5:29:28 PM	BCl3 MFC set to  0.000000
11/30/2012	5:29:28 PM	PH3 MFC set to  0.000000
11/30/2012	5:29:28 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:29:28 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:29:28 PM	Tube furnace set to 150
11/30/2012	5:29:58 PM	Helium valve closed
11/30/2012	5:29:58 PM	H2 valve closed
11/30/2012	5:29:58 PM	BCl3 valve closed
11/30/2012	5:29:58 PM	PH3 valve closed
11/30/2012	5:29:58 PM	SiCl4 pre valve closed
11/30/2012	5:29:58 PM	SiCl4 post valve closed
11/30/2012	5:29:58 PM	Bypass valve closed
11/30/2012	5:29:58 PM	Bubbler valve closed
11/30/2012	5:29:58 PM	Main Vac valve opened
11/30/2012	5:29:58 PM	Helium MFC set to  0.000000
11/30/2012	5:29:58 PM	H2 MFC set to  0.000000
11/30/2012	5:29:58 PM	BCl3 MFC set to  0.000000
11/30/2012	5:29:58 PM	PH3 MFC set to  0.000000
11/30/2012	5:29:58 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:29:58 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:29:58 PM	Tube furnace set to 150
11/30/2012	5:30:28 PM	H2 valve closed
11/30/2012	5:30:28 PM	BCl3 valve closed
11/30/2012	5:30:28 PM	PH3 valve closed
11/30/2012	5:30:28 PM	SiCl4 pre valve closed
11/30/2012	5:30:28 PM	SiCl4 post valve closed
11/30/2012	5:30:28 PM	Bypass valve closed
11/30/2012	5:30:28 PM	Bubbler valve closed
11/30/2012	5:30:28 PM	Helium valve opened
11/30/2012	5:30:28 PM	Main Vac valve opened
11/30/2012	5:30:28 PM	Helium MFC set to  20.000000
11/30/2012	5:30:28 PM	H2 MFC set to  0.000000
11/30/2012	5:30:28 PM	BCl3 MFC set to  0.000000
11/30/2012	5:30:28 PM	PH3 MFC set to  0.000000
11/30/2012	5:30:28 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:30:28 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:30:28 PM	Tube furnace set to 150
11/30/2012	5:30:58 PM	Helium valve closed
11/30/2012	5:30:58 PM	H2 valve closed
11/30/2012	5:30:58 PM	BCl3 valve closed
11/30/2012	5:30:58 PM	PH3 valve closed
11/30/2012	5:30:58 PM	SiCl4 pre valve closed
11/30/2012	5:30:58 PM	SiCl4 post valve closed
11/30/2012	5:30:58 PM	Bypass valve closed
11/30/2012	5:30:58 PM	Bubbler valve closed
11/30/2012	5:30:58 PM	Main Vac valve opened
11/30/2012	5:30:58 PM	Helium MFC set to  0.000000
11/30/2012	5:30:58 PM	H2 MFC set to  0.000000
11/30/2012	5:30:58 PM	BCl3 MFC set to  0.000000
11/30/2012	5:30:58 PM	PH3 MFC set to  0.000000
11/30/2012	5:30:58 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:30:58 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:30:58 PM	Tube furnace set to 150
11/30/2012	5:31:28 PM	H2 valve closed
11/30/2012	5:31:28 PM	BCl3 valve closed
11/30/2012	5:31:28 PM	PH3 valve closed
11/30/2012	5:31:28 PM	SiCl4 pre valve closed
11/30/2012	5:31:28 PM	SiCl4 post valve closed
11/30/2012	5:31:28 PM	Bypass valve closed
11/30/2012	5:31:28 PM	Bubbler valve closed
11/30/2012	5:31:28 PM	Helium valve opened
11/30/2012	5:31:28 PM	Main Vac valve opened
11/30/2012	5:31:28 PM	Helium MFC set to  20.000000
11/30/2012	5:31:28 PM	H2 MFC set to  0.000000
11/30/2012	5:31:29 PM	BCl3 MFC set to  0.000000
11/30/2012	5:31:29 PM	PH3 MFC set to  0.000000
11/30/2012	5:31:29 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:31:29 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:31:29 PM	Tube furnace set to 150
11/30/2012	5:31:59 PM	Helium valve closed
11/30/2012	5:31:59 PM	H2 valve closed
11/30/2012	5:31:59 PM	BCl3 valve closed
11/30/2012	5:31:59 PM	PH3 valve closed
11/30/2012	5:31:59 PM	SiCl4 pre valve closed
11/30/2012	5:31:59 PM	SiCl4 post valve closed
11/30/2012	5:31:59 PM	Bypass valve closed
11/30/2012	5:31:59 PM	Bubbler valve closed
11/30/2012	5:31:59 PM	Main Vac valve opened
11/30/2012	5:31:59 PM	Helium MFC set to  0.000000
11/30/2012	5:31:59 PM	H2 MFC set to  0.000000
11/30/2012	5:31:59 PM	BCl3 MFC set to  0.000000
11/30/2012	5:31:59 PM	PH3 MFC set to  0.000000
11/30/2012	5:31:59 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:31:59 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:31:59 PM	Tube furnace set to 150
11/30/2012	5:32:29 PM	H2 valve closed
11/30/2012	5:32:29 PM	BCl3 valve closed
11/30/2012	5:32:29 PM	PH3 valve closed
11/30/2012	5:32:29 PM	SiCl4 pre valve closed
11/30/2012	5:32:29 PM	SiCl4 post valve closed
11/30/2012	5:32:29 PM	Bypass valve closed
11/30/2012	5:32:29 PM	Bubbler valve closed
11/30/2012	5:32:29 PM	Helium valve opened
11/30/2012	5:32:29 PM	Main Vac valve opened
11/30/2012	5:32:29 PM	Helium MFC set to  20.000000
11/30/2012	5:32:29 PM	H2 MFC set to  0.000000
11/30/2012	5:32:29 PM	BCl3 MFC set to  0.000000
11/30/2012	5:32:29 PM	PH3 MFC set to  0.000000
11/30/2012	5:32:29 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:32:29 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:32:29 PM	Tube furnace set to 150
11/30/2012	5:32:59 PM	Helium valve closed
11/30/2012	5:32:59 PM	H2 valve closed
11/30/2012	5:32:59 PM	BCl3 valve closed
11/30/2012	5:32:59 PM	PH3 valve closed
11/30/2012	5:32:59 PM	SiCl4 pre valve closed
11/30/2012	5:32:59 PM	SiCl4 post valve closed
11/30/2012	5:32:59 PM	Bypass valve closed
11/30/2012	5:32:59 PM	Bubbler valve closed
11/30/2012	5:32:59 PM	Main Vac valve opened
11/30/2012	5:32:59 PM	Helium MFC set to  0.000000
11/30/2012	5:32:59 PM	H2 MFC set to  0.000000
11/30/2012	5:32:59 PM	BCl3 MFC set to  0.000000
11/30/2012	5:32:59 PM	PH3 MFC set to  0.000000
11/30/2012	5:32:59 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:32:59 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:32:59 PM	Tube furnace set to 150
11/30/2012	5:33:29 PM	H2 valve closed
11/30/2012	5:33:29 PM	BCl3 valve closed
11/30/2012	5:33:29 PM	PH3 valve closed
11/30/2012	5:33:29 PM	SiCl4 pre valve closed
11/30/2012	5:33:29 PM	SiCl4 post valve closed
11/30/2012	5:33:29 PM	Bypass valve closed
11/30/2012	5:33:29 PM	Bubbler valve closed
11/30/2012	5:33:29 PM	Helium valve opened
11/30/2012	5:33:29 PM	Main Vac valve opened
11/30/2012	5:33:29 PM	Helium MFC set to  20.000000
11/30/2012	5:33:29 PM	H2 MFC set to  0.000000
11/30/2012	5:33:29 PM	BCl3 MFC set to  0.000000
11/30/2012	5:33:29 PM	PH3 MFC set to  0.000000
11/30/2012	5:33:29 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:33:29 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:33:30 PM	Tube furnace set to 150
11/30/2012	5:34:00 PM	Helium valve closed
11/30/2012	5:34:00 PM	H2 valve closed
11/30/2012	5:34:00 PM	BCl3 valve closed
11/30/2012	5:34:00 PM	PH3 valve closed
11/30/2012	5:34:00 PM	SiCl4 pre valve closed
11/30/2012	5:34:00 PM	SiCl4 post valve closed
11/30/2012	5:34:00 PM	Bypass valve closed
11/30/2012	5:34:00 PM	Bubbler valve closed
11/30/2012	5:34:00 PM	Main Vac valve opened
11/30/2012	5:34:00 PM	Helium MFC set to  0.000000
11/30/2012	5:34:00 PM	H2 MFC set to  0.000000
11/30/2012	5:34:00 PM	BCl3 MFC set to  0.000000
11/30/2012	5:34:00 PM	PH3 MFC set to  0.000000
11/30/2012	5:34:00 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:34:00 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:34:00 PM	Tube furnace set to 150
11/30/2012	5:34:30 PM	H2 valve closed
11/30/2012	5:34:30 PM	BCl3 valve closed
11/30/2012	5:34:30 PM	PH3 valve closed
11/30/2012	5:34:30 PM	SiCl4 pre valve closed
11/30/2012	5:34:30 PM	SiCl4 post valve closed
11/30/2012	5:34:30 PM	Bypass valve closed
11/30/2012	5:34:30 PM	Bubbler valve closed
11/30/2012	5:34:30 PM	Helium valve opened
11/30/2012	5:34:30 PM	Main Vac valve opened
11/30/2012	5:34:30 PM	Helium MFC set to  20.000000
11/30/2012	5:34:30 PM	H2 MFC set to  0.000000
11/30/2012	5:34:30 PM	BCl3 MFC set to  0.000000
11/30/2012	5:34:30 PM	PH3 MFC set to  0.000000
11/30/2012	5:34:30 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:34:30 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:34:30 PM	Tube furnace set to 150
11/30/2012	5:35:00 PM	Helium valve closed
11/30/2012	5:35:00 PM	H2 valve closed
11/30/2012	5:35:00 PM	BCl3 valve closed
11/30/2012	5:35:00 PM	PH3 valve closed
11/30/2012	5:35:00 PM	SiCl4 pre valve closed
11/30/2012	5:35:00 PM	SiCl4 post valve closed
11/30/2012	5:35:00 PM	Bypass valve closed
11/30/2012	5:35:00 PM	Bubbler valve closed
11/30/2012	5:35:00 PM	Main Vac valve opened
11/30/2012	5:35:00 PM	Helium MFC set to  0.000000
11/30/2012	5:35:00 PM	H2 MFC set to  0.000000
11/30/2012	5:35:00 PM	BCl3 MFC set to  0.000000
11/30/2012	5:35:00 PM	PH3 MFC set to  0.000000
11/30/2012	5:35:00 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:35:00 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:35:00 PM	Tube furnace set to 150
11/30/2012	5:35:30 PM	H2 valve closed
11/30/2012	5:35:30 PM	BCl3 valve closed
11/30/2012	5:35:30 PM	PH3 valve closed
11/30/2012	5:35:30 PM	SiCl4 pre valve closed
11/30/2012	5:35:30 PM	SiCl4 post valve closed
11/30/2012	5:35:30 PM	Bypass valve closed
11/30/2012	5:35:30 PM	Bubbler valve closed
11/30/2012	5:35:30 PM	Helium valve opened
11/30/2012	5:35:30 PM	Main Vac valve opened
11/30/2012	5:35:30 PM	Helium MFC set to  20.000000
11/30/2012	5:35:30 PM	H2 MFC set to  0.000000
11/30/2012	5:35:30 PM	BCl3 MFC set to  0.000000
11/30/2012	5:35:30 PM	PH3 MFC set to  0.000000
11/30/2012	5:35:30 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:35:30 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:35:31 PM	Tube furnace set to 150
11/30/2012	5:36:01 PM	Helium valve closed
11/30/2012	5:36:01 PM	H2 valve closed
11/30/2012	5:36:01 PM	BCl3 valve closed
11/30/2012	5:36:01 PM	PH3 valve closed
11/30/2012	5:36:01 PM	SiCl4 pre valve closed
11/30/2012	5:36:01 PM	SiCl4 post valve closed
11/30/2012	5:36:01 PM	Bypass valve closed
11/30/2012	5:36:01 PM	Bubbler valve closed
11/30/2012	5:36:01 PM	Main Vac valve opened
11/30/2012	5:36:01 PM	Helium MFC set to  0.000000
11/30/2012	5:36:01 PM	H2 MFC set to  0.000000
11/30/2012	5:36:01 PM	BCl3 MFC set to  0.000000
11/30/2012	5:36:01 PM	PH3 MFC set to  0.000000
11/30/2012	5:36:01 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:36:01 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:36:01 PM	Tube furnace set to 150
11/30/2012	5:36:31 PM	H2 valve closed
11/30/2012	5:36:31 PM	BCl3 valve closed
11/30/2012	5:36:31 PM	PH3 valve closed
11/30/2012	5:36:31 PM	SiCl4 pre valve closed
11/30/2012	5:36:31 PM	SiCl4 post valve closed
11/30/2012	5:36:31 PM	Bypass valve closed
11/30/2012	5:36:31 PM	Bubbler valve closed
11/30/2012	5:36:31 PM	Helium valve opened
11/30/2012	5:36:31 PM	Main Vac valve opened
11/30/2012	5:36:31 PM	Helium MFC set to  20.000000
11/30/2012	5:36:31 PM	H2 MFC set to  0.000000
11/30/2012	5:36:31 PM	BCl3 MFC set to  0.000000
11/30/2012	5:36:31 PM	PH3 MFC set to  0.000000
11/30/2012	5:36:31 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:36:31 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:36:31 PM	Tube furnace set to 150
11/30/2012	5:37:01 PM	Helium valve closed
11/30/2012	5:37:01 PM	H2 valve closed
11/30/2012	5:37:01 PM	BCl3 valve closed
11/30/2012	5:37:01 PM	PH3 valve closed
11/30/2012	5:37:01 PM	SiCl4 pre valve closed
11/30/2012	5:37:01 PM	SiCl4 post valve closed
11/30/2012	5:37:01 PM	Bypass valve closed
11/30/2012	5:37:01 PM	Bubbler valve closed
11/30/2012	5:37:01 PM	Main Vac valve opened
11/30/2012	5:37:01 PM	Helium MFC set to  0.000000
11/30/2012	5:37:01 PM	H2 MFC set to  0.000000
11/30/2012	5:37:01 PM	BCl3 MFC set to  0.000000
11/30/2012	5:37:01 PM	PH3 MFC set to  0.000000
11/30/2012	5:37:01 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:37:01 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:37:01 PM	Tube furnace set to 150
11/30/2012	5:37:31 PM	H2 valve closed
11/30/2012	5:37:31 PM	BCl3 valve closed
11/30/2012	5:37:31 PM	PH3 valve closed
11/30/2012	5:37:31 PM	SiCl4 pre valve closed
11/30/2012	5:37:31 PM	SiCl4 post valve closed
11/30/2012	5:37:31 PM	Bypass valve closed
11/30/2012	5:37:31 PM	Bubbler valve closed
11/30/2012	5:37:31 PM	Helium valve opened
11/30/2012	5:37:31 PM	Main Vac valve opened
11/30/2012	5:37:31 PM	Helium MFC set to  20.000000
11/30/2012	5:37:31 PM	H2 MFC set to  0.000000
11/30/2012	5:37:31 PM	BCl3 MFC set to  0.000000
11/30/2012	5:37:31 PM	PH3 MFC set to  0.000000
11/30/2012	5:37:31 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:37:31 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:37:32 PM	Tube furnace set to 150
11/30/2012	5:38:02 PM	Helium valve closed
11/30/2012	5:38:02 PM	H2 valve closed
11/30/2012	5:38:02 PM	BCl3 valve closed
11/30/2012	5:38:02 PM	PH3 valve closed
11/30/2012	5:38:02 PM	SiCl4 pre valve closed
11/30/2012	5:38:02 PM	SiCl4 post valve closed
11/30/2012	5:38:02 PM	Bypass valve closed
11/30/2012	5:38:02 PM	Bubbler valve closed
11/30/2012	5:38:02 PM	Main Vac valve opened
11/30/2012	5:38:02 PM	Helium MFC set to  0.000000
11/30/2012	5:38:02 PM	H2 MFC set to  0.000000
11/30/2012	5:38:02 PM	BCl3 MFC set to  0.000000
11/30/2012	5:38:02 PM	PH3 MFC set to  0.000000
11/30/2012	5:38:02 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:38:02 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:38:02 PM	Tube furnace set to 150
11/30/2012	5:38:32 PM	H2 valve closed
11/30/2012	5:38:32 PM	BCl3 valve closed
11/30/2012	5:38:32 PM	PH3 valve closed
11/30/2012	5:38:32 PM	SiCl4 pre valve closed
11/30/2012	5:38:32 PM	SiCl4 post valve closed
11/30/2012	5:38:32 PM	Bypass valve closed
11/30/2012	5:38:32 PM	Bubbler valve closed
11/30/2012	5:38:32 PM	Helium valve opened
11/30/2012	5:38:32 PM	Main Vac valve opened
11/30/2012	5:38:32 PM	Helium MFC set to  20.000000
11/30/2012	5:38:32 PM	H2 MFC set to  0.000000
11/30/2012	5:38:32 PM	BCl3 MFC set to  0.000000
11/30/2012	5:38:32 PM	PH3 MFC set to  0.000000
11/30/2012	5:38:32 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:38:32 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:38:32 PM	Tube furnace set to 150
11/30/2012	5:39:02 PM	Helium valve closed
11/30/2012	5:39:02 PM	H2 valve closed
11/30/2012	5:39:02 PM	BCl3 valve closed
11/30/2012	5:39:02 PM	PH3 valve closed
11/30/2012	5:39:02 PM	SiCl4 pre valve closed
11/30/2012	5:39:02 PM	SiCl4 post valve closed
11/30/2012	5:39:02 PM	Bypass valve closed
11/30/2012	5:39:02 PM	Bubbler valve closed
11/30/2012	5:39:02 PM	Main Vac valve opened
11/30/2012	5:39:02 PM	Helium MFC set to  0.000000
11/30/2012	5:39:02 PM	H2 MFC set to  0.000000
11/30/2012	5:39:02 PM	BCl3 MFC set to  0.000000
11/30/2012	5:39:02 PM	PH3 MFC set to  0.000000
11/30/2012	5:39:02 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:39:02 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:39:02 PM	Tube furnace set to 150
11/30/2012	5:39:03 PM	Run finished at 5:39 PM
11/30/2012	5:48:37 PM	Main Vac valve closed
11/30/2012	5:48:53 PM	Main Vac valve opened
11/30/2012	5:49:30 PM	Recipe started at 5:49 PM
11/30/2012	5:49:31 PM	Helium valve closed
11/30/2012	5:49:31 PM	H2 valve closed
11/30/2012	5:49:31 PM	BCl3 valve closed
11/30/2012	5:49:31 PM	PH3 valve closed
11/30/2012	5:49:31 PM	SiCl4 pre valve closed
11/30/2012	5:49:31 PM	SiCl4 post valve closed
11/30/2012	5:49:31 PM	Bypass valve closed
11/30/2012	5:49:31 PM	Bubbler valve closed
11/30/2012	5:49:31 PM	Main Vac valve opened
11/30/2012	5:49:31 PM	Helium MFC set to  0.000000
11/30/2012	5:49:31 PM	H2 MFC set to  0.000000
11/30/2012	5:49:31 PM	BCl3 MFC set to  0.000000
11/30/2012	5:49:31 PM	PH3 MFC set to  0.000000
11/30/2012	5:49:31 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:49:31 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:49:31 PM	Tube furnace set to 150
11/30/2012	5:50:01 PM	H2 valve closed
11/30/2012	5:50:01 PM	BCl3 valve closed
11/30/2012	5:50:01 PM	PH3 valve closed
11/30/2012	5:50:01 PM	SiCl4 pre valve closed
11/30/2012	5:50:01 PM	SiCl4 post valve closed
11/30/2012	5:50:01 PM	Bypass valve closed
11/30/2012	5:50:01 PM	Bubbler valve closed
11/30/2012	5:50:01 PM	Helium valve opened
11/30/2012	5:50:01 PM	Main Vac valve opened
11/30/2012	5:50:01 PM	Helium MFC set to  20.000000
11/30/2012	5:50:01 PM	H2 MFC set to  0.000000
11/30/2012	5:50:01 PM	BCl3 MFC set to  0.000000
11/30/2012	5:50:01 PM	PH3 MFC set to  0.000000
11/30/2012	5:50:01 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:50:01 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:50:01 PM	Tube furnace set to 150
11/30/2012	5:50:31 PM	Helium valve closed
11/30/2012	5:50:31 PM	H2 valve closed
11/30/2012	5:50:31 PM	BCl3 valve closed
11/30/2012	5:50:31 PM	PH3 valve closed
11/30/2012	5:50:31 PM	SiCl4 pre valve closed
11/30/2012	5:50:31 PM	SiCl4 post valve closed
11/30/2012	5:50:31 PM	Bypass valve closed
11/30/2012	5:50:31 PM	Bubbler valve closed
11/30/2012	5:50:31 PM	Main Vac valve opened
11/30/2012	5:50:31 PM	Helium MFC set to  0.000000
11/30/2012	5:50:31 PM	H2 MFC set to  0.000000
11/30/2012	5:50:31 PM	BCl3 MFC set to  0.000000
11/30/2012	5:50:31 PM	PH3 MFC set to  0.000000
11/30/2012	5:50:31 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:50:31 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:50:31 PM	Tube furnace set to 150
11/30/2012	5:51:01 PM	H2 valve closed
11/30/2012	5:51:01 PM	BCl3 valve closed
11/30/2012	5:51:01 PM	PH3 valve closed
11/30/2012	5:51:01 PM	SiCl4 pre valve closed
11/30/2012	5:51:01 PM	SiCl4 post valve closed
11/30/2012	5:51:01 PM	Bypass valve closed
11/30/2012	5:51:01 PM	Bubbler valve closed
11/30/2012	5:51:01 PM	Helium valve opened
11/30/2012	5:51:01 PM	Main Vac valve opened
11/30/2012	5:51:01 PM	Helium MFC set to  20.000000
11/30/2012	5:51:01 PM	H2 MFC set to  0.000000
11/30/2012	5:51:01 PM	BCl3 MFC set to  0.000000
11/30/2012	5:51:01 PM	PH3 MFC set to  0.000000
11/30/2012	5:51:01 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:51:01 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:51:01 PM	Tube furnace set to 150
11/30/2012	5:51:31 PM	Helium valve closed
11/30/2012	5:51:31 PM	H2 valve closed
11/30/2012	5:51:31 PM	BCl3 valve closed
11/30/2012	5:51:32 PM	PH3 valve closed
11/30/2012	5:51:32 PM	SiCl4 pre valve closed
11/30/2012	5:51:32 PM	SiCl4 post valve closed
11/30/2012	5:51:32 PM	Bypass valve closed
11/30/2012	5:51:32 PM	Bubbler valve closed
11/30/2012	5:51:32 PM	Main Vac valve opened
11/30/2012	5:51:32 PM	Helium MFC set to  0.000000
11/30/2012	5:51:32 PM	H2 MFC set to  0.000000
11/30/2012	5:51:32 PM	BCl3 MFC set to  0.000000
11/30/2012	5:51:32 PM	PH3 MFC set to  0.000000
11/30/2012	5:51:32 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:51:32 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:51:32 PM	Tube furnace set to 150
11/30/2012	5:52:02 PM	H2 valve closed
11/30/2012	5:52:02 PM	BCl3 valve closed
11/30/2012	5:52:02 PM	PH3 valve closed
11/30/2012	5:52:02 PM	SiCl4 pre valve closed
11/30/2012	5:52:02 PM	SiCl4 post valve closed
11/30/2012	5:52:02 PM	Bypass valve closed
11/30/2012	5:52:02 PM	Bubbler valve closed
11/30/2012	5:52:02 PM	Helium valve opened
11/30/2012	5:52:02 PM	Main Vac valve opened
11/30/2012	5:52:02 PM	Helium MFC set to  20.000000
11/30/2012	5:52:02 PM	H2 MFC set to  0.000000
11/30/2012	5:52:02 PM	BCl3 MFC set to  0.000000
11/30/2012	5:52:02 PM	PH3 MFC set to  0.000000
11/30/2012	5:52:02 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:52:02 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:52:02 PM	Tube furnace set to 150
11/30/2012	5:52:32 PM	Helium valve closed
11/30/2012	5:52:32 PM	H2 valve closed
11/30/2012	5:52:32 PM	BCl3 valve closed
11/30/2012	5:52:32 PM	PH3 valve closed
11/30/2012	5:52:32 PM	SiCl4 pre valve closed
11/30/2012	5:52:32 PM	SiCl4 post valve closed
11/30/2012	5:52:32 PM	Bypass valve closed
11/30/2012	5:52:32 PM	Bubbler valve closed
11/30/2012	5:52:32 PM	Main Vac valve opened
11/30/2012	5:52:32 PM	Helium MFC set to  0.000000
11/30/2012	5:52:32 PM	H2 MFC set to  0.000000
11/30/2012	5:52:32 PM	BCl3 MFC set to  0.000000
11/30/2012	5:52:32 PM	PH3 MFC set to  0.000000
11/30/2012	5:52:32 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:52:32 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:52:32 PM	Tube furnace set to 150
11/30/2012	5:53:02 PM	H2 valve closed
11/30/2012	5:53:02 PM	BCl3 valve closed
11/30/2012	5:53:02 PM	PH3 valve closed
11/30/2012	5:53:02 PM	SiCl4 pre valve closed
11/30/2012	5:53:02 PM	SiCl4 post valve closed
11/30/2012	5:53:02 PM	Bypass valve closed
11/30/2012	5:53:02 PM	Bubbler valve closed
11/30/2012	5:53:02 PM	Helium valve opened
11/30/2012	5:53:02 PM	Main Vac valve opened
11/30/2012	5:53:02 PM	Helium MFC set to  20.000000
11/30/2012	5:53:02 PM	H2 MFC set to  0.000000
11/30/2012	5:53:02 PM	BCl3 MFC set to  0.000000
11/30/2012	5:53:02 PM	PH3 MFC set to  0.000000
11/30/2012	5:53:02 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:53:02 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:53:02 PM	Tube furnace set to 150
11/30/2012	5:53:32 PM	Helium valve closed
11/30/2012	5:53:33 PM	H2 valve closed
11/30/2012	5:53:33 PM	BCl3 valve closed
11/30/2012	5:53:33 PM	PH3 valve closed
11/30/2012	5:53:33 PM	SiCl4 pre valve closed
11/30/2012	5:53:33 PM	SiCl4 post valve closed
11/30/2012	5:53:33 PM	Bypass valve closed
11/30/2012	5:53:33 PM	Bubbler valve closed
11/30/2012	5:53:33 PM	Main Vac valve opened
11/30/2012	5:53:33 PM	Helium MFC set to  0.000000
11/30/2012	5:53:33 PM	H2 MFC set to  0.000000
11/30/2012	5:53:33 PM	BCl3 MFC set to  0.000000
11/30/2012	5:53:33 PM	PH3 MFC set to  0.000000
11/30/2012	5:53:33 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:53:33 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:53:33 PM	Tube furnace set to 150
11/30/2012	5:54:03 PM	H2 valve closed
11/30/2012	5:54:03 PM	BCl3 valve closed
11/30/2012	5:54:03 PM	PH3 valve closed
11/30/2012	5:54:03 PM	SiCl4 pre valve closed
11/30/2012	5:54:03 PM	SiCl4 post valve closed
11/30/2012	5:54:03 PM	Bypass valve closed
11/30/2012	5:54:03 PM	Bubbler valve closed
11/30/2012	5:54:03 PM	Helium valve opened
11/30/2012	5:54:03 PM	Main Vac valve opened
11/30/2012	5:54:03 PM	Helium MFC set to  20.000000
11/30/2012	5:54:03 PM	H2 MFC set to  0.000000
11/30/2012	5:54:03 PM	BCl3 MFC set to  0.000000
11/30/2012	5:54:03 PM	PH3 MFC set to  0.000000
11/30/2012	5:54:03 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:54:03 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:54:03 PM	Tube furnace set to 150
11/30/2012	5:54:33 PM	Helium valve closed
11/30/2012	5:54:33 PM	H2 valve closed
11/30/2012	5:54:33 PM	BCl3 valve closed
11/30/2012	5:54:33 PM	PH3 valve closed
11/30/2012	5:54:33 PM	SiCl4 pre valve closed
11/30/2012	5:54:33 PM	SiCl4 post valve closed
11/30/2012	5:54:33 PM	Bypass valve closed
11/30/2012	5:54:33 PM	Bubbler valve closed
11/30/2012	5:54:33 PM	Main Vac valve opened
11/30/2012	5:54:33 PM	Helium MFC set to  0.000000
11/30/2012	5:54:33 PM	H2 MFC set to  0.000000
11/30/2012	5:54:33 PM	BCl3 MFC set to  0.000000
11/30/2012	5:54:33 PM	PH3 MFC set to  0.000000
11/30/2012	5:54:33 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:54:33 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:54:33 PM	Tube furnace set to 150
11/30/2012	5:55:03 PM	H2 valve closed
11/30/2012	5:55:03 PM	BCl3 valve closed
11/30/2012	5:55:03 PM	PH3 valve closed
11/30/2012	5:55:03 PM	SiCl4 pre valve closed
11/30/2012	5:55:03 PM	SiCl4 post valve closed
11/30/2012	5:55:03 PM	Bypass valve closed
11/30/2012	5:55:03 PM	Bubbler valve closed
11/30/2012	5:55:03 PM	Helium valve opened
11/30/2012	5:55:03 PM	Main Vac valve opened
11/30/2012	5:55:03 PM	Helium MFC set to  20.000000
11/30/2012	5:55:03 PM	H2 MFC set to  0.000000
11/30/2012	5:55:03 PM	BCl3 MFC set to  0.000000
11/30/2012	5:55:03 PM	PH3 MFC set to  0.000000
11/30/2012	5:55:03 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:55:03 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:55:03 PM	Tube furnace set to 150
11/30/2012	5:55:33 PM	Helium valve closed
11/30/2012	5:55:33 PM	H2 valve closed
11/30/2012	5:55:33 PM	BCl3 valve closed
11/30/2012	5:55:33 PM	PH3 valve closed
11/30/2012	5:55:33 PM	SiCl4 pre valve closed
11/30/2012	5:55:34 PM	SiCl4 post valve closed
11/30/2012	5:55:34 PM	Bypass valve closed
11/30/2012	5:55:34 PM	Bubbler valve closed
11/30/2012	5:55:34 PM	Main Vac valve opened
11/30/2012	5:55:34 PM	Helium MFC set to  0.000000
11/30/2012	5:55:34 PM	H2 MFC set to  0.000000
11/30/2012	5:55:34 PM	BCl3 MFC set to  0.000000
11/30/2012	5:55:34 PM	PH3 MFC set to  0.000000
11/30/2012	5:55:34 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:55:34 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:55:34 PM	Tube furnace set to 150
11/30/2012	5:56:04 PM	H2 valve closed
11/30/2012	5:56:04 PM	BCl3 valve closed
11/30/2012	5:56:04 PM	PH3 valve closed
11/30/2012	5:56:04 PM	SiCl4 pre valve closed
11/30/2012	5:56:04 PM	SiCl4 post valve closed
11/30/2012	5:56:04 PM	Bypass valve closed
11/30/2012	5:56:04 PM	Bubbler valve closed
11/30/2012	5:56:04 PM	Helium valve opened
11/30/2012	5:56:04 PM	Main Vac valve opened
11/30/2012	5:56:04 PM	Helium MFC set to  20.000000
11/30/2012	5:56:04 PM	H2 MFC set to  0.000000
11/30/2012	5:56:04 PM	BCl3 MFC set to  0.000000
11/30/2012	5:56:04 PM	PH3 MFC set to  0.000000
11/30/2012	5:56:04 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:56:04 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:56:04 PM	Tube furnace set to 150
11/30/2012	5:56:34 PM	Helium valve closed
11/30/2012	5:56:34 PM	H2 valve closed
11/30/2012	5:56:34 PM	BCl3 valve closed
11/30/2012	5:56:34 PM	PH3 valve closed
11/30/2012	5:56:34 PM	SiCl4 pre valve closed
11/30/2012	5:56:34 PM	SiCl4 post valve closed
11/30/2012	5:56:34 PM	Bypass valve closed
11/30/2012	5:56:34 PM	Bubbler valve closed
11/30/2012	5:56:34 PM	Main Vac valve opened
11/30/2012	5:56:34 PM	Helium MFC set to  0.000000
11/30/2012	5:56:34 PM	H2 MFC set to  0.000000
11/30/2012	5:56:34 PM	BCl3 MFC set to  0.000000
11/30/2012	5:56:34 PM	PH3 MFC set to  0.000000
11/30/2012	5:56:34 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:56:34 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:56:34 PM	Tube furnace set to 150
11/30/2012	5:57:04 PM	H2 valve closed
11/30/2012	5:57:04 PM	BCl3 valve closed
11/30/2012	5:57:04 PM	PH3 valve closed
11/30/2012	5:57:04 PM	SiCl4 pre valve closed
11/30/2012	5:57:04 PM	SiCl4 post valve closed
11/30/2012	5:57:04 PM	Bypass valve closed
11/30/2012	5:57:04 PM	Bubbler valve closed
11/30/2012	5:57:04 PM	Helium valve opened
11/30/2012	5:57:04 PM	Main Vac valve opened
11/30/2012	5:57:04 PM	Helium MFC set to  20.000000
11/30/2012	5:57:04 PM	H2 MFC set to  0.000000
11/30/2012	5:57:04 PM	BCl3 MFC set to  0.000000
11/30/2012	5:57:04 PM	PH3 MFC set to  0.000000
11/30/2012	5:57:04 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:57:04 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:57:04 PM	Tube furnace set to 150
11/30/2012	5:57:34 PM	Helium valve closed
11/30/2012	5:57:34 PM	H2 valve closed
11/30/2012	5:57:34 PM	BCl3 valve closed
11/30/2012	5:57:34 PM	PH3 valve closed
11/30/2012	5:57:34 PM	SiCl4 pre valve closed
11/30/2012	5:57:34 PM	SiCl4 post valve closed
11/30/2012	5:57:34 PM	Bypass valve closed
11/30/2012	5:57:34 PM	Bubbler valve closed
11/30/2012	5:57:35 PM	Main Vac valve opened
11/30/2012	5:57:35 PM	Helium MFC set to  0.000000
11/30/2012	5:57:35 PM	H2 MFC set to  0.000000
11/30/2012	5:57:35 PM	BCl3 MFC set to  0.000000
11/30/2012	5:57:35 PM	PH3 MFC set to  0.000000
11/30/2012	5:57:35 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:57:35 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:57:35 PM	Tube furnace set to 150
11/30/2012	5:58:05 PM	H2 valve closed
11/30/2012	5:58:05 PM	BCl3 valve closed
11/30/2012	5:58:05 PM	PH3 valve closed
11/30/2012	5:58:05 PM	SiCl4 pre valve closed
11/30/2012	5:58:05 PM	SiCl4 post valve closed
11/30/2012	5:58:05 PM	Bypass valve closed
11/30/2012	5:58:05 PM	Bubbler valve closed
11/30/2012	5:58:05 PM	Helium valve opened
11/30/2012	5:58:05 PM	Main Vac valve opened
11/30/2012	5:58:05 PM	Helium MFC set to  20.000000
11/30/2012	5:58:05 PM	H2 MFC set to  0.000000
11/30/2012	5:58:05 PM	BCl3 MFC set to  0.000000
11/30/2012	5:58:05 PM	PH3 MFC set to  0.000000
11/30/2012	5:58:05 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:58:05 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:58:05 PM	Tube furnace set to 150
11/30/2012	5:58:35 PM	Helium valve closed
11/30/2012	5:58:35 PM	H2 valve closed
11/30/2012	5:58:35 PM	BCl3 valve closed
11/30/2012	5:58:35 PM	PH3 valve closed
11/30/2012	5:58:35 PM	SiCl4 pre valve closed
11/30/2012	5:58:35 PM	SiCl4 post valve closed
11/30/2012	5:58:35 PM	Bypass valve closed
11/30/2012	5:58:35 PM	Bubbler valve closed
11/30/2012	5:58:35 PM	Main Vac valve opened
11/30/2012	5:58:35 PM	Helium MFC set to  0.000000
11/30/2012	5:58:35 PM	H2 MFC set to  0.000000
11/30/2012	5:58:35 PM	BCl3 MFC set to  0.000000
11/30/2012	5:58:35 PM	PH3 MFC set to  0.000000
11/30/2012	5:58:35 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:58:35 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:58:35 PM	Tube furnace set to 150
11/30/2012	5:59:05 PM	H2 valve closed
11/30/2012	5:59:05 PM	BCl3 valve closed
11/30/2012	5:59:05 PM	PH3 valve closed
11/30/2012	5:59:05 PM	SiCl4 pre valve closed
11/30/2012	5:59:05 PM	SiCl4 post valve closed
11/30/2012	5:59:05 PM	Bypass valve closed
11/30/2012	5:59:05 PM	Bubbler valve closed
11/30/2012	5:59:05 PM	Helium valve opened
11/30/2012	5:59:05 PM	Main Vac valve opened
11/30/2012	5:59:05 PM	Helium MFC set to  20.000000
11/30/2012	5:59:05 PM	H2 MFC set to  0.000000
11/30/2012	5:59:05 PM	BCl3 MFC set to  0.000000
11/30/2012	5:59:05 PM	PH3 MFC set to  0.000000
11/30/2012	5:59:05 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:59:05 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:59:05 PM	Tube furnace set to 150
11/30/2012	5:59:35 PM	Helium valve closed
11/30/2012	5:59:35 PM	H2 valve closed
11/30/2012	5:59:35 PM	BCl3 valve closed
11/30/2012	5:59:35 PM	PH3 valve closed
11/30/2012	5:59:35 PM	SiCl4 pre valve closed
11/30/2012	5:59:35 PM	SiCl4 post valve closed
11/30/2012	5:59:35 PM	Bypass valve closed
11/30/2012	5:59:35 PM	Bubbler valve closed
11/30/2012	5:59:35 PM	Main Vac valve opened
11/30/2012	5:59:35 PM	Helium MFC set to  0.000000
11/30/2012	5:59:35 PM	H2 MFC set to  0.000000
11/30/2012	5:59:35 PM	BCl3 MFC set to  0.000000
11/30/2012	5:59:36 PM	PH3 MFC set to  0.000000
11/30/2012	5:59:36 PM	SiCl4 MFC set to  0.000000
11/30/2012	5:59:36 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	5:59:36 PM	Tube furnace set to 150
11/30/2012	5:59:37 PM	Run finished at 5:59 PM
11/30/2012	6:08:39 PM	Recipe started at 6:08 PM
11/30/2012	6:08:39 PM	Helium valve closed
11/30/2012	6:08:39 PM	H2 valve closed
11/30/2012	6:08:39 PM	BCl3 valve closed
11/30/2012	6:08:39 PM	PH3 valve closed
11/30/2012	6:08:39 PM	SiCl4 pre valve closed
11/30/2012	6:08:39 PM	SiCl4 post valve closed
11/30/2012	6:08:39 PM	Main Vac valve closed
11/30/2012	6:08:39 PM	Bypass valve closed
11/30/2012	6:08:39 PM	Bubbler valve closed
11/30/2012	6:08:39 PM	Helium MFC set to  0.000000
11/30/2012	6:08:39 PM	H2 MFC set to  0.000000
11/30/2012	6:08:39 PM	BCl3 MFC set to  0.000000
11/30/2012	6:08:39 PM	PH3 MFC set to  0.000000
11/30/2012	6:08:39 PM	SiCl4 MFC set to  0.000000
11/30/2012	6:08:39 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	6:08:39 PM	Tube furnace set to 150
11/30/2012	6:08:42 PM	Helium valve closed
11/30/2012	6:08:42 PM	BCl3 valve closed
11/30/2012	6:08:42 PM	PH3 valve closed
11/30/2012	6:08:42 PM	SiCl4 pre valve closed
11/30/2012	6:08:42 PM	SiCl4 post valve closed
11/30/2012	6:08:42 PM	Main Vac valve closed
11/30/2012	6:08:42 PM	Bypass valve closed
11/30/2012	6:08:42 PM	Bubbler valve closed
11/30/2012	6:08:42 PM	H2 valve opened
11/30/2012	6:08:42 PM	Helium MFC set to  0.000000
11/30/2012	6:08:42 PM	H2 MFC set to  500.000000
11/30/2012	6:08:42 PM	BCl3 MFC set to  0.000000
11/30/2012	6:08:42 PM	PH3 MFC set to  0.000000
11/30/2012	6:08:42 PM	SiCl4 MFC set to  0.000000
11/30/2012	6:08:42 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	6:08:42 PM	Tube furnace set to 150
11/30/2012	6:09:54 PM	Helium valve closed
11/30/2012	6:09:54 PM	BCl3 valve closed
11/30/2012	6:09:54 PM	PH3 valve closed
11/30/2012	6:09:54 PM	SiCl4 pre valve closed
11/30/2012	6:09:54 PM	SiCl4 post valve closed
11/30/2012	6:09:54 PM	Main Vac valve closed
11/30/2012	6:09:54 PM	Bypass valve closed
11/30/2012	6:09:54 PM	H2 valve opened
11/30/2012	6:09:54 PM	Bubbler valve opened
11/30/2012	6:09:54 PM	Helium MFC set to  0.000000
11/30/2012	6:09:54 PM	H2 MFC set to  500.000000
11/30/2012	6:09:54 PM	BCl3 MFC set to  0.000000
11/30/2012	6:09:54 PM	PH3 MFC set to  0.000000
11/30/2012	6:09:54 PM	SiCl4 MFC set to  0.000000
11/30/2012	6:09:54 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	6:09:55 PM	Tube furnace set to 150
11/30/2012	6:09:56 PM	Helium valve closed
11/30/2012	6:09:56 PM	BCl3 valve closed
11/30/2012	6:09:56 PM	PH3 valve closed
11/30/2012	6:09:56 PM	SiCl4 pre valve closed
11/30/2012	6:09:56 PM	SiCl4 post valve closed
11/30/2012	6:09:56 PM	Main Vac valve closed
11/30/2012	6:09:56 PM	Bypass valve closed
11/30/2012	6:09:56 PM	H2 valve opened
11/30/2012	6:09:56 PM	Bubbler valve opened
11/30/2012	6:09:56 PM	Helium MFC set to  0.000000
11/30/2012	6:09:56 PM	H2 MFC set to  500.000000
11/30/2012	6:09:56 PM	BCl3 MFC set to  0.000000
11/30/2012	6:09:56 PM	PH3 MFC set to  0.000000
11/30/2012	6:09:56 PM	SiCl4 MFC set to  0.000000
11/30/2012	6:09:56 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	6:09:56 PM	Tube furnace set to 1000
11/30/2012	6:29:56 PM	Helium valve closed
11/30/2012	6:29:56 PM	PH3 valve closed
11/30/2012	6:29:56 PM	Main Vac valve closed
11/30/2012	6:29:56 PM	Bypass valve closed
11/30/2012	6:29:56 PM	H2 valve opened
11/30/2012	6:29:56 PM	BCl3 valve opened
11/30/2012	6:29:56 PM	SiCl4 pre valve opened
11/30/2012	6:29:56 PM	SiCl4 post valve opened
11/30/2012	6:29:56 PM	Bubbler valve opened
11/30/2012	6:29:56 PM	Helium MFC set to  0.000000
11/30/2012	6:29:56 PM	H2 MFC set to  450.000000
11/30/2012	6:29:56 PM	BCl3 MFC set to  1.300000
11/30/2012	6:29:56 PM	PH3 MFC set to  0.000000
11/30/2012	6:29:56 PM	SiCl4 MFC set to  50.000000
11/30/2012	6:29:56 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	6:29:56 PM	Tube furnace set to 1000
11/30/2012	6:44:56 PM	Helium valve closed
11/30/2012	6:44:56 PM	BCl3 valve closed
11/30/2012	6:44:56 PM	Main Vac valve closed
11/30/2012	6:44:56 PM	Bypass valve closed
11/30/2012	6:44:56 PM	H2 valve opened
11/30/2012	6:44:56 PM	PH3 valve opened
11/30/2012	6:44:56 PM	SiCl4 pre valve opened
11/30/2012	6:44:56 PM	SiCl4 post valve opened
11/30/2012	6:44:56 PM	Bubbler valve opened
11/30/2012	6:44:56 PM	Helium MFC set to  0.000000
11/30/2012	6:44:56 PM	H2 MFC set to  450.000000
11/30/2012	6:44:56 PM	BCl3 MFC set to  0.000000
11/30/2012	6:44:56 PM	PH3 MFC set to  20.000000
11/30/2012	6:44:56 PM	SiCl4 MFC set to  50.000000
11/30/2012	6:44:56 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	6:44:56 PM	Tube furnace set to 1000
11/30/2012	6:49:56 PM	Helium valve closed
11/30/2012	6:49:56 PM	BCl3 valve closed
11/30/2012	6:49:56 PM	PH3 valve closed
11/30/2012	6:49:56 PM	SiCl4 pre valve closed
11/30/2012	6:49:56 PM	SiCl4 post valve closed
11/30/2012	6:49:56 PM	Main Vac valve closed
11/30/2012	6:49:56 PM	Bypass valve closed
11/30/2012	6:49:56 PM	H2 valve opened
11/30/2012	6:49:56 PM	Bubbler valve opened
11/30/2012	6:49:56 PM	Helium MFC set to  0.000000
11/30/2012	6:49:56 PM	H2 MFC set to  500.000000
11/30/2012	6:49:56 PM	BCl3 MFC set to  0.000000
11/30/2012	6:49:56 PM	PH3 MFC set to  0.000000
11/30/2012	6:49:56 PM	SiCl4 MFC set to  0.000000
11/30/2012	6:49:56 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	6:49:57 PM	Tube furnace set to 950
11/30/2012	6:52:57 PM	Helium valve closed
11/30/2012	6:52:57 PM	BCl3 valve closed
11/30/2012	6:52:57 PM	PH3 valve closed
11/30/2012	6:52:57 PM	SiCl4 pre valve closed
11/30/2012	6:52:57 PM	SiCl4 post valve closed
11/30/2012	6:52:57 PM	Main Vac valve closed
11/30/2012	6:52:57 PM	Bypass valve closed
11/30/2012	6:52:57 PM	H2 valve opened
11/30/2012	6:52:57 PM	Bubbler valve opened
11/30/2012	6:52:57 PM	Helium MFC set to  0.000000
11/30/2012	6:52:57 PM	H2 MFC set to  500.000000
11/30/2012	6:52:57 PM	BCl3 MFC set to  0.000000
11/30/2012	6:52:57 PM	PH3 MFC set to  0.000000
11/30/2012	6:52:57 PM	SiCl4 MFC set to  0.000000
11/30/2012	6:52:57 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	6:52:57 PM	Tube furnace set to 900
11/30/2012	6:55:57 PM	Helium valve closed
11/30/2012	6:55:57 PM	BCl3 valve closed
11/30/2012	6:55:57 PM	PH3 valve closed
11/30/2012	6:55:57 PM	SiCl4 pre valve closed
11/30/2012	6:55:57 PM	SiCl4 post valve closed
11/30/2012	6:55:57 PM	Main Vac valve closed
11/30/2012	6:55:57 PM	Bypass valve closed
11/30/2012	6:55:57 PM	H2 valve opened
11/30/2012	6:55:57 PM	Bubbler valve opened
11/30/2012	6:55:57 PM	Helium MFC set to  0.000000
11/30/2012	6:55:57 PM	H2 MFC set to  500.000000
11/30/2012	6:55:57 PM	BCl3 MFC set to  0.000000
11/30/2012	6:55:57 PM	PH3 MFC set to  0.000000
11/30/2012	6:55:57 PM	SiCl4 MFC set to  0.000000
11/30/2012	6:55:57 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	6:55:57 PM	Tube furnace set to 850
11/30/2012	6:58:57 PM	Helium valve closed
11/30/2012	6:58:57 PM	BCl3 valve closed
11/30/2012	6:58:57 PM	PH3 valve closed
11/30/2012	6:58:57 PM	SiCl4 pre valve closed
11/30/2012	6:58:57 PM	SiCl4 post valve closed
11/30/2012	6:58:57 PM	Main Vac valve closed
11/30/2012	6:58:57 PM	Bypass valve closed
11/30/2012	6:58:57 PM	H2 valve opened
11/30/2012	6:58:57 PM	Bubbler valve opened
11/30/2012	6:58:57 PM	Helium MFC set to  0.000000
11/30/2012	6:58:57 PM	H2 MFC set to  500.000000
11/30/2012	6:58:57 PM	BCl3 MFC set to  0.000000
11/30/2012	6:58:57 PM	PH3 MFC set to  0.000000
11/30/2012	6:58:57 PM	SiCl4 MFC set to  0.000000
11/30/2012	6:58:57 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	6:58:57 PM	Tube furnace set to 800
11/30/2012	7:01:57 PM	Helium valve closed
11/30/2012	7:01:57 PM	BCl3 valve closed
11/30/2012	7:01:57 PM	PH3 valve closed
11/30/2012	7:01:57 PM	SiCl4 pre valve closed
11/30/2012	7:01:57 PM	SiCl4 post valve closed
11/30/2012	7:01:57 PM	Main Vac valve closed
11/30/2012	7:01:57 PM	Bypass valve closed
11/30/2012	7:01:57 PM	H2 valve opened
11/30/2012	7:01:57 PM	Bubbler valve opened
11/30/2012	7:01:57 PM	Helium MFC set to  0.000000
11/30/2012	7:01:57 PM	H2 MFC set to  500.000000
11/30/2012	7:01:57 PM	BCl3 MFC set to  0.000000
11/30/2012	7:01:57 PM	PH3 MFC set to  0.000000
11/30/2012	7:01:57 PM	SiCl4 MFC set to  0.000000
11/30/2012	7:01:57 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:01:58 PM	Tube furnace set to 750
11/30/2012	7:04:58 PM	H2 valve closed
11/30/2012	7:04:58 PM	BCl3 valve closed
11/30/2012	7:04:58 PM	PH3 valve closed
11/30/2012	7:04:58 PM	SiCl4 pre valve closed
11/30/2012	7:04:58 PM	SiCl4 post valve closed
11/30/2012	7:04:58 PM	Main Vac valve closed
11/30/2012	7:04:58 PM	Bypass valve closed
11/30/2012	7:04:58 PM	Helium valve opened
11/30/2012	7:04:58 PM	Bubbler valve opened
11/30/2012	7:04:58 PM	Helium MFC set to  500.000000
11/30/2012	7:04:58 PM	H2 MFC set to  0.000000
11/30/2012	7:04:58 PM	BCl3 MFC set to  0.000000
11/30/2012	7:04:58 PM	PH3 MFC set to  0.000000
11/30/2012	7:04:58 PM	SiCl4 MFC set to  0.000000
11/30/2012	7:04:58 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:04:58 PM	Tube furnace set to 0
11/30/2012	7:24:58 PM	Helium valve closed
11/30/2012	7:24:58 PM	H2 valve closed
11/30/2012	7:24:58 PM	BCl3 valve closed
11/30/2012	7:24:58 PM	PH3 valve closed
11/30/2012	7:24:58 PM	SiCl4 pre valve closed
11/30/2012	7:24:58 PM	SiCl4 post valve closed
11/30/2012	7:24:58 PM	Main Vac valve closed
11/30/2012	7:24:58 PM	Bypass valve closed
11/30/2012	7:24:58 PM	Bubbler valve closed
11/30/2012	7:24:58 PM	Helium MFC set to  0.000000
11/30/2012	7:24:58 PM	H2 MFC set to  0.000000
11/30/2012	7:24:58 PM	BCl3 MFC set to  0.000000
11/30/2012	7:24:58 PM	PH3 MFC set to  0.000000
11/30/2012	7:24:58 PM	SiCl4 MFC set to  0.000000
11/30/2012	7:24:58 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:24:58 PM	Tube furnace set to 0
11/30/2012	7:44:17 PM	Run aborted at 7:44 PM
11/30/2012	7:44:17 PM	Helium valve closed
11/30/2012	7:44:17 PM	H2 valve closed
11/30/2012	7:44:17 PM	BCl3 valve closed
11/30/2012	7:44:17 PM	PH3 valve closed
11/30/2012	7:44:17 PM	SiCl4 pre valve closed
11/30/2012	7:44:17 PM	SiCl4 post valve closed
11/30/2012	7:44:17 PM	Bypass valve closed
11/30/2012	7:44:17 PM	Main Vac valve closed
11/30/2012	7:44:17 PM	Bubbler valve closed
11/30/2012	7:44:17 PM	Helium MFC set to  0.000000
11/30/2012	7:44:17 PM	H2 MFC set to  0.000000
11/30/2012	7:44:17 PM	BCl3 MFC set to  0.000000
11/30/2012	7:44:17 PM	PH3 MFC set to  0.000000
11/30/2012	7:44:17 PM	SiCl4 MFC set to  0.000000
11/30/2012	7:44:17 PM	Tube furnace set to 0
11/30/2012	7:52:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/30/2012	7:52:41 PM	Recipe started at 7:52 PM
11/30/2012	7:52:41 PM	Helium valve closed
11/30/2012	7:52:41 PM	H2 valve closed
11/30/2012	7:52:41 PM	BCl3 valve closed
11/30/2012	7:52:42 PM	PH3 valve closed
11/30/2012	7:52:42 PM	SiCl4 pre valve closed
11/30/2012	7:52:42 PM	SiCl4 post valve closed
11/30/2012	7:52:42 PM	Main Vac valve closed
11/30/2012	7:52:42 PM	Bubbler valve closed
11/30/2012	7:52:42 PM	Bypass valve opened
11/30/2012	7:52:42 PM	Helium MFC set to  0.000000
11/30/2012	7:52:42 PM	H2 MFC set to  0.000000
11/30/2012	7:52:42 PM	BCl3 MFC set to  0.000000
11/30/2012	7:52:42 PM	PH3 MFC set to  0.000000
11/30/2012	7:52:42 PM	SiCl4 MFC set to  0.000000
11/30/2012	7:52:42 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:52:42 PM	Tube furnace set to 0
11/30/2012	7:54:01 PM	Helium valve closed
11/30/2012	7:54:01 PM	H2 valve closed
11/30/2012	7:54:01 PM	BCl3 valve closed
11/30/2012	7:54:01 PM	PH3 valve closed
11/30/2012	7:54:01 PM	SiCl4 pre valve closed
11/30/2012	7:54:01 PM	SiCl4 post valve closed
11/30/2012	7:54:01 PM	Main Vac valve closed
11/30/2012	7:54:01 PM	Bubbler valve closed
11/30/2012	7:54:01 PM	Bypass valve opened
11/30/2012	7:54:01 PM	Helium MFC set to  0.000000
11/30/2012	7:54:01 PM	H2 MFC set to  0.000000
11/30/2012	7:54:01 PM	BCl3 MFC set to  0.000000
11/30/2012	7:54:01 PM	PH3 MFC set to  0.000000
11/30/2012	7:54:01 PM	SiCl4 MFC set to  0.000000
11/30/2012	7:54:01 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:54:01 PM	Tube furnace set to 0
11/30/2012	7:55:01 PM	Helium valve closed
11/30/2012	7:55:01 PM	H2 valve closed
11/30/2012	7:55:01 PM	BCl3 valve closed
11/30/2012	7:55:02 PM	PH3 valve closed
11/30/2012	7:55:02 PM	SiCl4 pre valve closed
11/30/2012	7:55:02 PM	SiCl4 post valve closed
11/30/2012	7:55:02 PM	Bypass valve closed
11/30/2012	7:55:02 PM	Bubbler valve closed
11/30/2012	7:55:02 PM	Main Vac valve opened
11/30/2012	7:55:02 PM	Helium MFC set to  0.000000
11/30/2012	7:55:02 PM	H2 MFC set to  0.000000
11/30/2012	7:55:02 PM	BCl3 MFC set to  0.000000
11/30/2012	7:55:02 PM	PH3 MFC set to  0.000000
11/30/2012	7:55:02 PM	SiCl4 MFC set to  0.000000
11/30/2012	7:55:02 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	7:55:02 PM	Tube furnace set to 0
11/30/2012	7:55:03 PM	Run finished at 7:55 PM
11/30/2012	7:55:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/30/2012	8:20:04 PM	Recipe started at 8:20 PM
11/30/2012	8:20:04 PM	Helium valve closed
11/30/2012	8:20:04 PM	H2 valve closed
11/30/2012	8:20:04 PM	BCl3 valve closed
11/30/2012	8:20:04 PM	PH3 valve closed
11/30/2012	8:20:04 PM	SiCl4 pre valve closed
11/30/2012	8:20:04 PM	SiCl4 post valve closed
11/30/2012	8:20:04 PM	Bypass valve closed
11/30/2012	8:20:04 PM	Bubbler valve closed
11/30/2012	8:20:04 PM	Main Vac valve opened
11/30/2012	8:20:04 PM	Helium MFC set to  0.000000
11/30/2012	8:20:04 PM	H2 MFC set to  0.000000
11/30/2012	8:20:04 PM	BCl3 MFC set to  0.000000
11/30/2012	8:20:04 PM	PH3 MFC set to  0.000000
11/30/2012	8:20:04 PM	SiCl4 MFC set to  0.000000
11/30/2012	8:20:04 PM	Bypass solenoid MFC set to  0.000000
11/30/2012	8:20:04 PM	Tube furnace set to 150
